Catalyst-induced growth of carbon nanotubes on tips of cantilevers and nanowires

Lee, James Weifu; Lowndes, Douglas H.; Merkulov, Vladimir I.; Eres, Gyula; Wei, Yayi; Greenbaum, Elias; Lee, Ida

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Title: Catalyst-induced growth of carbon nanotubes on tips of cantilevers and nanowires

Abstract

A method is described for catalyst-induced growth of carbon nanotubes, nanofibers, and other nanostructures on the tips of nanowires, cantilevers, conductive micro/nanometer structures, wafers and the like. The method can be used for production of carbon nanotube-anchored cantilevers that can significantly improve the performance of scaning probe microscopy (AFM, EFM etc). The invention can also be used in many other processes of micro and/or nanofabrication with carbon nanotubes/fibers. Key elements of this invention include: (1) Proper selection of a metal catalyst and programmable pulsed electrolytic deposition of the desired specific catalyst precisely at the tip of a substrate, (2) Catalyst-induced growth of carbon nanotubes/fibers at the catalyst-deposited tips, (3) Control of carbon nanotube/fiber growth pattern by manipulation of tip shape and growth conditions, and (4) Automation for mass production.

Inventors:: Lee, James Weifu; Lowndes, Douglas H.; Merkulov, Vladimir I.; Eres, Gyula; Wei, Yayi; Greenbaum, Elias; Lee, Ida

Issue Date:: 2004-06-29

Research Org.:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1174919

Patent Number(s):: 6755956

Application Number:: 09/873,928

Assignee:: UT-Battelle, LLC (Oak Ridge, TN)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01B - NON-METALLIC ELEMENTS

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B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y15/00 - Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
B82Y30/00 - Nanotechnology for materials or surface science, e.g. nanocomposites
B82Y35/00 - Methods or apparatus for measurement or analysis of nanostructures
B82Y40/00 - Manufacture or treatment of nanostructures

C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01B - NON-METALLIC ELEMENTS
C01B2202/02 - Single-walled nanotubes
C01B2202/06 - Multi-walled nanotubes
C01B32/162 - characterised by catalysts
C01B32/18 - Nanoonions

C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25D - PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS
C25D1/02 - Tubes
C25D21/12 - Process control or regulation
C25D5/18 - Electroplating using modulated, pulsed or reversing current
C25D7/00 - Electroplating characterised by the article coated
C25D7/0607 - {Wires}

G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
G01Q70/12 - Nanotube tips

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S977/762 - Nanowire or quantum wire, i.e. axially elongated structure having two dimensions of 100 nm or less
Y10S977/843 - Gas phase catalytic growth, i.e. chemical vapor deposition
Y10S977/873 - Tip holder
Y10S977/876 - Nanotube tip

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T428/31504 - Composite [nonstructural laminate]

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DOE Contract Number:: AC05-00OR22725

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Lee, James Weifu, Lowndes, Douglas H., Merkulov, Vladimir I., Eres, Gyula, Wei, Yayi, Greenbaum, Elias, and Lee, Ida. Catalyst-induced growth of carbon nanotubes on tips of cantilevers and nanowires.  United States: N. p., 2004. 
        Web.

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                    Lee, James Weifu, Lowndes, Douglas H., Merkulov, Vladimir I., Eres, Gyula, Wei, Yayi, Greenbaum, Elias, & Lee, Ida. Catalyst-induced growth of carbon nanotubes on tips of cantilevers and nanowires.  United States.

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                    Lee, James Weifu, Lowndes, Douglas H., Merkulov, Vladimir I., Eres, Gyula, Wei, Yayi, Greenbaum, Elias, and Lee, Ida. Tue .  
        "Catalyst-induced growth of carbon nanotubes on tips of cantilevers and nanowires".  United States.  https://www.osti.gov/servlets/purl/1174919.

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@article{osti_1174919,

  title        = {Catalyst-induced growth of carbon nanotubes on tips of cantilevers and nanowires},

  author       = {Lee, James Weifu and Lowndes, Douglas H. and Merkulov, Vladimir I. and Eres, Gyula and Wei, Yayi and Greenbaum, Elias and Lee, Ida},

  abstractNote = {A method is described for catalyst-induced growth of carbon nanotubes, nanofibers, and other nanostructures on the tips of nanowires, cantilevers, conductive micro/nanometer structures, wafers and the like. The method can be used for production of carbon nanotube-anchored cantilevers that can significantly improve the performance of scaning probe microscopy (AFM, EFM etc). The invention can also be used in many other processes of micro and/or nanofabrication with carbon nanotubes/fibers. Key elements of this invention include: (1) Proper selection of a metal catalyst and programmable pulsed electrolytic deposition of the desired specific catalyst precisely at the tip of a substrate, (2) Catalyst-induced growth of carbon nanotubes/fibers at the catalyst-deposited tips, (3) Control of carbon nanotube/fiber growth pattern by manipulation of tip shape and growth conditions, and (4) Automation for mass production.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2004},

  month        = {6}

}

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Works referenced in this record:

Nucleation and growth of carbon nanotubes by microwave plasma chemical vapor deposition
journal, October 2000

