Rolled-up transformer structure for a radiofrequency integrated circuit (RFIC)
Abstract
A rolled-up transformer structure comprises a multilayer sheet having a rolled configuration comprising multiple turns about a longitudinal axis. The multilayer sheet comprises more than one conductive pattern layer on a strain-relieved layer, including a first conductive film and a second conductive film separated from the first conductive film in a thickness direction. The first conductive film comprises an even number of primary conductive strips, where each primary conductive strip has a length extending in the rolling direction, and the second conductive film comprises an even number of secondary conductive strips, where each secondary conductive strip has a length extending in the rolling direction. In the rolled configuration, turns of the primary conductive strips and turns of the secondary conductive strips wrap around the longitudinal axis. The primary conductive strips serve as a primary winding and the secondary conductive strips serve as a secondary winding of the rolled-up transformer structure.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Illinois at Urbana-Champaign, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1168679
- Patent Number(s):
- 8941460
- Application Number:
- 14/051,208
- Assignee:
- The Board of Trustees of the University of Illinois (Urbana, IL)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01F - MAGNETS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- FG02-07ER46471
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Citation Formats
Li, Xiuling, and Huang, Wen. Rolled-up transformer structure for a radiofrequency integrated circuit (RFIC). United States: N. p., 2015.
Web.
Li, Xiuling, & Huang, Wen. Rolled-up transformer structure for a radiofrequency integrated circuit (RFIC). United States.
Li, Xiuling, and Huang, Wen. Tue .
"Rolled-up transformer structure for a radiofrequency integrated circuit (RFIC)". United States. https://www.osti.gov/servlets/purl/1168679.
@article{osti_1168679,
title = {Rolled-up transformer structure for a radiofrequency integrated circuit (RFIC)},
author = {Li, Xiuling and Huang, Wen},
abstractNote = {A rolled-up transformer structure comprises a multilayer sheet having a rolled configuration comprising multiple turns about a longitudinal axis. The multilayer sheet comprises more than one conductive pattern layer on a strain-relieved layer, including a first conductive film and a second conductive film separated from the first conductive film in a thickness direction. The first conductive film comprises an even number of primary conductive strips, where each primary conductive strip has a length extending in the rolling direction, and the second conductive film comprises an even number of secondary conductive strips, where each secondary conductive strip has a length extending in the rolling direction. In the rolled configuration, turns of the primary conductive strips and turns of the secondary conductive strips wrap around the longitudinal axis. The primary conductive strips serve as a primary winding and the secondary conductive strips serve as a secondary winding of the rolled-up transformer structure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {1}
}
Works referenced in this record:
Light modulator with specific electrode configurations
patent, May 2000
- Furlani, Edward P.; Grande, William J.; Stephany, Thomas M.
- US Patent Document 6,067,183
Micromachined element and method of fabrication thereof
patent, June 2001
- Marcus, Robert B.; Zhang, Yanwei
- US Patent Document 6,245,444
Electrostatically actuated electromagnetic radiation shutter
patent, May 2002
- Goodwin-Johansson, Scott H.
- US Patent Document 6,396,620
Electrostatic actuator, for causing a transverse movement of a yarn in a textile machine, and a textile machine including this actuator
patent, April 2005
- Pizzi, Marco
- US Patent Document 6,879,084
Method of making photolithographically-patterned out-of-plane coil structures
patent, February 2006
- Chua, Christopher L.; Lemmi, Francesco; Van Schuylenbergh, Koenraad F.
- US Patent Document 7,000,315
Method for producing a microcoil
patent, May 2010
- Schmidt, Oliver; Deneke, Christoph
- US Patent Document 7,707,714
Microelectromechanical tunable inductor
patent, May 2010
- Stalford, Harold L.; Hietala, Vincent M.; Fleming, James G.
- US Patent Document 7,710,232
Light screening apparatus including roll-up actuators
patent, November 2013
- Kim, Che-heung; Hong, Seog-woo
- US Patent Document 8,576,469
Out-of-plane spiral-coil inductor self-assembled by locally controlled bimorph actuation
journal, January 2011
- Mohamed Ali, M. S.; Bycraft, B.; Schlosser, C.
