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Title: Method for making electro-fluidic connections in microfluidic devices

Abstract

A method for forming electro-fluidic interconnections in microfluidic devices comprises forming an electrical connection between matching bond pads on a die containing an active electrical element and a microfluidic substrate and forming a fluidic seal ring that circumscribes the active electrical element and a fluidic feedthrough. Preferably, the electrical connection and the seal ring are formed in a single bonding step. The simple method is particularly useful for chemical microanalytical systems wherein a plurality of microanalytical components, such as a chemical preconcentrator, a gas chromatography column, and a surface acoustic wave detector, are fluidically interconnected on a hybrid microfluidic substrate having electrical connection to external support electronics.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1174973
Patent Number(s):
6772513
Application Number:
10/184,782
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Frye-Mason, Gregory C., Martinez, David, Manginell, Ronald P., Heller, Edwin J., and Chanchani, Rajen. Method for making electro-fluidic connections in microfluidic devices. United States: N. p., 2004. Web.
Frye-Mason, Gregory C., Martinez, David, Manginell, Ronald P., Heller, Edwin J., & Chanchani, Rajen. Method for making electro-fluidic connections in microfluidic devices. United States.
Frye-Mason, Gregory C., Martinez, David, Manginell, Ronald P., Heller, Edwin J., and Chanchani, Rajen. Tue . "Method for making electro-fluidic connections in microfluidic devices". United States. https://www.osti.gov/servlets/purl/1174973.
@article{osti_1174973,
title = {Method for making electro-fluidic connections in microfluidic devices},
author = {Frye-Mason, Gregory C. and Martinez, David and Manginell, Ronald P. and Heller, Edwin J. and Chanchani, Rajen},
abstractNote = {A method for forming electro-fluidic interconnections in microfluidic devices comprises forming an electrical connection between matching bond pads on a die containing an active electrical element and a microfluidic substrate and forming a fluidic seal ring that circumscribes the active electrical element and a fluidic feedthrough. Preferably, the electrical connection and the seal ring are formed in a single bonding step. The simple method is particularly useful for chemical microanalytical systems wherein a plurality of microanalytical components, such as a chemical preconcentrator, a gas chromatography column, and a surface acoustic wave detector, are fluidically interconnected on a hybrid microfluidic substrate having electrical connection to external support electronics.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {8}
}

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Works referenced in this record:

Novel interconnection technologies for integrated microfluidic systems
journal, September 1999


Micromachined chemical reaction system
journal, April 1999


Gas sensing with acoustic devices
conference, January 1996