Electrical latching of microelectromechanical devices

Garcia, Ernest J.; Sleefe, Gerard E.

Title: Electrical latching of microelectromechanical devices

Abstract

Methods are disclosed for row and column addressing of an array of microelectromechanical (MEM) devices. The methods of the present invention are applicable to MEM micromirrors or memory elements and allow the MEM array to be programmed and maintained latched in a programmed state with a voltage that is generally lower than the voltage required for electrostatically switching the MEM devices.

Inventors:: Garcia, Ernest J.; Sleefe, Gerard E.

Issue Date:: 2004-11-02

Research Org.:: Sandia National Lab. (SNL-CA), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1175117

Patent Number(s):: 6813060

Application Number:: 10/316,172

Assignee:: Sandia Corporation

Patent Classifications (CPCs):: G - PHYSICS G09 - EDUCATION G09G - ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION

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G - PHYSICS G09 - EDUCATION G09G - ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
G09G3/346 - {based on modulation of the reflection angle, e.g. micromirrors

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Garcia, Ernest J., and Sleefe, Gerard E. Electrical latching of microelectromechanical devices.  United States: N. p., 2004. 
        Web.

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                    Garcia, Ernest J., & Sleefe, Gerard E. Electrical latching of microelectromechanical devices.  United States.

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                    Garcia, Ernest J., and Sleefe, Gerard E. Tue .  
        "Electrical latching of microelectromechanical devices".  United States.  https://www.osti.gov/servlets/purl/1175117.

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@article{osti_1175117,

  title        = {Electrical latching of microelectromechanical devices},

  author       = {Garcia, Ernest J. and Sleefe, Gerard E.},

  abstractNote = {Methods are disclosed for row and column addressing of an array of microelectromechanical (MEM) devices. The methods of the present invention are applicable to MEM micromirrors or memory elements and allow the MEM array to be programmed and maintained latched in a programmed state with a voltage that is generally lower than the voltage required for electrostatically switching the MEM devices.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2004},

  month        = {11}

}

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Works referenced in this record:

Silicon micromirrors and their prospective application in the Next-Generation Space Telescope
conference, November 2002

Garcia, Ernest J.; Polosky, Marc A.; Sleefe, Gerard E.
International Symposium on Optical Science and Technology, SPIE Proceedings
https://doi.org/10.1117/12.453829

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Title: Electrical latching of microelectromechanical devices

Abstract

Citation Formats

Silicon micromirrors and their prospective application in the Next-Generation Space Telescope conference, November 2002

Silicon micromirrors and their prospective application in the Next-Generation Space Telescope
conference, November 2002