Micromechanical apparatus for measurement of forces
Abstract
A new class of micromechanical dynamometers has been disclosed which are particularly suited to fabrication in parallel with other microelectromechanical apparatus. Forces in the microNewton regime and below can be measured with such dynamometers which are based on a high-compliance deflection element (e.g. a ring or annulus) suspended above a substrate for deflection by an applied force, and one or more distance scales for optically measuring the deflection.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174856
- Patent Number(s):
- 6739201
- Application Number:
- 09/665,978
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Tanner, Danelle Mary, and Allen, James Joe. Micromechanical apparatus for measurement of forces. United States: N. p., 2004.
Web.
Tanner, Danelle Mary, & Allen, James Joe. Micromechanical apparatus for measurement of forces. United States.
Tanner, Danelle Mary, and Allen, James Joe. Tue .
"Micromechanical apparatus for measurement of forces". United States. https://www.osti.gov/servlets/purl/1174856.
@article{osti_1174856,
title = {Micromechanical apparatus for measurement of forces},
author = {Tanner, Danelle Mary and Allen, James Joe},
abstractNote = {A new class of micromechanical dynamometers has been disclosed which are particularly suited to fabrication in parallel with other microelectromechanical apparatus. Forces in the microNewton regime and below can be measured with such dynamometers which are based on a high-compliance deflection element (e.g. a ring or annulus) suspended above a substrate for deflection by an applied force, and one or more distance scales for optically measuring the deflection.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {5}
}
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