Method of depositing epitaxial layers on a substrate

Goyal, Amit

Title: Method of depositing epitaxial layers on a substrate

Abstract

An epitaxial article and method for forming the same includes a substrate having a textured surface, and an electrochemically deposited substantially single orientation epitaxial layer disposed on and in contact with the textured surface. The epitaxial article can include an electromagnetically active layer and an epitaxial buffer layer. The electromagnetically active layer and epitaxial buffer layer can also be deposited electrochemically.

Inventors:: Goyal, Amit

Issue Date:: 2003-12-30

Research Org.:: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1174656

Patent Number(s):: 6670308

Application Number:: 10/101,218

Assignee:: UT-Battelle, LLC (Oak Ridge, TN)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH

Show more

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L39/2461 - {Intermediate layers, e.g. for growth control}

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B29/22 - Complex oxides
C30B7/005 - {Epitaxial layer growth}
C30B23/02 - Epitaxial-layer growth
C30B7/12 - by electrolysis

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C18/1635 - {Composition of the substrate}

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B29/02 - Elements

C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25D - PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS
C25D7/00 - Electroplating characterised by the article coated

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S505/739 - Molding, coating, shaping, or casting of superconducting material

C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25D - PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS
C25D5/34 - Pretreatment of metallic surfaces to be electroplated
C25D7/001 - {Magnets}

Show less

DOE Contract Number:: AC05-00OR22725

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Goyal, Amit. Method of depositing epitaxial layers on a substrate.  United States: N. p., 2003. 
        Web.

Copy to clipboard


                    Goyal, Amit. Method of depositing epitaxial layers on a substrate.  United States.

Copy to clipboard


                    Goyal, Amit. Tue .  
        "Method of depositing epitaxial layers on a substrate".  United States.  https://www.osti.gov/servlets/purl/1174656.

Copy to clipboard


                    
@article{osti_1174656,

  title        = {Method of depositing epitaxial layers on a substrate},

  author       = {Goyal, Amit},

  abstractNote = {An epitaxial article and method for forming the same includes a substrate having a textured surface, and an electrochemically deposited substantially single orientation epitaxial layer disposed on and in contact with the textured surface. The epitaxial article can include an electromagnetically active layer and an epitaxial buffer layer. The electromagnetically active layer and epitaxial buffer layer can also be deposited electrochemically.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2003},

  month        = {12}

}

Copy to clipboard

Patent:

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

Transport superconducting properties of grain boundaries in Tl ₁ Ba ₂ Ca ₂ Cu ₃ O _x thin films
journal, August 1994

Nabatame, T.; Koike, S.; Hyun, O. B.
Applied Physics Letters, Vol. 65, Issue 6
https://doi.org/10.1063/1.112227

Laser deposition of biaxially textured yttria‐stabilized zirconia buffer layers on polycrystalline metallic alloys for high critical current Y‐Ba‐Cu‐O thin films
journal, November 1992

Reade, R. P.; Berdahl, P.; Russo, R. E.
Applied Physics Letters, Vol. 61, Issue 18
https://doi.org/10.1063/1.108277

Orientation Dependence of Grain-Boundary Critical Currents in $Y {Ba}_{2} {Cu}_{3} O_{7 - δ}$ Bicrystals
journal, July 1988

Dimos, D.; Chaudhari, P.; Mannhart, J.
Physical Review Letters, Vol. 61, Issue 2
https://doi.org/10.1103/PhysRevLett.61.219

Weak link behavior of grain boundaries in Nd‐, Bi‐, and Tl‐based cuprate superconductors
journal, January 1993

Kawasaki, M.; Sarnelli, E.; Chaudhari, P.
Applied Physics Letters, Vol. 62, Issue 4
https://doi.org/10.1063/1.108920

High current YBa ₂ Cu ₃ O _7−δ thick films on flexible nickel substrates with textured buffer layers
journal, October 1994

Wu, X. D.; Foltyn, S. R.; Arendt, P.
Applied Physics Letters, Vol. 65, Issue 15
https://doi.org/10.1063/1.112830

Conductors with controlled grain boundaries: An approach to the next generation, high temperature superconducting wire
journal, November 1997

Goyal, A.; Norton, D. P.; Kroeger, D. M.
Journal of Materials Research, Vol. 12, Issue 11
https://doi.org/10.1557/JMR.1997.0387

Electromagnetic coupling character of [001] twist boundaries in sintered Bi2Sr2CaCu2O8+x bicrystals
journal, September 1994

