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Title: Growth process for gallium nitride porous nanorods

A GaN nanorod and formation method. Formation includes providing a substrate having a GaN film, depositing SiN.sub.x on the GaN film, etching a growth opening through the SiN.sub.x and into the GaN film, growing a GaN nanorod through the growth opening, the nanorod having a nanopore running substantially through its centerline. Focused ion beam etching can be used. The growing can be done using organometallic vapor phase epitaxy. The nanopore diameter can be controlled using the growth opening diameter or the growing step duration. The GaN nanorods can be removed from the substrate. The SiN.sub.x layer can be removed after the growing step. A SiO.sub.x template can be formed on the GaN film and the GaN can be grown to cover the SiO.sub.x template before depositing SiN.sub.x on the GaN film. The SiO.sub.x template can be removed after growing the nanorods.
Inventors:
;
Issue Date:
OSTI Identifier:
1174203
Assignee:
Purdue Research Foundation (West Lafayette, IN) NETL
Patent Number(s):
8,986,835
Application Number:
13/080,165
Contract Number:
FC26-06NT42862
Resource Relation:
Patent File Date: 2011 Apr 05
Research Org:
Purdue Research Foundation, West Lafayette, IN (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Works referenced in this record:

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Effect of nanoporous GaN templates with different pore diameters on the subsequent thick GaN layers by HVPE
journal, January 2010
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  • DOI: 10.1016/j.ssc.2009.10.025