Device for calorimetric measurement
Abstract
In one aspect, provided herein is a single crystal silicon microcalorimeter, for example useful for high temperature operation and long-term stability of calorimetric measurements. Microcalorimeters described herein include microcalorimeter embodiments having a suspended structure and comprising single crystal silicon. Also provided herein are methods for making calorimetric measurements, for example, on small quantities of materials or for determining the energy content of combustible material having an unknown composition.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Illinois at Urbana-Champaign, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1167226
- Patent Number(s):
- 8931950
- Application Number:
- 13/059,812
- Assignee:
- The Board of Trustees of the University of Illinois (Urbana, IL)
- Patent Classifications (CPCs):
-
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- B568604
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2009 Aug 20
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; 36 MATERIALS SCIENCE
Citation Formats
King, William P, and Lee, Jungchul. Device for calorimetric measurement. United States: N. p., 2015.
Web.
King, William P, & Lee, Jungchul. Device for calorimetric measurement. United States.
King, William P, and Lee, Jungchul. Tue .
"Device for calorimetric measurement". United States. https://www.osti.gov/servlets/purl/1167226.
@article{osti_1167226,
title = {Device for calorimetric measurement},
author = {King, William P and Lee, Jungchul},
abstractNote = {In one aspect, provided herein is a single crystal silicon microcalorimeter, for example useful for high temperature operation and long-term stability of calorimetric measurements. Microcalorimeters described herein include microcalorimeter embodiments having a suspended structure and comprising single crystal silicon. Also provided herein are methods for making calorimetric measurements, for example, on small quantities of materials or for determining the energy content of combustible material having an unknown composition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {1}
}
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Works referenced in this record:
Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection
journal, January 2001
- Abedinov, N.; Grabiec, P.; Gotszalk, T.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 19, Issue 6
Integrated atomic force microscopy array probe with metal–oxide–semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal–oxide–semiconductor electronics
journal, January 2000
- Akiyama, T.; Staufer, U.; de Rooij, N. F.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 6
True temperature measurements on microscopic semiconductor targets
conference, March 1999
- Albright, Grant C.; Stump, James A.; McDonald, John D.
- AeroSense '99, SPIE Proceedings
Mems-Based Scanning Calorimeter for Thermodynamic Properties of Nanostructures
journal, February 1998
- L. H. Allen S. L. Lai,
- Microscale Thermophysical Engineering, Vol. 2, Issue 1
Field-Excited Electron Emission from Ferroelectric Ceramic in Vacuum
journal, September 1992
- Asano, Jun-ichi; Imai, Tadayuki; Okuyama, Masanori
- Japanese Journal of Applied Physics, Vol. 31, Issue Part 1, No. 9B
Low voltage electron emission from Pb(Zr x Ti 1− x )O 3 ‐based thin film cathodes
journal, April 1995
- Auciello, O.; Ray, M. A.; Palmer, D.
- Applied Physics Letters, Vol. 66, Issue 17
Micro-hotplates—A platform for micro-solid oxide fuel cells
journal, March 2007
- Beckel, Daniel; Briand, Danick; Bieberle-Hütter, Anja
- Journal of Power Sources, Vol. 166, Issue 1, p. 143-148
High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications
journal, April 2006
- Belmonte, J. Cerdà; Puigcorbé, J.; Arbiol, J.
- Sensors and Actuators B: Chemical, Vol. 114, Issue 2, p. 826-835
Micromechanical thermogravimetry
journal, September 1998
- Berger, R.; Lang, H. P.; Gerber, Ch.
- Chemical Physics Letters, Vol. 294, Issue 4-5, p. 363-369
Thermal analysis using a micromechanical calorimeter
journal, July 1996
- Berger, R.; Gerber, Ch.; Gimzewski, J. K.
- Applied Physics Letters, Vol. 69, Issue 1
Reducing probe dependent drift in atomic force microscope with symmetrically supported torsion levers
journal, May 2006
- Beyder, Arthur; Spagnoli, Chiara; Sachs, Frederick
- Review of Scientific Instruments, Vol. 77, Issue 5
High-temperature piezoresponse force microscopy
journal, October 2011
- Bhatia, B.; Karthik, J.; Cahill, D. G.
- Applied Physics Letters, Vol. 99, Issue 17
Electron emission from SrTiO[sub 3]-coated silicon-tip arrays
journal, January 2007
- Bian, H. J.; Chen, X. F.; Pan, J. S.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 3
Field emission properties of Si tip arrays coated with N-doped SrTiO3 thin films at different substrate temperature
journal, January 2009
- Bian, H. J.; Chen, X. F.; Pan, J. S.
