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Title: Fabrication of precision optics using an imbedded reference surface

Abstract

The figure of a substrate is very precisely measured and a figured-correcting layer is provided on the substrate. The thickness of the figure-correcting layer is locally measured and compared to the first measurement. The local measurement of the figure-correcting layer is accomplished through a variety of methods, including interferometry and fluorescence or ultrasound measurements. Adjustments in the thickness of the figure-correcting layer are made until the top of the figure-correcting layer matches a desired figure specification.

Inventors:
;
Issue Date:
Research Org.:
Euv Limited Liability Corporation, Santa Clara, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175229
Patent Number(s):
6849859
Application Number:
09/817,334
Assignee:
Euv Limited Liability Corporation (Santa Clara, CA)
Patent Classifications (CPCs):
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Folta, James A., and Spiller, Eberhard. Fabrication of precision optics using an imbedded reference surface. United States: N. p., 2005. Web.
Folta, James A., & Spiller, Eberhard. Fabrication of precision optics using an imbedded reference surface. United States.
Folta, James A., and Spiller, Eberhard. Tue . "Fabrication of precision optics using an imbedded reference surface". United States. https://www.osti.gov/servlets/purl/1175229.
@article{osti_1175229,
title = {Fabrication of precision optics using an imbedded reference surface},
author = {Folta, James A. and Spiller, Eberhard},
abstractNote = {The figure of a substrate is very precisely measured and a figured-correcting layer is provided on the substrate. The thickness of the figure-correcting layer is locally measured and compared to the first measurement. The local measurement of the figure-correcting layer is accomplished through a variety of methods, including interferometry and fluorescence or ultrasound measurements. Adjustments in the thickness of the figure-correcting layer are made until the top of the figure-correcting layer matches a desired figure specification.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {2}
}

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