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Title: Microfabricated teeter-totter resonator

Abstract

A microfabricated teeter-totter resonator comprises a frame, a paddle pivotably anchored to the frame by pivot arms that define an axis of rotation, a current conductor line on a surface of the paddle, means for applying a static magnetic field substantially perpendicular to the rotational axis and in the plane of the paddle, and means for energizing the current conductor line with an alternating current. A Lorentz force is generated by the interaction of the magnetic field with the current flowing in the conductor line, causing the paddle to oscillate about the axis of rotation. The teeter-totter resonator can be fabricated with micromachining techniques with materials used in the integrated circuits manufacturing industry. The microfabricated teeter-totter resonator has many varied applications, both as an actuation device and as a sensor. When used as a chemical sensor, a chemically sensitive coating can be disposed on one or both surfaces of the paddle to enhance the absorption of chemical analytes from a fluid stream. The resulting mass change can be detected as a change in the resonant frequency or phase of the oscillatory motion of the paddle.

Inventors:
; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175135
Patent Number(s):
6820469
Application Number:
10/436,597
Assignee:
Sandia Corporation
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01H - MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Adkins, Douglas Ray, Heller, Edwin J., and Shul, Randy J.. Microfabricated teeter-totter resonator. United States: N. p., 2004. Web.
Adkins, Douglas Ray, Heller, Edwin J., & Shul, Randy J.. Microfabricated teeter-totter resonator. United States.
Adkins, Douglas Ray, Heller, Edwin J., and Shul, Randy J.. Tue . "Microfabricated teeter-totter resonator". United States. https://www.osti.gov/servlets/purl/1175135.
@article{osti_1175135,
title = {Microfabricated teeter-totter resonator},
author = {Adkins, Douglas Ray and Heller, Edwin J. and Shul, Randy J.},
abstractNote = {A microfabricated teeter-totter resonator comprises a frame, a paddle pivotably anchored to the frame by pivot arms that define an axis of rotation, a current conductor line on a surface of the paddle, means for applying a static magnetic field substantially perpendicular to the rotational axis and in the plane of the paddle, and means for energizing the current conductor line with an alternating current. A Lorentz force is generated by the interaction of the magnetic field with the current flowing in the conductor line, causing the paddle to oscillate about the axis of rotation. The teeter-totter resonator can be fabricated with micromachining techniques with materials used in the integrated circuits manufacturing industry. The microfabricated teeter-totter resonator has many varied applications, both as an actuation device and as a sensor. When used as a chemical sensor, a chemically sensitive coating can be disposed on one or both surfaces of the paddle to enhance the absorption of chemical analytes from a fluid stream. The resulting mass change can be detected as a change in the resonant frequency or phase of the oscillatory motion of the paddle.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {11}
}

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Works referenced in this record:

Flexural plate wave resonator excited with Lorentz forces
journal, May 1998


Acoustic Wave Microsensor Arrays for Vapor Sensing
journal, July 2000


A high sensitivity, wide dynamic range magnetometer designed on a xylophone resonator
journal, October 1996


Gas sensing with acoustic devices
conference, January 1996