- Journal of Applied Physics, Vol. 105, Issue 1
Ultrahigh-density atomic force microscopy data storage with erase capability
journal, March 1999
- Binnig, G.; Despont, M.; Drechsler, U.
- Applied Physics Letters, Vol. 74, Issue 9
Nanomechanical Detection of DNA Melting on Microcantilever Surfaces
journal, October 2006
- Biswal, Sibani Lisa; Raorane, Digvijay; Chaiken, Alison
- Analytical Chemistry, Vol. 78, Issue 20
Using a Microcantilever Array for Detecting Phase Transitions and Stability of DNA
journal, March 2007
- Biswal, Sibani Lisa; Raorane, Digvijay; Chaiken, Alison
- Clinics in Laboratory Medicine, Vol. 27, Issue 1, p. 163-171
Environmental sensors based on micromachined cantilevers with integrated read-out
journal, February 2000
- Boisen, A.; Thaysen, J.; Jensenius, H.
- Ultramicroscopy, Vol. 82, Issue 1-4, p. 11-16
Cantilever-in-cantilever micromachined pressure sensors fabricated in CMOS technology
conference, January 1999
- Brown, K. B.; Allegretto, W.; Vermuelen, F. E.
- Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411)
Active atomic force microscopy cantilevers for imaging in liquids
journal, May 2001
- Buguin, A.; Du Roure, O.; Silberzan, P.
- Applied Physics Letters, Vol. 78, Issue 19
Calculation of thermal noise in atomic force microscopy
journal, January 1995
- Butt, H. -J; Jaschke, M.
- Nanotechnology, Vol. 6, Issue 1
Pyroelectric coefficient direct measurement technique and application to a nsec response time detector
journal, February 1972
- Byer, R. L.; Roundy, C. B.
- Ferroelectrics, Vol. 3, Issue 1
Micro-differential scanning calorimeter for combustible gas sensing
journal, January 2004
- Cavicchi, R. E.; Poirier, G. E.; Tea, N. H.
- Sensors and Actuators B: Chemical, Vol. 97, Issue 1, p. 22-30
Resonance response of scanning force microscopy cantilevers
journal, August 1994
- Chen, G. Y.; Warmack, R. J.; Thundat, T.
- Review of Scientific Instruments, Vol. 65, Issue 8
Si field emitter arrays coated with thin ferroelectric films
journal, May 2008
- Chen, X. F.; Zhu, W.; Lu, H.
- Ceramics International, Vol. 34, Issue 4, p. 971-977
Nanoscale Domain Control in Multiferroic BiFeO3 Thin Films
journal, September 2006
- Chu, Y.-H.; Zhan, Q.; Martin, L. W.
- Advanced Materials, Vol. 18, Issue 17, p. 2307-2311
Electric-field control of local ferromagnetism using a magnetoelectric multiferroic
journal, April 2008
- Chu, Ying-Hao; Martin, Lane W.; Holcomb, Mikel B.
- Nature Materials, Vol. 7, Issue 6, p. 478-482
Low‐stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope
journal, October 1996
- Chui, B. W.; Stowe, T. D.; Kenny, T. W.
- Applied Physics Letters, Vol. 69, Issue 18
Intrinsic-Carrier Thermal Runaway in Silicon Microcantilevers
journal, August 1999
- B. W. Chui, M. Asheghi, Y. S. Ju, K.,
- Microscale Thermophysical Engineering, Vol. 3, Issue 3
Advanced temperature compensation for piezoresistive sensors based on crystallographic orientation
journal, January 2007
- Chui, B. W.; Aeschimann, L.; Akiyama, T.
- Review of Scientific Instruments, Vol. 78, Issue 4
Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage
journal, March 1998
- Chui, B. W.; Stowe, T. D.
- Journal of Microelectromechanical Systems, Vol. 7, Issue 1
Nanoscale Structure and Mechanism for Enhanced Electromechanical Response of Highly Strained BiFeO3 Thin Films
journal, May 2011
- Damodaran, Anoop R.; Liang, Chen-Wei; He, Qing
- Advanced Materials, Vol. 23, Issue 28, p. 3170-3175
Remote infrared radiation detection using piezoresistive microcantilevers
journal, November 1996
- Datskos, P. G.; Oden, P. I.; Thundat, T.
