Remote control of a scanning electron microscope aperture and gun alignment

Title: Remote control of a scanning electron microscope aperture and gun alignment

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Abstract

This invention relates to a remote control system which through gear motors coupled to the scanning electron microscope (SEM) manual control knobs readily permits remote adjustments as necessary.

Inventors:: Cramer, Charles E.; Campchero, Robert J.

Issue Date:: 2003-10-07

Research Org.:: United States Of America, Department Of Energy

Sponsoring Org.:: USDOE

OSTI Identifier:: 1174528

Patent Number(s):: 6630668

Assignee:: United States Of America, Department Of Energy

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/0458 - movable, i.e. for changing between differently sized apertures

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N23/2251 - using incident electron beams, e.g. scanning electron microscopy [SEM]

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/28 - with scanning beams
H01J2237/2485 - Electric or electronic means

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Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY

Citation Formats


                    Cramer, Charles E., and Campchero, Robert J. Remote control of a scanning electron microscope aperture and gun alignment.  United States: N. p., 2003. 
        Web.

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                    Cramer, Charles E., & Campchero, Robert J. Remote control of a scanning electron microscope aperture and gun alignment.  United States.

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                    Cramer, Charles E., and Campchero, Robert J. Tue .  
        "Remote control of a scanning electron microscope aperture and gun alignment".  United States.  https://www.osti.gov/servlets/purl/1174528.

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@article{osti_1174528,

  title        = {Remote control of a scanning electron microscope aperture and gun alignment},

  author       = {Cramer, Charles E. and Campchero, Robert J.},

  abstractNote = {This invention relates to a remote control system which through gear motors coupled to the scanning electron microscope (SEM) manual control knobs readily permits remote adjustments as necessary.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2003},

  month        = {10}

}

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