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Title: Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers

Abstract

Figure errors are corrected on optical or other precision surfaces by changing the local density of material in a zone at or near the surface. Optical surface height is correlated with the localized density of the material within the same region. A change in the height of the optical surface can then be caused by a change in the localized density of the material at or near the surface.

Inventors:
; ;
Issue Date:
Research Org.:
EUV Limited Liability Corporation, Santa Clara, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175205
Patent Number(s):
6844272
Application Number:
10/086,922
Assignee:
EUV Limited Liability Corporation (Santa Clara, CA)
Patent Classifications (CPCs):
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Taylor, John S., Folta, James A., and Montcalm, Claude. Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers. United States: N. p., 2005. Web.
Taylor, John S., Folta, James A., & Montcalm, Claude. Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers. United States.
Taylor, John S., Folta, James A., and Montcalm, Claude. Tue . "Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers". United States. https://www.osti.gov/servlets/purl/1175205.
@article{osti_1175205,
title = {Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers},
author = {Taylor, John S. and Folta, James A. and Montcalm, Claude},
abstractNote = {Figure errors are corrected on optical or other precision surfaces by changing the local density of material in a zone at or near the surface. Optical surface height is correlated with the localized density of the material within the same region. A change in the height of the optical surface can then be caused by a change in the localized density of the material at or near the surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {1}
}

Patent:

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