Bower, Chris; Zhou, Otto; Zhu, Wei
Applied Physics Letters, Vol. 77, Issue 17
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High current density field emission from arrays of carbon nanotubes and diamond-clad Si tips
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Tarntair, F. G.; Chen, L. C.; Wei, S. L.
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Novel plasma chemical vapor deposition method of carbon nanotubes at low temperature for field emission display application
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Growth of a single freestanding multiwall carbon nanotube on each nanonickel dot
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Catalytic growth of carbon filaments
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Carbon, Vol. 27, Issue 3
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Patterned growth of individual and multiple vertically aligned carbon nanofibers
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Merkulov, V. I.; Lowndes, D. H.; Wei, Y. Y.
Applied Physics Letters, Vol. 76, Issue 24
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Synthesis of Large Arrays of Well-Aligned Carbon Nanotubes on Glass
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Science, Vol. 282, Issue 5391
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Controlling the diameter, growth rate, and density of vertically aligned carbon nanotubes synthesized by microwave plasma-enhanced chemical vapor deposition
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Large arrays of well-aligned carbon nanotubes
conference, January 1999

Ren, Z. F.; Huang, Z. P.; Xu, J. W.
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Growth of nanotubes for probe microscopy tips
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Hafner, Jason H.; Cheung, Chin Li; Lieber, Charles M.
Nature, Vol. 398, Issue 6730
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Field emission of different oriented carbon nanotubes
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Applied Physics Letters, Vol. 76, Issue 17
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Nanotubes as nanoprobes in scanning probe microscopy
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Dai, Hongjie; Hafner, Jason H.; Rinzler, Andrew G.
Nature, Vol. 384, Issue 6605
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Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition
journal, November 2000

Cui, H.; Zhou, O.; Stoner, B. R.
Journal of Applied Physics, Vol. 88, Issue 10
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Carbon-nanotube tips for scanning probe microscopy: Preparation by a controlled process and observation of deoxyribonucleic acid
journal, June 1999

Nishijima, Hidehiro; Kamo, Satsuki; Akita, Seiji
Applied Physics Letters, Vol. 74, Issue 26
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Similar Records

Title: Catalyst-induced growth of carbon nanotubes on tips of cantilevers and nanowires

Abstract

Citation Formats

Nucleation and growth of carbon nanotubes by microwave plasma chemical vapor deposition journal, October 2000

High current density field emission from arrays of carbon nanotubes and diamond-clad Si tips journal, January 2000

Novel plasma chemical vapor deposition method of carbon nanotubes at low temperature for field emission display application journal, February 2001

Growth of a single freestanding multiwall carbon nanotube on each nanonickel dot journal, August 1999

Aligned Carbon Nanotubes Via Microwave Plasma Enhanced Chemical Vapor Deposition journal, January 1999

Catalytic growth of carbon filaments journal, January 1989

Patterned growth of individual and multiple vertically aligned carbon nanofibers journal, June 2000

Synthesis of Large Arrays of Well-Aligned Carbon Nanotubes on Glass journal, November 1998

Controlling the diameter, growth rate, and density of vertically aligned carbon nanotubes synthesized by microwave plasma-enhanced chemical vapor deposition journal, April 2000

Large arrays of well-aligned carbon nanotubes conference, January 1999

Growth of nanotubes for probe microscopy tips journal, April 1999

Field emission of different oriented carbon nanotubes journal, April 2000

Nanotubes as nanoprobes in scanning probe microscopy journal, November 1996

Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition journal, November 2000

Carbon-nanotube tips for scanning probe microscopy: Preparation by a controlled process and observation of deoxyribonucleic acid journal, June 1999

Nucleation and growth of carbon nanotubes by microwave plasma chemical vapor deposition
journal, October 2000

High current density field emission from arrays of carbon nanotubes and diamond-clad Si tips
journal, January 2000

Novel plasma chemical vapor deposition method of carbon nanotubes at low temperature for field emission display application
journal, February 2001

Growth of a single freestanding multiwall carbon nanotube on each nanonickel dot
journal, August 1999

Aligned Carbon Nanotubes Via Microwave Plasma Enhanced Chemical Vapor Deposition
journal, January 1999

Catalytic growth of carbon filaments
journal, January 1989

Patterned growth of individual and multiple vertically aligned carbon nanofibers
journal, June 2000

Synthesis of Large Arrays of Well-Aligned Carbon Nanotubes on Glass
journal, November 1998

Controlling the diameter, growth rate, and density of vertically aligned carbon nanotubes synthesized by microwave plasma-enhanced chemical vapor deposition
journal, April 2000

Large arrays of well-aligned carbon nanotubes
conference, January 1999

Growth of nanotubes for probe microscopy tips
journal, April 1999

Field emission of different oriented carbon nanotubes
journal, April 2000

Nanotubes as nanoprobes in scanning probe microscopy
journal, November 1996

Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition
journal, November 2000

Carbon-nanotube tips for scanning probe microscopy: Preparation by a controlled process and observation of deoxyribonucleic acid
journal, June 1999