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Title: Microfabricated cylindrical ion trap

Abstract

A microscale cylindrical ion trap, having an inner radius of order one micron, can be fabricated using surface micromachining techniques and materials known to the integrated circuits manufacturing and microelectromechanical systems industries. Micromachining methods enable batch fabrication, reduced manufacturing costs, dimensional and positional precision, and monolithic integration of massive arrays of ion traps with microscale ion generation and detection devices. Massive arraying enables the microscale cylindrical ion trap to retain the resolution, sensitivity, and mass range advantages necessary for high chemical selectivity. The microscale CIT has a reduced ion mean free path, allowing operation at higher pressures with less expensive and less bulky vacuum pumping system, and with lower battery power than conventional- and miniature-sized ion traps. The reduced electrode voltage enables integration of the microscale cylindrical ion trap with on-chip integrated circuit-based rf operation and detection electronics (i.e., cell phone electronics). Therefore, the full performance advantages of microscale cylindrical ion traps can be realized in truly field portable, handheld microanalysis systems.

Inventors:
Issue Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175286
Patent Number(s):
6870158
Application Number:
10/456,310
Assignee:
Sandia Corporation
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats

Blain, Matthew G. Microfabricated cylindrical ion trap. United States: N. p., 2005. Web.
Blain, Matthew G. Microfabricated cylindrical ion trap. United States.
Blain, Matthew G. Tue . "Microfabricated cylindrical ion trap". United States. https://www.osti.gov/servlets/purl/1175286.
@article{osti_1175286,
title = {Microfabricated cylindrical ion trap},
author = {Blain, Matthew G.},
abstractNote = {A microscale cylindrical ion trap, having an inner radius of order one micron, can be fabricated using surface micromachining techniques and materials known to the integrated circuits manufacturing and microelectromechanical systems industries. Micromachining methods enable batch fabrication, reduced manufacturing costs, dimensional and positional precision, and monolithic integration of massive arrays of ion traps with microscale ion generation and detection devices. Massive arraying enables the microscale cylindrical ion trap to retain the resolution, sensitivity, and mass range advantages necessary for high chemical selectivity. The microscale CIT has a reduced ion mean free path, allowing operation at higher pressures with less expensive and less bulky vacuum pumping system, and with lower battery power than conventional- and miniature-sized ion traps. The reduced electrode voltage enables integration of the microscale cylindrical ion trap with on-chip integrated circuit-based rf operation and detection electronics (i.e., cell phone electronics). Therefore, the full performance advantages of microscale cylindrical ion traps can be realized in truly field portable, handheld microanalysis systems.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {3}
}

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Works referenced in this record:

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journal, May 2002


A Miniature Cylindrical Quadrupole Ion Trap:  Simulation and Experiment
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Analytical Performance of a Miniature Cylindrical Ion Trap Mass Spectrometer
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A Parallel Miniature Cylindrical Ion Trap Array
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journal, February 1998


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journal, December 1996


Electron impact ionization in a microion trap mass spectrometer
journal, October 1999


Silicon based quadrupole mass spectrometry using microelectromechanical systems
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  • https://doi.org/10.1116/1.1359172