Remote control of a scanning electron microscope aperture and gun alignment
Abstract
This invention relates to a remote control system which through gear motors coupled to the scanning electron microscope (SEM) manual control knobs readily permits remote adjustments as necessary.
- Inventors:
- Issue Date:
- Research Org.:
- US Department of Energy (USDOE), Washington, DC (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174528
- Patent Number(s):
- 6630668
- Assignee:
- United States Of America, Department Of Energy
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
Citation Formats
Cramer, Charles E., and Campchero, Robert J. Remote control of a scanning electron microscope aperture and gun alignment. United States: N. p., 2003.
Web.
Cramer, Charles E., & Campchero, Robert J. Remote control of a scanning electron microscope aperture and gun alignment. United States.
Cramer, Charles E., and Campchero, Robert J. Tue .
"Remote control of a scanning electron microscope aperture and gun alignment". United States. https://www.osti.gov/servlets/purl/1174528.
@article{osti_1174528,
title = {Remote control of a scanning electron microscope aperture and gun alignment},
author = {Cramer, Charles E. and Campchero, Robert J.},
abstractNote = {This invention relates to a remote control system which through gear motors coupled to the scanning electron microscope (SEM) manual control knobs readily permits remote adjustments as necessary.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {10}
}
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