Method for making electro-fluidic connections in microfluidic devices
Abstract
A method for forming electro-fluidic interconnections in microfluidic devices comprises forming an electrical connection between matching bond pads on a die containing an active electrical element and a microfluidic substrate and forming a fluidic seal ring that circumscribes the active electrical element and a fluidic feedthrough. Preferably, the electrical connection and the seal ring are formed in a single bonding step. The simple method is particularly useful for chemical microanalytical systems wherein a plurality of microanalytical components, such as a chemical preconcentrator, a gas chromatography column, and a surface acoustic wave detector, are fluidically interconnected on a hybrid microfluidic substrate having electrical connection to external support electronics.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174973
- Patent Number(s):
- 6772513
- Application Number:
- 10/184,782
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Frye-Mason, Gregory C., Martinez, David, Manginell, Ronald P., Heller, Edwin J., and Chanchani, Rajen. Method for making electro-fluidic connections in microfluidic devices. United States: N. p., 2004.
Web.
Frye-Mason, Gregory C., Martinez, David, Manginell, Ronald P., Heller, Edwin J., & Chanchani, Rajen. Method for making electro-fluidic connections in microfluidic devices. United States.
Frye-Mason, Gregory C., Martinez, David, Manginell, Ronald P., Heller, Edwin J., and Chanchani, Rajen. Tue .
"Method for making electro-fluidic connections in microfluidic devices". United States. https://www.osti.gov/servlets/purl/1174973.
@article{osti_1174973,
title = {Method for making electro-fluidic connections in microfluidic devices},
author = {Frye-Mason, Gregory C. and Martinez, David and Manginell, Ronald P. and Heller, Edwin J. and Chanchani, Rajen},
abstractNote = {A method for forming electro-fluidic interconnections in microfluidic devices comprises forming an electrical connection between matching bond pads on a die containing an active electrical element and a microfluidic substrate and forming a fluidic seal ring that circumscribes the active electrical element and a fluidic feedthrough. Preferably, the electrical connection and the seal ring are formed in a single bonding step. The simple method is particularly useful for chemical microanalytical systems wherein a plurality of microanalytical components, such as a chemical preconcentrator, a gas chromatography column, and a surface acoustic wave detector, are fluidically interconnected on a hybrid microfluidic substrate having electrical connection to external support electronics.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {8}
}
Works referenced in this record:
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