Response microcantilever thermal detector
Abstract
A "folded leg" thermal detector microcantilever constructed of a substrate with at least one leg interposed between a fixed end and a deflective end, each leg having at least three essentially parallel leg segments interconnected on alternate opposing ends and aligned in a serpentine pattern with only the first leg segment attached to the fixed end and only the last leg segment attached to the deflective end. Alternate leg segment are coated on the pentalever with coating applied to the top of the first, third, and fifth leg segments of each leg and to the bottom of the second and fourth leg segments of each leg.
- Inventors:
- Issue Date:
- Research Org.:
- ~Individually Owned Patent
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175082
- Patent Number(s):
- 6805839
- Application Number:
- 09/811,234
- Assignee:
- Cunningham, Joseph P.; Rajic, Slobodan; Datskos, Panagiotis G.; Evans, III; Boyd M.
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC05-00OR22725
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Cunningham, Joseph P., Rajic, Slobodan, Datskos, Panagiotis G., and Evans III, Boyd M. Response microcantilever thermal detector. United States: N. p., 2004.
Web.
Cunningham, Joseph P., Rajic, Slobodan, Datskos, Panagiotis G., & Evans III, Boyd M. Response microcantilever thermal detector. United States.
Cunningham, Joseph P., Rajic, Slobodan, Datskos, Panagiotis G., and Evans III, Boyd M. Tue .
"Response microcantilever thermal detector". United States. https://www.osti.gov/servlets/purl/1175082.
@article{osti_1175082,
title = {Response microcantilever thermal detector},
author = {Cunningham, Joseph P. and Rajic, Slobodan and Datskos, Panagiotis G. and Evans III, Boyd M.},
abstractNote = {A "folded leg" thermal detector microcantilever constructed of a substrate with at least one leg interposed between a fixed end and a deflective end, each leg having at least three essentially parallel leg segments interconnected on alternate opposing ends and aligned in a serpentine pattern with only the first leg segment attached to the fixed end and only the last leg segment attached to the deflective end. Alternate leg segment are coated on the pentalever with coating applied to the top of the first, third, and fifth leg segments of each leg and to the bottom of the second and fourth leg segments of each leg.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {10}
}
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