- Micro & Nano Letters, Vol. 6, Issue 12
Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges
journal, January 2006
- Arora, William J.; Nichol, Anthony J.; Smith, Henry I.
- Applied Physics Letters, Vol. 88, Issue 5
Self-organized 1.55 µm InAs/InP quantum dot tube nanoscale coherent light sources
conference, January 2011
- Bianucci, P.; Mukherjee, S.; Poole, P.
- 2011 IEEE Winter Topicals (WTM), IEEE Winter Topicals 2011
Self-Assembled Ultra-Compact Energy Storage Elements Based on Hybrid Nanomembranes
journal, July 2010
- Bof Bufon, Carlos César; Cojal González, José David; Thurmer, Dominic J.
- Nano Letters, Vol. 10, Issue 7
Electroless deposition of novel Ag–W thin films
journal, November 2003
- Bogush, V.; Inberg, A.; Croitoru, N.
- Microelectronic Engineering, Vol. 70, Issue 2-4, p. 489-494
A novel low-loss Terahertz waveguide: Polymer tube
journal, January 2010
- Chen, Daru; Chen, Haibin
- Optics Express, Vol. 18, Issue 4
Controlled Assembly and Dispersion of Strain-Induced InGaAs/GaAs Nanotubes
journal, July 2008
- Ik Su Chun,
- IEEE Transactions on Nanotechnology, Vol. 7, Issue 4
InGaAs/GaAs 3D architecture formation by strain-induced self-rolling with lithographically defined rectangular stripe arrays
journal, April 2008
- Chun, I. S.; Verma, V. B.; Elarde, V. C.
- Journal of Crystal Growth, Vol. 310, Issue 7-9, p. 2353-2358
Geometry Effect on the Strain-Induced Self-Rolling of Semiconductor Membranes
journal, October 2010
- Chun, Ik Su; Challa, Archana; Derickson, Brad
- Nano Letters, Vol. 10, Issue 10
Directional scrolling of SiGe/Si/Cr nanoribbon on Si(111) surfaces controlled by two-fold rotational symmetry underetching
journal, January 2013
- Dai, Lu; Zhang, Li
- Nanoscale, Vol. 5, Issue 3
Strain-driven self-rolling mechanism for anomalous coiling of multilayer nanohelices
journal, December 2009
- Dai, L.; Shen, W. Z.
- Journal of Applied Physics, Vol. 106, Issue 11
Stresses and deformation processes in thin films on substrates
journal, January 1988
- Doerner, Mary F.; Nix, William D.
- Critical Reviews in Solid State and Materials Sciences, Vol. 14, Issue 3
Aligned arrays of single walled carbon nanotubes for transparent electronics
conference, June 2013
- Du, Frank; Rogers, John A.
- SPIE Defense, Security, and Sensing, SPIE Proceedings
Terahertz attenuation and dispersion characteristics of coplanar transmission lines
journal, June 1991
- Frankel, M. Y.; Gupta, S.; Valdmanis, J. A.
- IEEE Transactions on Microwave Theory and Techniques, Vol. 39, Issue 6
Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils
journal, February 2001
- Golod, S. V.; Prinz, V. Ya; Mashanov, V. I.
- Semiconductor Science and Technology, Vol. 16, Issue 3
Freestanding SiGe/Si/Cr and SiGe/Si/SixNy/Cr microtubes
journal, April 2004
- Golod, S. V.; Prinz, V. Ya.; Wägli, P.
- Applied Physics Letters, Vol. 84, Issue 17
Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties
journal, January 2008
- Gorin, A.; Jaouad, A.; Grondin, E.
- Optics Express, Vol. 16, Issue 18
Fabrication and applications of large arrays of multifunctional rolled-up SiO/SiO 2 microtubes
journal, January 2012
- Harazim, Stefan M.; Xi, Wang; Schmidt, Christine K.
- J. Mater. Chem., Vol. 22, Issue 7
Low-dispersion thin-film microstrip lines with cyclotene (benzocyclobutene) as dielectric medium
journal, April 1997
- Heiliger, H. -M.; Nagel, M.; Roskos, H. G.
