Thin film application device and method for coating small aperture vacuum vessels

Walters, Dean R; Este, Grantley O

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Title: Thin film application device and method for coating small aperture vacuum vessels

Abstract

A device and method for coating an inside surface of a vessel is provided. In one embodiment, a coating device comprises a power supply and a diode in electrical communication with the power supply, wherein electrodes comprising the diode reside completely within the vessel. The method comprises reversibly sealing electrodes in a vessel, sputtering elemental metal or metal compound on the surface while maintaining the surface in a controlled atmosphere.

Inventors:: Walters, Dean R; Este, Grantley O

Issue Date:: Tue Jan 27 00:00:00 EST 2015

Research Org.:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1168692

Patent Number(s):: 8940140

Application Number:: 11/850,409

Assignee:: Uchicago Argonne, LLC (Chicago, IL)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/0036 - {Reactive sputtering}
C23C14/046 - {Coating cavities or hollow spaces, e.g. interior of tubes
C23C14/0641 - {Nitrides
C23C14/081 - {of aluminium, magnesium or beryllium}
C23C14/16 - on metallic substrates or on substrates of boron or silicon
C23C14/345 - {using substrate bias}

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Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION; 36 MATERIALS SCIENCE

Citation Formats


                    Walters, Dean R, and Este, Grantley O. Thin film application device and method for coating small aperture vacuum vessels.  United States: N. p., 2015. 
        Web.

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                    Walters, Dean R, & Este, Grantley O. Thin film application device and method for coating small aperture vacuum vessels.  United States.

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                    Walters, Dean R, and Este, Grantley O. Tue .  
        "Thin film application device and method for coating small aperture vacuum vessels".  United States.  https://www.osti.gov/servlets/purl/1168692.

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@article{osti_1168692,

  title        = {Thin film application device and method for coating small aperture vacuum vessels},

  author       = {Walters, Dean R and Este, Grantley O},

  abstractNote = {A device and method for coating an inside surface of a vessel is provided. In one embodiment, a coating device comprises a power supply and a diode in electrical communication with the power supply, wherein electrodes comprising the diode reside completely within the vessel. The method comprises reversibly sealing electrodes in a vessel, sputtering elemental metal or metal compound on the surface while maintaining the surface in a controlled atmosphere.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Jan 27 00:00:00 EST 2015},

  month        = {Tue Jan 27 00:00:00 EST 2015}

}

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Works referenced in this record:

Glow discharge method and apparatus
patent, January 1979

Penfold, Alan S.; Thornton, John A.
US Patent Document 4,132,613
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4132613

Cathodic sputtering target including means for detecting target piercing
patent, February 1983

Zega, Bogdan
US Patent Document 4,374,722
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4374722

Cylindrical cathode for magnetically-enhanced sputtering
patent, March 1983

Zega, Bogdan
US Patent Document 4,376,025
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4376025

Method and apparatus for linear magnetron sputtering
patent, March 1994

Marshall, John R.
US Patent Document 5,298,137
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5298137

Vacuum arc deposition apparatus
patent, April 1998

Tamagaki, Hiroshi; Kawaguchi, Hiroshi; Fujii, Hirofumi
US Patent Document 5,744,017
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5744017

Sputtering system using cylindrical rotating magnetron electrically powered using alternating current
patent, September 1998

Lehan, John; Byorum, Henry; Hill, Russell J.
US Patent Document 5,814,195
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5814195

Method and apparatus for magnetron sputtering
patent, August 2002

Tzatzov, Konstantin K.; Gorodetsky, Alexander S.
US Patent Document 6,436,252
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6436252

Method and apparatus of plasma-enhanced coaxial magnetron for sputter-coating interior surfaces
patent, July 2004

Wei, Ronghua
US Patent Document 6,767,436
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6767436

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Similar Records

Title: Thin film application device and method for coating small aperture vacuum vessels

Abstract

Citation Formats

Glow discharge method and apparatus patent, January 1979

Cathodic sputtering target including means for detecting target piercing patent, February 1983

Cylindrical cathode for magnetically-enhanced sputtering patent, March 1983

Method and apparatus for linear magnetron sputtering patent, March 1994

Vacuum arc deposition apparatus patent, April 1998

Sputtering system using cylindrical rotating magnetron electrically powered using alternating current patent, September 1998

Method and apparatus for magnetron sputtering patent, August 2002

Method and apparatus of plasma-enhanced coaxial magnetron for sputter-coating interior surfaces patent, July 2004

Glow discharge method and apparatus
patent, January 1979

Cathodic sputtering target including means for detecting target piercing
patent, February 1983

Cylindrical cathode for magnetically-enhanced sputtering
patent, March 1983

Method and apparatus for linear magnetron sputtering
patent, March 1994

Vacuum arc deposition apparatus
patent, April 1998

Sputtering system using cylindrical rotating magnetron electrically powered using alternating current
patent, September 1998

Method and apparatus for magnetron sputtering
patent, August 2002

Method and apparatus of plasma-enhanced coaxial magnetron for sputter-coating interior surfaces
patent, July 2004