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Title: Damascene fabrication of nonplanar microcoils

Abstract

A process for fabricating coils using a Damascene process uses a curved substrate having a surface extending along and about an axis made of a first material. A groove is formed in the curved surface along and around said axis, and the groove is filled with a second material that is different from the first material to form a coil of second material in said first material. Excess second material is then removed from the surface of the first material, leaving the coil of second material in the groove.

Inventors:
;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1174374
Patent Number(s):
6,578,254
Application Number:
09/733,396
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-L
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Adams, David P., and Vasile, Michael J. Damascene fabrication of nonplanar microcoils. United States: N. p., 2003. Web.
Adams, David P., & Vasile, Michael J. Damascene fabrication of nonplanar microcoils. United States.
Adams, David P., and Vasile, Michael J. Tue . "Damascene fabrication of nonplanar microcoils". United States. https://www.osti.gov/servlets/purl/1174374.
@article{osti_1174374,
title = {Damascene fabrication of nonplanar microcoils},
author = {Adams, David P. and Vasile, Michael J.},
abstractNote = {A process for fabricating coils using a Damascene process uses a curved substrate having a surface extending along and about an axis made of a first material. A groove is formed in the curved surface along and around said axis, and the groove is filled with a second material that is different from the first material to form a coil of second material in said first material. Excess second material is then removed from the surface of the first material, leaving the coil of second material in the groove.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {6}
}

Patent:

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