- Applied Physics Letters, Vol. 70, Issue 17
Optical properties of rolled-up tubular microcavities from shaped nanomembranes
journal, April 2009
- Kiravittaya, S.; Bolaños Quiñones, V. A.; Benyoucef, M.
- Applied Physics Letters, Vol. 94, Issue 14, Article No. 141901
Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication
journal, December 2005
- Huang, M.; Boone, C.; Roberts, M.
- Advanced Materials, Vol. 17, Issue 23, p. 2860-2864
Thinning and Shaping Solid Films into Functional and Integrative Nanomembranes
journal, April 2012
- Huang, Gaoshan; Mei, Yongfeng
- Advanced Materials, Vol. 24, Issue 19, p. 2517-2546
Rolled-up transparent microtubes as two-dimensionally confined culture scaffolds of individual yeast cells
journal, January 2009
- Huang, Gaoshan; Mei, Yongfeng; Thurmer, Dominic J.
- Lab Chip, Vol. 9, Issue 2
Mechano-electronic Superlattices in Silicon Nanoribbons
journal, February 2009
- Huang, Minghuang; Ritz, Clark S.; Novakovic, Bozidar
- ACS Nano, Vol. 3, Issue 3
Novel Highly Conductive Silver-Tungsten Thin Films Electroless Deposited from Benzoate Solution for Microelectronic Applications
journal, January 2003
- Inberg, A.; Bogush, V.; Croitoru, N.
- Journal of The Electrochemical Society, Vol. 150, Issue 5
Photonic-crystal slab for terahertz-wave integrated circuits
conference, September 2012
- Ishigaki, Tsukasa; Fujita, Masayuki; Nagai, Masaya
- 2012 IEEE Photonics Conference (IPC), IEEE Photonics Conference 2012
A 32nm SoC platform technology with 2nd generation high-k/metal gate transistors optimized for ultra low power, high performance, and high density product applications
conference, December 2009
- Jan, C. -H.; Agostinelli, M.; Buehler, M.
- 2009 IEEE International Electron Devices Meeting (IEDM)
On-chip spiral inductors suspended over deep copper-lined cavities
journal, January 2000
- Hongrui Jiang, ; Yeh, J. -L. A.
- IEEE Transactions on Microwave Theory and Techniques, Vol. 48, Issue 12
Coherent emission from ultrathin-walled spiral InGaAs/GaAs quantum dot microtubes
journal, January 2009
- Li, Feng; Mi, Zetian; Vicknesh, Sahmuganathan
- Optics Letters, Vol. 34, Issue 19
Influences of process parameters of low frequency PECVD technology on intrinsic stress of silicon nitride thin film
conference, October 2010
- Li, Weizhi; Kang, Zhe; Ye, Yun
- 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, SPIE Proceedings
Self-rolled-up microtube ring resonators: a review of geometrical and resonant properties
journal, January 2011
- Li, Xiuling
- Advances in Optics and Photonics, Vol. 3, Issue 4, p. 366-387
Strain induced semiconductor nanotubes from formation process to device applications
journal, September 2008
- Li, Xiuling
- Journal of Physics D: Applied Physics, Vol. 41, Issue 19, Article No. 193001
Ultrasmooth Silver Thin Films Deposited with a Germanium Nucleation Layer
journal, January 2009
- Logeeswaran VJ, ; Kobayashi, Nobuhiko P.; Islam, M. Saif
- Nano Letters, Vol. 9, Issue 1
Toroidal hollow-core microcavities produced by self-rolling of strained polymer bilayer films
journal, February 2008
- Luchnikov, V.; Kumar, K.; Stamm, M.
- Journal of Micromechanics and Microengineering, Vol. 18, Issue 3
Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure
journal, November 2006
- Luo, J. K.; Huang, R.; He, J. H.
- Sensors and Actuators A: Physical, Vol. 132, Issue 1, p. 346-353
Modeling of silicon nitride deposition by RF plasma-enhanced chemical vapor deposition
journal, January 1994
- Masi, Maurizio; Besana, Giambattista; Canzi, Lorenzo
- Chemical Engineering Science, Vol. 49, Issue 5, p. 669-679
Versatile Approach for Integrative and Functionalized Tubes by Strain Engineering of Nanomembranes on Polymers
journal, November 2008
- Mei, Yongfeng; Huang, Gaoshan; Solovev, Alexander A.
