Damascene fabrication of nonplanar microcoils
Abstract
A process for fabricating coils using a Damascene process uses a curved substrate having a surface extending along and about an axis made of a first material. A groove is formed in the curved surface along and around said axis, and the groove is filled with a second material that is different from the first material to form a coil of second material in said first material. Excess second material is then removed from the surface of the first material, leaving the coil of second material in the groove.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174374
- Patent Number(s):
- 6578254
- Application Number:
- 09/733,396
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01F - MAGNETS
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Adams, David P., and Vasile, Michael J. Damascene fabrication of nonplanar microcoils. United States: N. p., 2003.
Web.
Adams, David P., & Vasile, Michael J. Damascene fabrication of nonplanar microcoils. United States.
Adams, David P., and Vasile, Michael J. Tue .
"Damascene fabrication of nonplanar microcoils". United States. https://www.osti.gov/servlets/purl/1174374.
@article{osti_1174374,
title = {Damascene fabrication of nonplanar microcoils},
author = {Adams, David P. and Vasile, Michael J.},
abstractNote = {A process for fabricating coils using a Damascene process uses a curved substrate having a surface extending along and about an axis made of a first material. A groove is formed in the curved surface along and around said axis, and the groove is filled with a second material that is different from the first material to form a coil of second material in said first material. Excess second material is then removed from the surface of the first material, leaving the coil of second material in the groove.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {6}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.