- Applied Physics Letters, Vol. 69, Issue 20
Theoretical study of an absorbing sample in infrared near-field spectromicroscopy
journal, May 2004
- Dazzi, A.; Goumri-Said, S.; Salomon, L.
- Optics Communications, Vol. 235, Issue 4-6, p. 351-360
Local infrared microspectroscopy with subwavelength spatial resolution with an atomic force microscope tip used as a photothermal sensor
journal, January 2005
- Dazzi, A.; Prazeres, R.; Glotin, F.
- Optics Letters, Vol. 30, Issue 18
Subwavelength infrared spectromicroscopy using an AFM as a local absorption sensor
journal, September 2006
- Dazzi, A.; Prazeres, R.; Glotin, F.
- Infrared Physics & Technology, Vol. 49, Issue 1-2, p. 113-121
Analysis of nano-chemical mapping performed by an AFM-based (“AFMIR”) acousto-optic technique
journal, November 2007
- Dazzi, A.; Prazeres, R.; Glotin, F.
- Ultramicroscopy, Vol. 107, Issue 12, p. 1194-1200
Simultaneous DSC/FTIRS/TMA
journal, July 2004
- Degamber, B.; Winter, D.; Tetlow, J.
- Measurement Science and Technology, Vol. 15, Issue 9
Thin film microcalorimeter for heat capacity measurements from 1.5 to 800 K
journal, April 1994
- Denlinger, D. W.; Abarra, E. N.; Allen, Kimberly
- Review of Scientific Instruments, Vol. 65, Issue 4, p. 946-959
VLSI-NEMS chip for parallel AFM data storage
journal, March 2000
- Despont, M.; Brugger, J.; Drechsler, U.
- Sensors and Actuators A: Physical, Vol. 80, Issue 2, p. 100-107
Cantilevers with nano-heaters for thermomechanical storage application
journal, June 2003
- Drechsler, U.; Bürer, N.; Despont, M.
- Microelectronic Engineering, Vol. 67-68, p. 397-404
Porous silicon bulk micromachining for thermally isolated membrane formation
journal, May 1997
- Dücsö, Cs.; Vázsonyi, É.; Ádám, M.
- Sensors and Actuators A: Physical, Vol. 60, Issue 1-3, p. 235-239
Electron/ion emission from the plasma formed on the surface of ferroelectrics. I. Studies of plasma parameters without applying an extracting voltage
journal, June 1999
- Dunaevsky, A.; Krasik, Ya. E.; Felsteiner, J.
- Journal of Applied Physics, Vol. 85, Issue 12
Ultrasensitive, fast, thin-film differential scanning calorimeter
journal, January 2004
- Efremov, Mikhail Yu.; Olson, Eric A.; Zhang, Ming
- Review of Scientific Instruments, Vol. 75, Issue 1
Glass Transition in Ultrathin Polymer Films: Calorimetric Study
journal, August 2003
- Efremov, Mikhail Yu.; Olson, Eric A.; Zhang, Ming
- Physical Review Letters, Vol. 91, Issue 8
Thin-Film Differential Scanning Calorimetry: A New Probe for Assignment of the Glass Transition of Ultrathin Polymer Films
journal, February 2002
- Efremov, M. Yu.; Warren, J. T.; Olson, E. A.
- Macromolecules, Vol. 35, Issue 5
Glass transition of thin films of poly(2-vinyl pyridine) and poly(methyl methacrylate): nanocalorimetry measurements
journal, June 2003
- Efremov, Mikhail Yu; Olson, Eric A.; Zhang, Ming
- Thermochimica Acta, Vol. 403, Issue 1, p. 37-41
Probing Glass Transition of Ultrathin Polymer Films at a Time Scale of Seconds Using Fast Differential Scanning Calorimetry
journal, June 2004
- Efremov, Mikhail Yu.; Olson, Eric A.; Zhang, Ming
- Macromolecules, Vol. 37, Issue 12
Lorentz-force-induced excitation of cantilevers for oscillation-mode scanning probe microscopy
journal, February 2004
- Enders, O.; Korte, F.; Kolb, H. -A.
- Surface and Interface Analysis, Vol. 36, Issue 2
Mechanical design for tailoring the resonance harmonics of an atomic force microscope cantilever during tip–surface contact
journal, October 2009
- Felts, Jonathan R.; King, William P.
