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Title: Conductive and robust nitride buffer layers on biaxially textured substrates

Abstract

The present invention relates to epitaxial, electrically conducting and mechanically robust, cubic nitride buffer layers deposited epitaxially on biaxially textured substrates such as metal and alloys. The invention comprises of a biaxially textured substrate with epitaxial layers of nitrides. The invention also discloses a method to form such epitaxial layers using a high rate deposition method as well as without the use of forming gases. The invention further comprises epitaxial layers of oxides on the biaxially textured nitride layers. In some embodiments the article further comprises electromagnetic devices which may be super conducting properties.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175005
Patent Number(s):
6,784,139
Application Number:
09/895,866
Assignee:
Applied Thin Films, Inc. (Evanston, IL) OSTI
DOE Contract Number:  
ACO5-00OR22725
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Sankar, Sambasivan, Goyal, Amit, Barnett, Scott A., Kim, Ilwon, and Kroeger, Donald M. Conductive and robust nitride buffer layers on biaxially textured substrates. United States: N. p., 2004. Web.
Sankar, Sambasivan, Goyal, Amit, Barnett, Scott A., Kim, Ilwon, & Kroeger, Donald M. Conductive and robust nitride buffer layers on biaxially textured substrates. United States.
Sankar, Sambasivan, Goyal, Amit, Barnett, Scott A., Kim, Ilwon, and Kroeger, Donald M. Tue . "Conductive and robust nitride buffer layers on biaxially textured substrates". United States. https://www.osti.gov/servlets/purl/1175005.
@article{osti_1175005,
title = {Conductive and robust nitride buffer layers on biaxially textured substrates},
author = {Sankar, Sambasivan and Goyal, Amit and Barnett, Scott A. and Kim, Ilwon and Kroeger, Donald M.},
abstractNote = {The present invention relates to epitaxial, electrically conducting and mechanically robust, cubic nitride buffer layers deposited epitaxially on biaxially textured substrates such as metal and alloys. The invention comprises of a biaxially textured substrate with epitaxial layers of nitrides. The invention also discloses a method to form such epitaxial layers using a high rate deposition method as well as without the use of forming gases. The invention further comprises epitaxial layers of oxides on the biaxially textured nitride layers. In some embodiments the article further comprises electromagnetic devices which may be super conducting properties.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {8}
}

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