Remote control of a scanning electron microscope aperture and gun alignment

Title: Remote control of a scanning electron microscope aperture and gun alignment

Full Record
Other Related Research

Abstract

This invention relates to a remote control system which through gear motors coupled to the scanning electron microscope (SEM) manual control knobs readily permits remote adjustments as necessary.

Inventors:: Cramer, Charles E.; Campchero, Robert J.

Issue Date:: 2003-10-07

Research Org.:: United States Of America, Department Of Energy

Sponsoring Org.:: USDOE

OSTI Identifier:: 1174528

Patent Number(s):: 6,630,668

Assignee:: United States Of America, Department Of Energy OSTI

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY

Citation Formats


                    Cramer, Charles E., and Campchero, Robert J. Remote control of a scanning electron microscope aperture and gun alignment.  United States: N. p., 2003. 
        Web.

Copy to clipboard


                    Cramer, Charles E., & Campchero, Robert J. Remote control of a scanning electron microscope aperture and gun alignment.  United States.

Copy to clipboard


                    Cramer, Charles E., and Campchero, Robert J. Tue .  
        "Remote control of a scanning electron microscope aperture and gun alignment".  United States.  https://www.osti.gov/servlets/purl/1174528.

Copy to clipboard


                    
@article{osti_1174528,

  title        = {Remote control of a scanning electron microscope aperture and gun alignment},

  author       = {Cramer, Charles E. and Campchero, Robert J.},

  abstractNote = {This invention relates to a remote control system which through gear motors coupled to the scanning electron microscope (SEM) manual control knobs readily permits remote adjustments as necessary.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2003},

  month        = {10}

}

Copy to clipboard

Patent:

View Patent

Save / Share:

Export Metadata

Save to My Library

Similar records in DOE Patents and OSTI.GOV collections:

Analytical scanning evanescent microwave microscope and control stage

Patent Xiang, Xiao-Dong (Danville, CA); Gao, Chen (Anhui, CN); Duewer, Fred (Albany, CA); ...

A scanning evanescent microwave microscope (SEMM) that uses near-field evanescent electromagnetic waves to probe sample properties is disclosed. The SEMM is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The SEMM has the ability to map dielectric constant, loss tangent, conductivity, electrical impedance, and other electrical parameters of materials. Such properties are then used to provide distance control over a wide range, from to microns to nanometers, over dielectric and conductive samples for a scanned evanescent microwave probe, which enable quantitative non-contact and submicron spatial resolution topographic and electrical impedance profiling of dielectric,more »« less
Full Text Available
Analytical scanning evanescent microwave microscope and control stage

Patent Xiang, Xiao-Dong; Gao, Chen; Duewer, Fred; ...

A scanning evanescent microwave microscope (SEMM) that uses near-field evanescent electromagnetic waves to probe sample properties is disclosed. The SEMM is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The SEMM has the ability to map dielectric constant, loss tangent, conductivity, electrical impedance, and other electrical parameters of materials. Such properties are then used to provide distance control over a wide range, from to microns to nanometers, over dielectric and conductive samples for a scanned evanescent microwave probe, which enable quantitative non-contact and submicron spatial resolution topographic and electrical impedance profiling of dielectric,more »« less
Full Text Available
Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope

Patent de Jonge, Niels [Oak Ridge, TN]

A confocal scanning transmission electron microscope which includes an electron illumination device providing an incident electron beam propagating in a direction defining a propagation axis, and a precision specimen scanning stage positioned along the propagation axis and movable in at least one direction transverse to the propagation axis. The precision specimen scanning stage is configured for positioning a specimen relative to the incident electron beam. A projector lens receives a transmitted electron beam transmitted through at least part of the specimen and focuses this transmitted beam onto an image plane, where the transmitted beam results from the specimen being illuminatedmore »« less
Full Text Available
Sparse sampling and reconstruction for electron and scanning probe microscope imaging

Patent Anderson, Hyrum; Helms, Jovana; Wheeler, Jason W.; ...

Systems and methods for conducting electron or scanning probe microscopy are provided herein. In a general embodiment, the systems and methods for conducting electron or scanning probe microscopy with an undersampled data set include: driving an electron beam or probe to scan across a sample and visit a subset of pixel locations of the sample that are randomly or pseudo-randomly designated; determining actual pixel locations on the sample that are visited by the electron beam or probe; and processing data collected by detectors from the visits of the electron beam or probe at the actual pixel locations and recovering amore » reconstructed image of the sample.« less
Full Text Available
Scanning confocal electron microscope

Patent Zaluzec, Nestor J.

A scanning confocal microscope and methods are provided for configuring scanning confocal microscopes for imaging specimens, such as, high resolution imaging of thick non-optically transparent specimens including imaging of buried or subsurface features of thick non-optically transparent structures. The scanning confocal microscope, such as a scanning confocal electron microscope (SCEM), is configured to image structures buried in thick specimens, such as specimens greater than eight microns thick, utilizing confocal imaging principles. A scanning confocal microscope includes an illumination source, a specimen, and a detector. The illumination source provides a focused radiation beam that is applied to the specimen. The detectormore »« less
Full Text Available

Similar Records