Electrostatic MEMS devices with high reliability

Goldsmith, Charles L; Auciello, Orlando H; Sumant, Anirudha V; Mancini, Derrick C; Gudeman, Chris; Sampath, Suresh; Carlilse, John A; Carpick, Robert W; Hwang, James

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Title: Electrostatic MEMS devices with high reliability

Abstract

The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.

Inventors:: Goldsmith, Charles L; Auciello, Orlando H; Sumant, Anirudha V; Mancini, Derrick C; Gudeman, Chris; Sampath, Suresh; Carlilse, John A; Carpick, Robert W; Hwang, James

Issue Date:: Tue Feb 24 00:00:00 EST 2015

Research Org.:: Univ. of Wisconsin, Madison, WI (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1170735

Patent Number(s):: 8963659

Application Number:: 13/114,945

Assignee:: Goldsmith,Charles L. (Plano, TX)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01H - ELECTRIC SWITCHES

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03K - PULSE TECHNIQUE

Show more

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01H - ELECTRIC SWITCHES
H01H59/0009 - {making use of micromechanics}

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03K - PULSE TECHNIQUE
H03K17/975 - using a capacitive movable element

Show less

DOE Contract Number:: FG02-02ER46016

Resource Type:: Patent

Resource Relation:: Patent File Date: 2011 May 24

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Goldsmith, Charles L, Auciello, Orlando H, Sumant, Anirudha V, Mancini, Derrick C, Gudeman, Chris, Sampath, Suresh, Carlilse, John A, Carpick, Robert W, and Hwang, James. Electrostatic MEMS devices with high reliability.  United States: N. p., 2015. 
        Web.

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                    Goldsmith, Charles L, Auciello, Orlando H, Sumant, Anirudha V, Mancini, Derrick C, Gudeman, Chris, Sampath, Suresh, Carlilse, John A, Carpick, Robert W, & Hwang, James. Electrostatic MEMS devices with high reliability.  United States.

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                    Goldsmith, Charles L, Auciello, Orlando H, Sumant, Anirudha V, Mancini, Derrick C, Gudeman, Chris, Sampath, Suresh, Carlilse, John A, Carpick, Robert W, and Hwang, James. Tue .  
        "Electrostatic MEMS devices with high reliability".  United States.  https://www.osti.gov/servlets/purl/1170735.

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@article{osti_1170735,

  title        = {Electrostatic MEMS devices with high reliability},

  author       = {Goldsmith, Charles L and Auciello, Orlando H and Sumant, Anirudha V and Mancini, Derrick C and Gudeman, Chris and Sampath, Suresh and Carlilse, John A and Carpick, Robert W and Hwang, James},

  abstractNote = {The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Feb 24 00:00:00 EST 2015},

  month        = {Tue Feb 24 00:00:00 EST 2015}

}

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Works referenced in this record:

Microminiature, monolithic, variable electrical signal processor and apparatus including same
patent, June 1996

Kanack, Brad
US Patent Document 5,526,172
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Micromechanical microwave switching
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Goldsmith, Charles L.; Kanack, Bradley M.; Lin, Tsen-Hwang
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Method and apparatus for switching high frequency signals
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Ehmke, John Charles; Goldsmith, Charles L.; Yao, Zhimin Jamie
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Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor
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Proximity micro-electro-mechanical system
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Goldsmith, Charles L.
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Method and apparatus for switching high frequency signals
patent, March 2004

Ehmke, John Charles; Goldsmith, Charles L.; Yao, Zhimin Jamie
US Patent Document 6,700,172
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6700172

Capacitive type microelectromechanical RF switch
patent, August 2004

Chen, Li-Shu; Fudem, Howard; Crockett, III, Donald E.
US Patent Document 6,777,765
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Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices
patent, November 2004

Gruen, Dieter M.; Busmann, Hans-Gerd; Meyer, Eva-Maria
US Patent Document 6,811,612
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Micromechanical membrane switches for microwave applications
conference, January 1995

Goldsmith, C.; Powers, B.
Proceedings of 1995 IEEE MTT-S International Microwave Symposium
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Characteristics of micromachined switches at microwave frequencies
conference, January 1996

Goldsmith, C.; Randall, J.; Eshelman, S.
1996 IEEE MTT-S International Microwave Symposium Digest
https://doi.org/10.1109/MWSYM.1996.511231

Performance of low-loss RF MEMS capacitive switches
journal, January 1998

Goldsmith, C. L.; Eshelman, S.
IEEE Microwave and Guided Wave Letters, Vol. 8, Issue 8
https://doi.org/10.1109/75.704410

Temperature Acceleration of Dielectric Charging in RF MEMS Capacitive Switches
conference, June 2006

Yuan, Xiaobin; Peng, Zhen; M. Hwang, James
2006 IEEE MTT-S International Microwave Symposium Digest
https://doi.org/10.1109/MWSYM.2006.249923

Acceleration of Dielectric Charging in RF MEMS Capacitive Switches
journal, January 2006

Yuan, Xiaobin; Peng, Zhen; Hwang, James C. M.
IEEE Transactions on Device and Materials Reliability, Vol. 6, Issue 4
https://doi.org/10.1109/TDMR.2006.887417

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Similar Records

Title: Electrostatic MEMS devices with high reliability

Abstract

Citation Formats

Microminiature, monolithic, variable electrical signal processor and apparatus including same patent, June 1996

Micromechanical microwave switching patent, April 1997

Method and apparatus for switching high frequency signals patent, May 2002

Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor patent, July 2002

Proximity micro-electro-mechanical system patent, August 2003

Method and apparatus for switching high frequency signals patent, March 2004

Capacitive type microelectromechanical RF switch patent, August 2004

Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices patent, November 2004

Micromechanical membrane switches for microwave applications conference, January 1995

Characteristics of micromachined switches at microwave frequencies conference, January 1996

Performance of low-loss RF MEMS capacitive switches journal, January 1998

Temperature Acceleration of Dielectric Charging in RF MEMS Capacitive Switches conference, June 2006

Acceleration of Dielectric Charging in RF MEMS Capacitive Switches journal, January 2006

Microminiature, monolithic, variable electrical signal processor and apparatus including same
patent, June 1996

Micromechanical microwave switching
patent, April 1997

Method and apparatus for switching high frequency signals
patent, May 2002

Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor
patent, July 2002

Proximity micro-electro-mechanical system
patent, August 2003

Method and apparatus for switching high frequency signals
patent, March 2004

Capacitive type microelectromechanical RF switch
patent, August 2004

Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices
patent, November 2004

Micromechanical membrane switches for microwave applications
conference, January 1995

Characteristics of micromachined switches at microwave frequencies
conference, January 1996

Performance of low-loss RF MEMS capacitive switches
journal, January 1998

Temperature Acceleration of Dielectric Charging in RF MEMS Capacitive Switches
conference, June 2006

Acceleration of Dielectric Charging in RF MEMS Capacitive Switches
journal, January 2006