Compound semiconductor optical waveguide switch

Spahn, Olga B.; Sullivan, Charles T.; Garcia, Ernest J.

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Title: Compound semiconductor optical waveguide switch

Abstract

An optical waveguide switch is disclosed which is formed from III-V compound semiconductors and which has a moveable optical waveguide with a cantilevered portion that can be bent laterally by an integral electrostatic actuator to route an optical signal (i.e. light) between the moveable optical waveguide and one of a plurality of fixed optical waveguides. A plurality of optical waveguide switches can be formed on a common substrate and interconnected to form an optical switching network.

Inventors:: Spahn, Olga B.; Sullivan, Charles T.; Garcia, Ernest J.

Issue Date:: Tue Jun 10 00:00:00 EDT 2003

Research Org.:: Sandia National Lab. (SNL-CA), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1174372

Patent Number(s):: 6577785

Application Number:: 09/928,199

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B6/122 - Basic optical elements, e.g. light-guiding paths
G02B6/3504 - {Rotating, tilting or pivoting the waveguides, or with the waveguides describing a curved path
G02B6/3546 - {NxM switch, i.e. a regular array of switches elements of matrix type constellation}
G02B6/355 - {1x2 switch, i.e. one input and a selectable single output of two possible outputs}
G02B6/357 - {Electrostatic force
G02B6/358 - {Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed
G02B6/3596 - {With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate}

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats


                    Spahn, Olga B., Sullivan, Charles T., and Garcia, Ernest J. Compound semiconductor optical waveguide switch.  United States: N. p., 2003. 
        Web.

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                    Spahn, Olga B., Sullivan, Charles T., & Garcia, Ernest J. Compound semiconductor optical waveguide switch.  United States.

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                    Spahn, Olga B., Sullivan, Charles T., and Garcia, Ernest J. Tue .  
        "Compound semiconductor optical waveguide switch".  United States.  https://www.osti.gov/servlets/purl/1174372.

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@article{osti_1174372,

  title        = {Compound semiconductor optical waveguide switch},

  author       = {Spahn, Olga B. and Sullivan, Charles T. and Garcia, Ernest J.},

  abstractNote = {An optical waveguide switch is disclosed which is formed from III-V compound semiconductors and which has a moveable optical waveguide with a cantilevered portion that can be bent laterally by an integral electrostatic actuator to route an optical signal (i.e. light) between the moveable optical waveguide and one of a plurality of fixed optical waveguides. A plurality of optical waveguide switches can be formed on a common substrate and interconnected to form an optical switching network.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Jun 10 00:00:00 EDT 2003},

  month        = {Tue Jun 10 00:00:00 EDT 2003}

}

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Works referenced in this record:

Gallium arsenide as a mechanical material
journal, March 1994

Hjort, K.; Soderkvist, J.; Schweitz, J. -A
Journal of Micromechanics and Microengineering, Vol. 4, Issue 1
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Geometrical modulation-based interferometry for displacement sensing using optically coupled suspended waveguides
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Characterization of AlGaAs microstructure fabricated by AlGaAs/GaAs micromachining
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Micro-opto mechanical switch integrated on silicon
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Revol, F.; Labeye, P.; Ollier, E.
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Microelectronics Journal, Vol. 29, Issue 9, p. 613-619
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GaAs-based microelectromechanical waveguide switch
conference, January 2000

Spahn, O. B.; Sullivan, C.; Burkhart, J.
2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)
https://doi.org/10.1109/OMEMS.2000.879617

Submicron, movable gallium arsenide mechanical structures and actuators
conference, January 1992

Zhang, Z. L.; Porkolab, G. A.; MacDonald, N. C.
[1992] Proceedings IEEE Micro Electro Mechanical Systems
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An SOI optical microswitch integrated with silicon waveguides and touch-down micromirror actuators
conference, January 2000

Jin, Young-Hyun; Seo, Kyoung-Sun; Cho, Young-Ho
2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)
https://doi.org/10.1109/OMEMS.2000.879618

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Similar Records

Title: Compound semiconductor optical waveguide switch

Abstract

Citation Formats

Gallium arsenide as a mechanical material journal, March 1994

Sacrificial etching of III - V compounds for micromechanical devices journal, December 1996

Geometrical modulation-based interferometry for displacement sensing using optically coupled suspended waveguides journal, January 1998

Integrated electrostatic micro-switch for optical fibre networks driven by low voltage journal, January 1996

Micromachining and mechanical properties of GaInAs/InP microcantilevers journal, February 1998

Characterization of AlGaAs microstructure fabricated by AlGaAs/GaAs micromachining journal, January 1994

Surface-micromachined epitaxial silicon cantilevers as movable optical waveguides on silicon-on-insulator substrates journal, June 1995

Micro-opto mechanical switch integrated on silicon journal, November 1995

III–V micromachined devices for microsystems journal, September 1998

GaAs-based microelectromechanical waveguide switch conference, January 2000

Submicron, movable gallium arsenide mechanical structures and actuators conference, January 1992

An SOI optical microswitch integrated with silicon waveguides and touch-down micromirror actuators conference, January 2000

Gallium arsenide as a mechanical material
journal, March 1994

Sacrificial etching of III - V compounds for micromechanical devices
journal, December 1996

Geometrical modulation-based interferometry for displacement sensing using optically coupled suspended waveguides
journal, January 1998

Integrated electrostatic micro-switch for optical fibre networks driven by low voltage
journal, January 1996

Micromachining and mechanical properties of GaInAs/InP microcantilevers
journal, February 1998

Characterization of AlGaAs microstructure fabricated by AlGaAs/GaAs micromachining
journal, January 1994

Surface-micromachined epitaxial silicon cantilevers as movable optical waveguides on silicon-on-insulator substrates
journal, June 1995

Micro-opto mechanical switch integrated on silicon
journal, November 1995

III–V micromachined devices for microsystems
journal, September 1998

GaAs-based microelectromechanical waveguide switch
conference, January 2000

Submicron, movable gallium arsenide mechanical structures and actuators
conference, January 1992

An SOI optical microswitch integrated with silicon waveguides and touch-down micromirror actuators
conference, January 2000