Wang, Jyh-Lih; Cai, X. Y.; Kelley, R. J.
Physica C: Superconductivity, Vol. 230, Issue 1-2
https://doi.org/10.1016/0921-4534(94)90463-4

The Superconducting Properties of [001] Twist Boundaries in a Bi-Sr-Ca-Cu-O Superconductor
journal, July 1992

Tomita, Naruaki; Takahashi, Yutaka; Mori, Minoru
Japanese Journal of Applied Physics, Vol. 31, Issue Part 2, No. 7B
https://doi.org/10.1143/JJAP.31.L942

Transport characteristics of Tl ₂ Ba ₂ CaCu ₂ O ₈ bicrystal grain boundary junctions at 77 K
journal, January 1993

Cardona, A. H.; Suzuki, H.; Yamashita, T.
Applied Physics Letters, Vol. 62, Issue 4
https://doi.org/10.1063/1.108918

Superconducting transport properties of grain boundaries in ${YBa}_{2}$ ${Cu}_{3}$ $O_{7}$ bicrystals
journal, March 1990

Dimos, D.; Chaudhari, P.; Mannhart, J.
Physical Review B, Vol. 41, Issue 7
https://doi.org/10.1103/PhysRevB.41.4038

Structural and transport properties of biaxially aligned YBa ₂ Cu ₃ O _{7− x} films on polycrystalline Ni‐based alloy with ion‐beam‐modified buffer layers
journal, August 1993

Iijima, Y.; Onabe, K.; Futaki, N.
Journal of Applied Physics, Vol. 74, Issue 3
https://doi.org/10.1063/1.354801

Similar Records in DOE Patents and OSTI.GOV collections:

Dual chamber system providing simultaneous etch and deposition on opposing substrate sides for growing low defect density epitaxial layers

Patent Kulkarni, Nagraj S.; Kasica, Richard J.

A dual-chamber reactor can include a housing enclosing a volume having a divider therein, where the divider defines a first chamber and a second chamber. The divider can include a substrate holder that supports at least one substrate and exposes a first side of the substrate to the first chamber and a second side of the substrate to the second chamber. The first chamber can include an inlet for delivering at least one reagent to the first chamber for forming a film on the first side of the substrate, and the second chamber can include a removal device for removingmore » « less
Full Text Available
Method of depositing an electrically conductive oxide buffer layer on a textured substrate and articles formed therefrom

Patent Paranthaman, M. Parans; Aytug, Tolga; Christen, David K.

An article with an improved buffer layer architecture includes a substrate having a textured metal surface, and an electrically conductive lanthanum metal oxide epitaxial buffer layer on the surface of the substrate. The article can also include an epitaxial superconducting layer deposited on the epitaxial buffer layer. An epitaxial capping layer can be placed between the epitaxial buffer layer and the superconducting layer. A method for preparing an epitaxial article includes providing a substrate with a metal surface and depositing on the metal surface a lanthanum metal oxide epitaxial buffer layer. The method can further include depositing a superconducting layermore » « less
Full Text Available
Method of depositing an electrically conductive oxide buffer layer on a textured substrate and articles formed therefrom

Patent Paranthaman, M. Parans; Aytug, Tolga; Christen, David K.

An article with an improved buffer layer architecture includes a substrate having a textured metal surface, and an electrically conductive lanthanum metal oxide epitaxial buffer layer on the surface of the substrate. The article can also include an epitaxial superconducting layer deposited on the epitaxial buffer layer. An epitaxial capping layer can be placed between the epitaxial buffer layer and the superconducting layer. A method for preparing an epitaxial article includes providing a substrate with a metal surface and depositing on the metal surface a lanthanum metal oxide epitaxial buffer layer. The method can further include depositing a superconducting layermore » « less
Full Text Available
Method of depositing buffer layers on biaxially textured metal substrates

Patent Beach, David B [Knoxville, TN]; Morrell, Jonathan S [Knoxville, TN]; Paranthaman, Mariappan [Knoxville, TN]; ...

