Apparatus for generating partially coherent radiation
Abstract
Techniques for generating partially coherent radiation and particularly for converting effectively coherent radiation from a synchrotron to partially coherent EUV radiation suitable for projection lithography.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175247
- Patent Number(s):
- 6859263
- Application Number:
- 10/377,947
- Assignee:
- EUV LLC (Santa Clara, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 07 ISOTOPE AND RADIATION SOURCES
Citation Formats
Naulleau, Patrick P. Apparatus for generating partially coherent radiation. United States: N. p., 2005.
Web.
Naulleau, Patrick P. Apparatus for generating partially coherent radiation. United States.
Naulleau, Patrick P. Tue .
"Apparatus for generating partially coherent radiation". United States. https://www.osti.gov/servlets/purl/1175247.
@article{osti_1175247,
title = {Apparatus for generating partially coherent radiation},
author = {Naulleau, Patrick P.},
abstractNote = {Techniques for generating partially coherent radiation and particularly for converting effectively coherent radiation from a synchrotron to partially coherent EUV radiation suitable for projection lithography.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {2}
}
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Works referenced in this record:
Characterization of the accuracy of EUV phase-shifting point diffraction interferometry
conference, June 1998
- Naulleau, Patrick P.; Goldberg, Kenneth A.; Lee, Sang Hun
- 23rd Annual International Symposium on Microlithography, SPIE Proceedings
Modification of the coherence of undulator radiation
journal, February 1995
- White, D. L.; Wood, O. R.; Bjorkholm, J. E.
- Review of Scientific Instruments, Vol. 66, Issue 2