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Title: Remote control of a scanning electron microscope aperture and gun alignment

Abstract

This invention relates to a remote control system which through gear motors coupled to the scanning electron microscope (SEM) manual control knobs readily permits remote adjustments as necessary.

Inventors:
;
Issue Date:
Research Org.:
United States Of America, Department Of Energy
Sponsoring Org.:
USDOE
OSTI Identifier:
1174528
Patent Number(s):
6,630,668
Assignee:
United States Of America, Department Of Energy OSTI
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY

Citation Formats

Cramer, Charles E., and Campchero, Robert J. Remote control of a scanning electron microscope aperture and gun alignment. United States: N. p., 2003. Web.
Cramer, Charles E., & Campchero, Robert J. Remote control of a scanning electron microscope aperture and gun alignment. United States.
Cramer, Charles E., and Campchero, Robert J. Tue . "Remote control of a scanning electron microscope aperture and gun alignment". United States. https://www.osti.gov/servlets/purl/1174528.
@article{osti_1174528,
title = {Remote control of a scanning electron microscope aperture and gun alignment},
author = {Cramer, Charles E. and Campchero, Robert J.},
abstractNote = {This invention relates to a remote control system which through gear motors coupled to the scanning electron microscope (SEM) manual control knobs readily permits remote adjustments as necessary.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {10}
}

Patent:

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