- Advanced Materials, Vol. 20, Issue 21, p. 4085-4090
1.3 – 1.55 µm self-organized InAs quantum dot tube nanoscale lasers on silicon
conference, October 2011
- Mi, Zetian; Bianucci, Pablo; Dastjerdi, Mohammad H. T.
- 2011 IEEE Photonics Conference (IPC), IEEE Photonic Society 24th Annual Meeting
Reducing Transmission Losses in Hollow THz Waveguides
journal, September 2011
- Mitrofanov, Oleg; James, Richard; Fernandez, F. Aníbal
- IEEE Transactions on Terahertz Science and Technology, Vol. 1, Issue 1
Dielectric-lined cylindrical metallic THz waveguides: mode structure and dispersion
journal, January 2010
- Mitrofanov, Oleg; Harrington, James A.
- Optics Express, Vol. 18, Issue 3
Single-mask microfabrication of three-dimensional objects from strained bimorphs
journal, August 2007
- Moiseeva, E.; Senousy, Y. M.; McNamara, S.
- Journal of Micromechanics and Microengineering, Vol. 17, Issue 9
Si IC-compatible inductors and LC passive filters
journal, January 1990
- Nguyen, N. M.; Meyer, R. G.
- IEEE Journal of Solid-State Circuits, Vol. 25, Issue 4
Advances in Terahertz Waveguides and Sources
journal, April 2011
- Pahlevaninezhad, H.; Heshmat, B.; Darcie, T. E.
- IEEE Photonics Journal, Vol. 3, Issue 2
Transfer printing of flexible hybrid inductor-capacitor filters via pre-etched silicon-on-insulator mother wafer
journal, August 2012
- Pang, Liang; Seo, Hui-Chan; (Kevin) Kim, Kyekyoon
- Applied Physics Letters, Vol. 101, Issue 6
The detailed analysis of high Q CMOS-compatible microwave spiral inductors in silicon technology
journal, January 1998
- Min Park,
- IEEE Transactions on Electron Devices, Vol. 45, Issue 9
Residual stress improvement of platinum thin film in Au/Pt/Ti/p-GaAs ohmic contact by RF sputtering power
journal, November 2012
- Parvizian, M.; Rahimi-Ashtari, F.; Goodarzi, A.
- Applied Surface Science, Vol. 260, p. 77-79
Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays
journal, February 2000
- Prinz, V. Ya; Seleznev, V. A.; Gutakovsky, A. K.
- Physica E: Low-dimensional Systems and Nanostructures, Vol. 6, Issue 1-4, p. 828-831
Rolled-up nanotechnology for the fabrication of three-dimensional fishnet-type GaAs-metal metamaterials with negative refractive index at near-infrared frequencies
journal, April 2012
- Rottler, Andreas; Harland, Malte; Bröll, Markus
- Applied Physics Letters, Vol. 100, Issue 15
Morphological Differentiation of Neurons on Microtopographic Substrates Fabricated by Rolled-Up Nanotechnology
journal, September 2010
- Schulze, Sabine; Huang, Gaoshan; Krause, Matthias
- Advanced Engineering Materials, Vol. 12, Issue 9, p. B558-B564
Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
journal, January 1990
- Seidel, H.; Csepregi, L.; Heuberger, A.
- Journal of The Electrochemical Society, Vol. 137, Issue 11, p. 3612-3626
Generation and registration of disturbances in a gas flow. 1. Formation of arrays of tubular microheaters and microsensors
journal, March 2009
- Seleznev, V. A.; Prinz, V. Ya.; Aniskin, V. M.
- Journal of Applied Mechanics and Technical Physics, Vol. 50, Issue 2
Electroless Silver and Silver with Tungsten Thin Films for Microelectronics and Microelectromechanical System Applications
journal, January 2000
- Shacham-Diamand, Yosi; Inberg, Alexandra; Sverdlov, Yelena
- Journal of The Electrochemical Society, Vol. 147, Issue 9
Generation and registration of disturbances in a gas flow. 2. Experiments with arrays of tubular microheaters and microsensors
journal, May 2009
- Shiplyuk, A. N.; Aniskin, V. M.; Seleznev, V. A.
