Method for making electro-fluidic connections in microfluidic devices

Title: Method for making electro-fluidic connections in microfluidic devices

Abstract

A method for forming electro-fluidic interconnections in microfluidic devices comprises forming an electrical connection between matching bond pads on a die containing an active electrical element and a microfluidic substrate and forming a fluidic seal ring that circumscribes the active electrical element and a fluidic feedthrough. Preferably, the electrical connection and the seal ring are formed in a single bonding step. The simple method is particularly useful for chemical microanalytical systems wherein a plurality of microanalytical components, such as a chemical preconcentrator, a gas chromatography column, and a surface acoustic wave detector, are fluidically interconnected on a hybrid microfluidic substrate having electrical connection to external support electronics.

Inventors:: Frye-Mason, Gregory C.; Martinez, David; Manginell, Ronald P.; Heller, Edwin J.; Chanchani, Rajen

Issue Date:: 2004-08-10

Research Org.:: Sandia National Lab. (SNL-CA), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1174973

Patent Number(s):: 6772513

Application Number:: 10/184,782

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE

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G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N30/6095 - {Micromachined or nanomachined, e.g. micro- or nanosize}

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L3/565 - {Seals
B01L2200/027 - for microfluidic devices
B01L2300/0645 - Electrodes
B01L2300/0816 - Cards, e.g. flat sample carriers usually with flow in two horizontal directions

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY
B01J2219/0081 - Plurality of modules

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T29/49144 - by metal fusion

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L3/502707 - {characterised by the manufacture of the container or its components

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T29/4913 - Assembling to base an electrical component, e.g., capacitor, etc.
Y10T29/49117 - Conductor or circuit manufacturing

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L2400/0415 - electrical forces, e.g. electrokinetic
B01L2300/0867 - Multiple inlets and one sample wells, e.g. mixing, dilution
B01L2300/044 - pierceable, e.g. films, membranes
B01L3/502715 - {characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T137/87249 - Multiple inlet with multiple outlet

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L2200/10 - Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
B01L2200/028 - Modular arrangements

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Frye-Mason, Gregory C., Martinez, David, Manginell, Ronald P., Heller, Edwin J., and Chanchani, Rajen. Method for making electro-fluidic connections in microfluidic devices.  United States: N. p., 2004. 
        Web.

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                    Frye-Mason, Gregory C., Martinez, David, Manginell, Ronald P., Heller, Edwin J., & Chanchani, Rajen. Method for making electro-fluidic connections in microfluidic devices.  United States.

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                    Frye-Mason, Gregory C., Martinez, David, Manginell, Ronald P., Heller, Edwin J., and Chanchani, Rajen. Tue .  
        "Method for making electro-fluidic connections in microfluidic devices".  United States.  https://www.osti.gov/servlets/purl/1174973.

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@article{osti_1174973,

  title        = {Method for making electro-fluidic connections in microfluidic devices},

  author       = {Frye-Mason, Gregory C. and Martinez, David and Manginell, Ronald P. and Heller, Edwin J. and Chanchani, Rajen},

  abstractNote = {A method for forming electro-fluidic interconnections in microfluidic devices comprises forming an electrical connection between matching bond pads on a die containing an active electrical element and a microfluidic substrate and forming a fluidic seal ring that circumscribes the active electrical element and a fluidic feedthrough. Preferably, the electrical connection and the seal ring are formed in a single bonding step. The simple method is particularly useful for chemical microanalytical systems wherein a plurality of microanalytical components, such as a chemical preconcentrator, a gas chromatography column, and a surface acoustic wave detector, are fluidically interconnected on a hybrid microfluidic substrate having electrical connection to external support electronics.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2004},

  month        = {8}

}

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Works referenced in this record:

Novel interconnection technologies for integrated microfluidic systems
journal, September 1999

Gray, B. L.; Jaeggi, D.; Mourlas, N. J.
Sensors and Actuators A: Physical, Vol. 77, Issue 1
https://doi.org/10.1016/S0924-4247(99)00185-5

Micromachined chemical reaction system
journal, April 1999

Koch, M.; Schabmueller, C. G. J.; Evans, A. G. R.
Sensors and Actuators A: Physical, Vol. 74, Issue 1-3
https://doi.org/10.1016/S0924-4247(98)00318-5

Gas sensing with acoustic devices
conference, January 1996

Martin, S. J.; Frye, G. C.; Spates, J. J.
1996 IEEE Ultrasonics Symposium. Proceedings
https://doi.org/10.1109/ULTSYM.1996.584005

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Title: Method for making electro-fluidic connections in microfluidic devices

Abstract

Citation Formats

Novel interconnection technologies for integrated microfluidic systems journal, September 1999

Micromachined chemical reaction system journal, April 1999

Gas sensing with acoustic devices conference, January 1996

Novel interconnection technologies for integrated microfluidic systems
journal, September 1999

Micromachined chemical reaction system
journal, April 1999

Gas sensing with acoustic devices
conference, January 1996