- Journal of Micromechanics and Microengineering, Vol. 19, Issue 11
Improved cantilever profiles for sensor elements
journal, November 2007
- Fernando, Sanchitha; Austin, Michael; Chaffey, Jason
- Journal of Physics D: Applied Physics, Vol. 40, Issue 24
Polysilicon: a versatile material for microsystems
journal, April 2002
- French, P. J.
- Sensors and Actuators A: Physical, Vol. 99, Issue 1-2, p. 3-12
Translating Biomolecular Recognition into Nanomechanics
journal, April 2000
- Fritz, J.
- Science, Vol. 288, Issue 5464
Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications
journal, June 1996
- Fung, Samuel K. H.; Tang, Zhenan; Chan, Philip C. H.
- Sensors and Actuators A: Physical, Vol. 54, Issue 1-3, p. 482-487
Thermal characterisation of micro-hotplates used in sensor structures
journal, March 2004
- Fürjes, P.; Dücső, Cs.; Ádám, M.
- Superlattices and Microstructures, Vol. 35, Issue 3-6, p. 455-464
Thermal investigation of micro-filament heaters
journal, April 2002
- Fürjes, P.; Vizváry, Zs.; Ádám, M.
- Sensors and Actuators A: Physical, Vol. 99, Issue 1-2, p. 98-103
Materials and processing for realization of micro-hotplates operated at elevated temperature
journal, June 2002
- F$uuml$rjes, P.; V$iacute$zv$aacute$ry, Zs; $Aacute$d$aacute$m, M.
- Journal of Micromechanics and Microengineering, Vol. 12, Issue 4
Observation of a chemical reaction using a micromechanical sensor
journal, January 1994
- Gimzewski, J. K.; Gerber, Ch.; Meyer, E.
- Chemical Physics Letters, Vol. 217, Issue 5-6, p. 589-594
Microcantilever hotplates with temperature-compensated piezoresistive strain sensors
journal, May 2008
- Goericke, Fabian; Lee, Jungchul; King, William P.
- Sensors and Actuators A: Physical, Vol. 143, Issue 2, p. 181-190
Thermally Activated Nanowear Modes of a Polymer Surface Induced by a Heated Tip
journal, February 2004
- Gotsmann, Bernd; Dürig, Urs
- Langmuir, Vol. 20, Issue 4
Experimental observation of attractive and repulsive thermal forces on microcantilevers
journal, November 2005
- Gotsmann, B.; Dürig, U.
- Applied Physics Letters, Vol. 87, Issue 19
3D nonlinear modeling of microhotplates in CMOS technology for use as metal-oxide-based gas sensors
journal, October 2004
- Graf, M.; Jurischka, R.; Barrettino, D.
- Journal of Micromechanics and Microengineering, Vol. 15, Issue 1
Scanning force microscopy for the study of domain structure in ferroelectric thin films
journal, March 1996
- Gruverman, A.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 14, Issue 2
Copious electron emission from PLZT ceramics with a high zirconium concentration
journal, December 1989
- Gundel, H.; Riege, H.; Wilson, E. J. N.
- Ferroelectrics, Vol. 100, Issue 1
Electric field-excited electron emission from PLZT-X/65/35 ceramics
journal, October 1990
- Gundel, Hartmut; Handerek, Jan; Riege, Hans
- Ferroelectrics, Vol. 110, Issue 1
Time‐dependent electron emission from ferroelectrics by external pulsed electric fields
journal, January 1991
- Gundel, H.; Hańderek, J.; Riege, H.
- Journal of Applied Physics, Vol. 69, Issue 2
A monolithic integrated 4×4 tin oxide gas sensor array with on-chip multiplexing and differential readout circuits
journal, January 2007
- Guo, Bin; Bermak, Amine; Chan, Philip C. H.
- Solid-State Electronics, Vol. 51, Issue 1, p. 69-76
Smart single-chip gas sensor microsystem
journal, November 2001
- Hagleitner, C.; Hierlemann, A.; Lange, D.
- Nature, Vol. 414, Issue 6861
Progress in near-field photothermal infra-red microspectroscopy: PROGRESS IN FTIR MICROSPECTROSCOPY
journal, January 2004
- Hammiche, A.; Bozec, L.; Pollock, H. M.
- Journal of Microscopy, Vol. 213, Issue 2
A novel temperature-compensating structure for micromechanical bridge resonator
journal, February 2005
- Jianqiang, Han; Changchun, Zhu; Junhua, Liu
- Journal of Micromechanics and Microengineering, Vol. 15, Issue 4
Size effect on heat transfer in micro gas sensors
journal, May 2005
- Han, M. H.; Liang, Xin-Gang; Tang, Z. A.
