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Title: Compound semiconductor optical waveguide switch

Abstract

An optical waveguide switch is disclosed which is formed from III-V compound semiconductors and which has a moveable optical waveguide with a cantilevered portion that can be bent laterally by an integral electrostatic actuator to route an optical signal (i.e. light) between the moveable optical waveguide and one of a plurality of fixed optical waveguides. A plurality of optical waveguide switches can be formed on a common substrate and interconnected to form an optical switching network.

Inventors:
; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1174372
Patent Number(s):
6577785
Application Number:
09/928,199
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Spahn, Olga B., Sullivan, Charles T., and Garcia, Ernest J. Compound semiconductor optical waveguide switch. United States: N. p., 2003. Web.
Spahn, Olga B., Sullivan, Charles T., & Garcia, Ernest J. Compound semiconductor optical waveguide switch. United States.
Spahn, Olga B., Sullivan, Charles T., and Garcia, Ernest J. Tue . "Compound semiconductor optical waveguide switch". United States. https://www.osti.gov/servlets/purl/1174372.
@article{osti_1174372,
title = {Compound semiconductor optical waveguide switch},
author = {Spahn, Olga B. and Sullivan, Charles T. and Garcia, Ernest J.},
abstractNote = {An optical waveguide switch is disclosed which is formed from III-V compound semiconductors and which has a moveable optical waveguide with a cantilevered portion that can be bent laterally by an integral electrostatic actuator to route an optical signal (i.e. light) between the moveable optical waveguide and one of a plurality of fixed optical waveguides. A plurality of optical waveguide switches can be formed on a common substrate and interconnected to form an optical switching network.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {6}
}

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Works referenced in this record:

Gallium arsenide as a mechanical material
journal, March 1994


Sacrificial etching of III - V compounds for micromechanical devices
journal, December 1996


Geometrical modulation-based interferometry for displacement sensing using optically coupled suspended waveguides
journal, January 1998


Integrated electrostatic micro-switch for optical fibre networks driven by low voltage
journal, January 1996


Micromachining and mechanical properties of GaInAs/InP microcantilevers
journal, February 1998


Characterization of AlGaAs microstructure fabricated by AlGaAs/GaAs micromachining
journal, January 1994


Surface-micromachined epitaxial silicon cantilevers as movable optical waveguides on silicon-on-insulator substrates
journal, June 1995


Micro-opto mechanical switch integrated on silicon
journal, November 1995


III–V micromachined devices for microsystems
journal, September 1998


GaAs-based microelectromechanical waveguide switch
conference, January 2000


Submicron, movable gallium arsenide mechanical structures and actuators
conference, January 1992


An SOI optical microswitch integrated with silicon waveguides and touch-down micromirror actuators
conference, January 2000