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Title: Microoptoelectromechanical system (MOEMS) based laser

Abstract

A method for forming a folded laser and associated laser device includes providing a waveguide substrate, micromachining the waveguide substrate to form a folded waveguide structure including a plurality of intersecting folded waveguide paths, forming a single fold mirror having a plurality of facets which bound all ends of said waveguide paths except those reserved for resonator mirrors, and disposing a pair of resonator mirrors on opposite sides of the waveguide to form a lasing cavity. A lasing material is provided in the lasing cavity. The laser can be sealed by disposing a top on the waveguide substrate. The laser can include a re-entrant cavity, where the waveguide substrate is disposed therein, the re-entrant cavity including the single fold mirror.

Inventors:
Issue Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1174566
Patent Number(s):
6,643,313
Application Number:
09/849,922
Assignee:
UT Battelee, LLC (Oak Ridge, TN) ORNL
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Hutchinson, Donald P. Microoptoelectromechanical system (MOEMS) based laser. United States: N. p., 2003. Web.
Hutchinson, Donald P. Microoptoelectromechanical system (MOEMS) based laser. United States.
Hutchinson, Donald P. Tue . "Microoptoelectromechanical system (MOEMS) based laser". United States. https://www.osti.gov/servlets/purl/1174566.
@article{osti_1174566,
title = {Microoptoelectromechanical system (MOEMS) based laser},
author = {Hutchinson, Donald P.},
abstractNote = {A method for forming a folded laser and associated laser device includes providing a waveguide substrate, micromachining the waveguide substrate to form a folded waveguide structure including a plurality of intersecting folded waveguide paths, forming a single fold mirror having a plurality of facets which bound all ends of said waveguide paths except those reserved for resonator mirrors, and disposing a pair of resonator mirrors on opposite sides of the waveguide to form a lasing cavity. A lasing material is provided in the lasing cavity. The laser can be sealed by disposing a top on the waveguide substrate. The laser can include a re-entrant cavity, where the waveguide substrate is disposed therein, the re-entrant cavity including the single fold mirror.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {11}
}

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