- Journal of Applied Mechanics and Technical Physics, Vol. 50, Issue 3
Mechanism of SiNxHy deposition from N2–SiH4 plasma
journal, May 1990
- Smith, Donald L.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 8, Issue 3
Lab-in-a-Tube: Detection of Individual Mouse Cells for Analysis in Flexible Split-Wall Microtube Resonator Sensors
journal, October 2011
- Smith, Elliot J.; Schulze, Sabine; Kiravittaya, Suwit
- Nano Letters, Vol. 11, Issue 10
From rolled-up Si microtubes to SiOx/Si optical ring resonators
journal, May 2007
- Songmuang, R.; Rastelli, A.; Mendach, S.
- Microelectronic Engineering, Vol. 84, Issue 5-8, p. 1427-1430
Miniature 3-D inductors in standard CMOS process
journal, April 2002
- Chih-Chun Tang,
- IEEE Journal of Solid-State Circuits, Vol. 37, Issue 4
Dual cylindrical metallic grating-cladding polymer hollow waveguide for terahertz transmission with low loss
journal, September 2010
- Tian, Dongbin; Zhang, Huaiwu; Wen, Qiye
- Applied Physics Letters, Vol. 97, Issue 13
Controlled Transfer of Single Rolled-Up InGaAs–GaAs Quantum-Dot Microtube Ring Resonators Using Optical Fiber Abrupt Tapers
journal, March 2010
- Zhaobing Tian,
- IEEE Photonics Technology Letters, Vol. 22, Issue 5
Single rolled-up InGaAs/GaAs quantum dot microtubes integrated with silicon-on-insulator waveguides
journal, January 2011
- Tian, Zhaobing; Veerasubramanian, Venkat; Bianucci, Pablo
- Optics Express, Vol. 19, Issue 13
Analysis of Bi-Metal Thermostats
journal, January 1925
- Timoshenko, S.
- Journal of the Optical Society of America, Vol. 11, Issue 3
Poisson's Ratio of Low-Temperature PECVD Silicon Nitride Thin Films
journal, June 2007
- Walmsley, Byron A.; Liu, Yinong; Hu, Xiao Zhi
- Journal of Microelectromechanical Systems, Vol. 16, Issue 3
High-Q Micromachined Inductors for 10-to-30-GHz RFIC Applications on Low Resistivity Si-Substrate
conference, September 2006
- Wang, To-po; Wang, Huei
- 2006 European Microwave Conference
Formulas for the Skin Effect
journal, September 1942
- Wheeler, H. A.
- Proceedings of the IRE, Vol. 30, Issue 9
Determination of coupling capacitance of underpasses, air bridges and crossings in MICs and MMICs
journal, January 1987
- Wiemer, L.; Jansen, R. H.
- Electronics Letters, Vol. 23, Issue 7
Chemical control of physical properties in silicon nitride films
journal, October 2012
- Xu, Xiangdong; Zhou, Dong; He, Qiong
- Applied Physics A, Vol. 111, Issue 3
A physical model for planar spiral inductors on silicon
conference, January 1996
- Yue, C. P.; Ryu, C.; Lau, J.
- International Electron Devices Meeting. Technical Digest
Physical modeling of spiral inductors on silicon
journal, March 2000
- Yue, C. P.; Wong, S. S.
- IEEE Transactions on Electron Devices, Vol. 47, Issue 3
Semiconductor Nanomembrane Tubes: Three-Dimensional Confinement for Controlled Neurite Outgrowth
journal, March 2011
- Yu, Minrui; Huang, Yu; Ballweg, Jason
- ACS Nano, Vol. 5, Issue 4
Mechanism for Nanotube Formation from Self-Bending Nanofilms Driven by Atomic-Scale Surface-Stress Imbalance
journal, April 2007
- Zang, Ji; Huang, Minghuang; Liu, Feng
- Physical Review Letters, Vol. 98, Issue 14
Stacked inductors and transformers in CMOS technology
journal, April 2001
- Zolfaghari, A.; Chan, A.; Razavi, B.
- IEEE Journal of Solid-State Circuits, Vol. 36, Issue 4