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Title: Charge exchange molecular ion source

Abstract

Ions, particularly molecular ions with multiple dopant nucleons per ion, are produced by charge exchange. An ion source contains a minimum of two regions separated by a physical barrier and utilizes charge exchange to enhance production of a desired ion species. The essential elements are a plasma chamber for production of ions of a first species, a physical separator, and a charge transfer chamber where ions of the first species from the plasma chamber undergo charge exchange or transfer with the reactant atom or molecules to produce ions of a second species. Molecular ions may be produced which are useful for ion implantation.

Inventors:
Issue Date:
Research Org.:
The Regents of the University of California, Oakland, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1174352
Patent Number(s):
6,573,510
Application Number:
09/596,828
Assignee:
The Regents of the University of California (Oakland, CA) OSTI
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS

Citation Formats

Vella, Michael C. Charge exchange molecular ion source. United States: N. p., 2003. Web.
Vella, Michael C. Charge exchange molecular ion source. United States.
Vella, Michael C. Tue . "Charge exchange molecular ion source". United States. https://www.osti.gov/servlets/purl/1174352.
@article{osti_1174352,
title = {Charge exchange molecular ion source},
author = {Vella, Michael C.},
abstractNote = {Ions, particularly molecular ions with multiple dopant nucleons per ion, are produced by charge exchange. An ion source contains a minimum of two regions separated by a physical barrier and utilizes charge exchange to enhance production of a desired ion species. The essential elements are a plasma chamber for production of ions of a first species, a physical separator, and a charge transfer chamber where ions of the first species from the plasma chamber undergo charge exchange or transfer with the reactant atom or molecules to produce ions of a second species. Molecular ions may be produced which are useful for ion implantation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {6}
}

Patent:

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