Replication of patterned thin-film structures for use in plasmonics and metamaterials
Abstract
The present invention provides templating methods for replicating patterned metal films from a template substrate such as for use in plasmonic devices and metamaterials. Advantageously, the template substrate is reusable and can provide plural copies of the structure of the template substrate. Because high-quality substrates that are inherently smooth and flat are available, patterned metal films in accordance with the present invention can advantageously provide surfaces that replicate the surface characteristics of the template substrate both in the patterned regions and in the unpatterned regions.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Minnesota, Minneapolis, MN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1169060
- Patent Number(s):
- 8948562
- Application Number:
- 13/131,197
- Assignee:
- Regents of the University of Minnesota (St. Paul, MN)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- DOE Contract Number:
- FG02-06ER46438
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY
Citation Formats
Norris, David J, Han, Sang Eon, Bhan, Aditya, Nagpal, Prashant, Lindquist, Nathan Charles, and Oh, Sang-Hyun. Replication of patterned thin-film structures for use in plasmonics and metamaterials. United States: N. p., 2015.
Web.
Norris, David J, Han, Sang Eon, Bhan, Aditya, Nagpal, Prashant, Lindquist, Nathan Charles, & Oh, Sang-Hyun. Replication of patterned thin-film structures for use in plasmonics and metamaterials. United States.
Norris, David J, Han, Sang Eon, Bhan, Aditya, Nagpal, Prashant, Lindquist, Nathan Charles, and Oh, Sang-Hyun. Tue .
"Replication of patterned thin-film structures for use in plasmonics and metamaterials". United States. https://www.osti.gov/servlets/purl/1169060.
@article{osti_1169060,
title = {Replication of patterned thin-film structures for use in plasmonics and metamaterials},
author = {Norris, David J and Han, Sang Eon and Bhan, Aditya and Nagpal, Prashant and Lindquist, Nathan Charles and Oh, Sang-Hyun},
abstractNote = {The present invention provides templating methods for replicating patterned metal films from a template substrate such as for use in plasmonic devices and metamaterials. Advantageously, the template substrate is reusable and can provide plural copies of the structure of the template substrate. Because high-quality substrates that are inherently smooth and flat are available, patterned metal films in accordance with the present invention can advantageously provide surfaces that replicate the surface characteristics of the template substrate both in the patterned regions and in the unpatterned regions.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {2}
}
Works referenced in this record:
Photoplastic near-field optical probe with sub-100 nm aperture made by replication from a nanomould: PHOTOPLASTIC NEAR-FIELD OPTICAL PROBE
journal, March 2003
- Kim, G. M.; Kim, B. J.; Ten Have, E. S.
- Journal of Microscopy, Vol. 209, Issue 3
Templated Fabrication of Periodic Metallic Nanopyramid Arrays
journal, September 2007
- Sun, Chih-Hung; Linn, Nicholas C.; Jiang, Peng
- Chemistry of Materials, Vol. 19, Issue 18