A laminate article comprises a substrate and a biaxially textured (RE.sup.1.sub.x RE.sup.2.sub.(1-x)).sub.2 O.sub.3 buffer layer over the substrate, wherein 0<1 and RE.sup.1 and RE.sup.2 are each selected from the group consisting of Nd, Sm, Eu, Ho, Er, Lu, Gd, Tb, Dy, Tm, and Yb. The (RE.sup.1.sub.x RE.sup.2.sub.(1-x)).sub.2 O.sub.3 buffer layer can be deposited using sol-gel or metal-organic decomposition. The laminate article can include a layer of YBCO over the (RE.sup.1.sub.x RE.sup.2.sub.(1-x)).sub.2 O.sub.3 buffer layer. A layer of CeO.sub.2 between the YBCO layer and the (RE.sup.1.sub.x RE.sup.2.sub.(1-x)).sub.2 O.sub.3 buffer can also be include. Further included can be a layer of YSZmore » « less
Full Text Available
Method of depositing a protective layer over a biaxially textured alloy substrate and composition therefrom

Patent Goyal, Amit [Knoxville, TN]; Kroeger, Donald M [Knoxville, TN]; Paranthaman, Mariappan [Knoxville, TN]; ...

A laminate article consists of a substrate and a biaxially textured protective layer over the substrate. The substrate can be biaxially textured and also have reduced magnetism over the magnetism of Ni. The substrate can be selected from the group consisting of nickel, copper, iron, aluminum, silver and alloys containing any of the foregoing. The protective layer can be selected from the group consisting of gold, silver, platinum, palladium, and nickel and alloys containing any of the foregoing. The protective layer is also non-oxidizable under conditions employed to deposit a desired, subsequent oxide buffer layer. Layers of YBCO, CeO.sub.2, YSZ,more » « less
Full Text Available

Similar Records

Title: Method of depositing epitaxial layers on a substrate

Abstract

Citation Formats

Transport superconducting properties of grain boundaries in Tl 1 Ba 2 Ca 2 Cu 3 O x thin films journal, August 1994

Laser deposition of biaxially textured yttria‐stabilized zirconia buffer layers on polycrystalline metallic alloys for high critical current Y‐Ba‐Cu‐O thin films journal, November 1992

Orientation Dependence of Grain-Boundary Critical Currents in Y Ba 2 Cu 3 O 7 − δ Bicrystals journal, July 1988

Weak link behavior of grain boundaries in Nd‐, Bi‐, and Tl‐based cuprate superconductors journal, January 1993

High current YBa 2 Cu 3 O 7−δ thick films on flexible nickel substrates with textured buffer layers journal, October 1994

Conductors with controlled grain boundaries: An approach to the next generation, high temperature superconducting wire journal, November 1997

Electromagnetic coupling character of [001] twist boundaries in sintered Bi2Sr2CaCu2O8+x bicrystals journal, September 1994

The Superconducting Properties of [001] Twist Boundaries in a Bi-Sr-Ca-Cu-O Superconductor journal, July 1992

Transport characteristics of Tl 2 Ba 2 CaCu 2 O 8 bicrystal grain boundary junctions at 77 K journal, January 1993

Superconducting transport properties of grain boundaries in YBa 2 Cu 3 O 7 bicrystals journal, March 1990

Structural and transport properties of biaxially aligned YBa 2 Cu 3 O 7− x films on polycrystalline Ni‐based alloy with ion‐beam‐modified buffer layers journal, August 1993

Transport superconducting properties of grain boundaries in Tl ₁ Ba ₂ Ca ₂ Cu ₃ O _x thin films
journal, August 1994

Laser deposition of biaxially textured yttria‐stabilized zirconia buffer layers on polycrystalline metallic alloys for high critical current Y‐Ba‐Cu‐O thin films
journal, November 1992

Orientation Dependence of Grain-Boundary Critical Currents in $Y {Ba}_{2} {Cu}_{3} O_{7 - δ}$ Bicrystals
journal, July 1988

Weak link behavior of grain boundaries in Nd‐, Bi‐, and Tl‐based cuprate superconductors
journal, January 1993

High current YBa ₂ Cu ₃ O _7−δ thick films on flexible nickel substrates with textured buffer layers
journal, October 1994

Conductors with controlled grain boundaries: An approach to the next generation, high temperature superconducting wire
journal, November 1997

Electromagnetic coupling character of [001] twist boundaries in sintered Bi2Sr2CaCu2O8+x bicrystals
journal, September 1994

The Superconducting Properties of [001] Twist Boundaries in a Bi-Sr-Ca-Cu-O Superconductor
journal, July 1992

Transport characteristics of Tl ₂ Ba ₂ CaCu ₂ O ₈ bicrystal grain boundary junctions at 77 K
journal, January 1993

Superconducting transport properties of grain boundaries in ${YBa}_{2}$ ${Cu}_{3}$ $O_{7}$ bicrystals
journal, March 1990

Structural and transport properties of biaxially aligned YBa ₂ Cu ₃ O _{7− x} films on polycrystalline Ni‐based alloy with ion‐beam‐modified buffer layers
journal, August 1993