- Sensors and Actuators A: Physical, Vol. 120, Issue 2, p. 397-402
A combined differential scanning calorimeter-optical video microscope for crystallization studies
journal, August 1997
- Hey, J. M.; Mehl, P. M.; MacFarlane, D. R.
- Journal of thermal analysis, Vol. 49, Issue 2
Gated Si field emitter array prepared by using anodization
journal, March 1998
- Higa, Katsuya
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 2
Characterizing field emission from individual carbon nanotubes at small distances
journal, January 2006
- Hii, King-Fu; Ryan Vallance, R.; Chikkamaranahalli, Sumanth B.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 3
Improved atomic force microscope cantilever performance by ion beam modification
journal, October 2001
- Hodges, Alex R.; Bussmann, Konrad M.; Hoh, Jan H.
- Review of Scientific Instruments, Vol. 72, Issue 10
Experimental determination of scanning probe microscope cantilever spring constants utilizing a nanoindentation apparatus
journal, January 2000
- Holbery, J. D.; Eden, V. L.; Sarikaya, M.
- Review of Scientific Instruments, Vol. 71, Issue 10
Gallium arsenide suspended microheater for MEMS sensor arrays
journal, November 2007
- Hotovy, I.; Rehacek, V.; Mika, F.
- Microsystem Technologies, Vol. 14, Issue 4-5
Investigation of the natural convection boundary condition in microfabricated structures
journal, July 2008
- Hu, X. Jack; Jain, Ankur; Goodson, Kenneth E.
- International Journal of Thermal Sciences, Vol. 47, Issue 7, p. 820-824
Concentrated-mass cantilever enhances multiple harmonics in tapping-mode atomic force microscopy
journal, April 2008
- Li, Huiling; Chen, Yan; Dai, Lanhong
- Applied Physics Letters, Vol. 92, Issue 15
Calibration of atomic‐force microscope tips
journal, July 1993
- Hutter, Jeffrey L.; Bechhoefer, John
- Review of Scientific Instruments, Vol. 64, Issue 7
Electron‐beam diodes using ferroelectric cathodes
journal, March 1993
- Ivers, J. D.; Schächter, L.; Nation, J. A.
- Journal of Applied Physics, Vol. 73, Issue 6
Emittance of a field emission electron source
journal, January 2010
- Jensen, K. L.; O’Shea, P. G.; Feldman, D. W.
- Journal of Applied Physics, Vol. 107, Issue 1
A microcantilever-based alcohol vapor sensor-application and response model
journal, May 2000
- Jensenius, Henriette; Thaysen, Jacob; Rasmussen, Anette A.
- Applied Physics Letters, Vol. 76, Issue 18
Applications of simultaneous DSC/FTIR analysis
journal, January 1992
- Johnson, David J.; Compton, David A. C.; Canale, Philip L.
- Thermochimica Acta, Vol. 195, p. 5-20
Effect of annealing temperature on the electron emission characteristics of silicon tips coated with Ba[sub 0.67]Sr[sub 0.33]TiO[sub 3] thin film
journal, January 2003
- Kang, W. P.; Wisitsora-at, A.; Davidson, J. L.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 1
Electron emission from silicon tips coated with sol-gel (Ba[sub 0.67]Sr[sub 0.33])TiO[sub 3] ferroelectric thin film
journal, January 2001
- Kang, W. P.; Wisitsora-at, A.; Davidson, J. L.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, Issue 3
Nanotopographical imaging using a heated atomic force microscope cantilever probe
journal, May 2007
- Kim, K. J.; Park, K.; Lee, J.
- Sensors and Actuators A: Physical, Vol. 136, Issue 1, p. 95-103
Thermal conduction between a heated microcantilever and a surrounding air environment
journal, June 2009
- Kim, Kyoung Joon; King, William P.
- Applied Thermal Engineering, Vol. 29, Issue 8-9, p. 1631-1641
Nanoscale Thermal Analysis of an Energetic Material
journal, September 2006
- King, William P.; Saxena, Shubham; Nelson, Brent A.
- Nano Letters, Vol. 6, Issue 9
Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation
journal, December 2002
- King, W. P.; Kenny, T. W.; Goodson, K. E.
