Fabrication of precision optics using an imbedded reference surface
Abstract
The figure of a substrate is very precisely measured and a figured-correcting layer is provided on the substrate. The thickness of the figure-correcting layer is locally measured and compared to the first measurement. The local measurement of the figure-correcting layer is accomplished through a variety of methods, including interferometry and fluorescence or ultrasound measurements. Adjustments in the thickness of the figure-correcting layer are made until the top of the figure-correcting layer matches a desired figure specification.
- Inventors:
- Issue Date:
- Research Org.:
- Euv Limited Liability Corporation, Santa Clara, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175229
- Patent Number(s):
- 6849859
- Application Number:
- 09/817,334
- Assignee:
- Euv Limited Liability Corporation (Santa Clara, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Folta, James A., and Spiller, Eberhard. Fabrication of precision optics using an imbedded reference surface. United States: N. p., 2005.
Web.
Folta, James A., & Spiller, Eberhard. Fabrication of precision optics using an imbedded reference surface. United States.
Folta, James A., and Spiller, Eberhard. Tue .
"Fabrication of precision optics using an imbedded reference surface". United States. https://www.osti.gov/servlets/purl/1175229.
@article{osti_1175229,
title = {Fabrication of precision optics using an imbedded reference surface},
author = {Folta, James A. and Spiller, Eberhard},
abstractNote = {The figure of a substrate is very precisely measured and a figured-correcting layer is provided on the substrate. The thickness of the figure-correcting layer is locally measured and compared to the first measurement. The local measurement of the figure-correcting layer is accomplished through a variety of methods, including interferometry and fluorescence or ultrasound measurements. Adjustments in the thickness of the figure-correcting layer are made until the top of the figure-correcting layer matches a desired figure specification.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {2}
}