- Journal of Microelectromechanical Systems, Vol. 11, Issue 6
Atomic force microscope cantilevers for combined thermomechanical data writing and reading
journal, February 2001
- King, William P.; Kenny, Thomas W.; Goodson, Kenneth E.
- Applied Physics Letters, Vol. 78, Issue 9
Ferroelectric plasma sources and their applications
journal, February 2003
- Krasik, Y. E.; Chirko, K.; Dunaevsky, A.
- IEEE Transactions on Plasma Science, Vol. 31, Issue 1
A low power integrated catalytic gas sensor
journal, May 1993
- Krebs, P.; Grisel, A.
- Sensors and Actuators B: Chemical, Vol. 13, Issue 1-3, p. 155-158
SOI CMOS Compatible Low-Power Microheater Optimization for the Fabrication of Smart Gas Sensors
journal, October 2004
- Laconte, J.; Dupont, C.; Flandre, D.
- IEEE Sensors Journal, Vol. 4, Issue 5
High‐speed (10 4 °C/s) scanning microcalorimetry with monolayer sensitivity (J/m 2 )
journal, August 1995
- Lai, S. L.; Ramanath, G.; Allen, L. H.
- Applied Physics Letters, Vol. 67, Issue 9
Melting point depression of Al clusters generated during the early stages of film growth: Nanocalorimetry measurements
journal, March 1998
- Lai, S. L.; Carlsson, J. R. A.; Allen, L. H.
- Applied Physics Letters, Vol. 72, Issue 9
Pyroelectricity: From Ancient Curiosity to Modern Imaging Tool
journal, August 2005
- Lang, Sidney B.
- Physics Today, Vol. 58, Issue 8
Fabrication and characterization of silicon field emitter arrays by spin-on-glass etch-back process
journal, January 1998
- Lee, Jin Ho
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1
Classifying combustible gases using micro-gas sensor array
journal, August 2003
- Lee, Dae-Sik; Huh, Jeung-Soo; Lee, Duk-Dong
- Sensors and Actuators B: Chemical, Vol. 93, Issue 1-3, p. 1-6
Characterization of liquid and gaseous micro- and nanojets using microcantilever sensors
journal, February 2007
- Lee, Jungchul; Naeli, Kianoush; Hunter, Hanif
- Sensors and Actuators A: Physical, Vol. 134, Issue 1, p. 128-139
Microcantilever hotplates: Design, fabrication, and characterization
journal, May 2007
- Lee, Jungchul; King, William P.
- Sensors and Actuators A: Physical, Vol. 136, Issue 1, p. 291-298
Thermal conduction from microcantilever heaters in partial vacuum
journal, January 2007
- Lee, Jungchul; Wright, Tanya L.; Abel, Mark R.
- Journal of Applied Physics, Vol. 101, Issue 1
Microcantilever actuation via periodic internal heating
journal, December 2007
- Lee, Jungchul; King, William P.
- Review of Scientific Instruments, Vol. 78, Issue 12
Liquid Operation of Silicon Microcantilever Heaters
journal, November 2008
- Lee, Jungchul; King, William P.
- IEEE Sensors Journal, Vol. 8, Issue 11
Microthermogravimetry using a microcantilever hot plate with integrated temperature-compensated piezoresistive strain sensors
journal, May 2008
- Lee, Jungchul; King, William P.
- Review of Scientific Instruments, Vol. 79, Issue 5
Phase change and cooling characteristics of microjets measured using microcantilever heaters
journal, September 2008
- Lee, Jungchul; Hunter, Hanif; Glezer, Ari
- Sensors and Actuators A: Physical, Vol. 147, Issue 1, p. 64-69
Electrical, Thermal, and Mechanical Characterization of Silicon Microcantilever Heaters
journal, December 2006
- Lee, Jungchul; Beechem, Thomas; Wright, Tanya L.
- Journal of Microelectromechanical Systems, Vol. 15, Issue 6, p. 1644-1655
Differential Scanning Calorimeter Based on Suspended Membrane Single Crystal Silicon Microhotplate
journal, December 2008
- Lee, Jungchul; Spadaccini, Christopher M.; Mukerjee, Erik V.
- Journal of Microelectromechanical Systems, Vol. 17, Issue 6
A microsensor array with porous tin oxide thin films and microhotplate dangled by wires in air
journal, March 2002
- Lee, Dae-Sik; Shim, Chang-Hyun; Lim, Jun-Woo
- Sensors and Actuators B: Chemical, Vol. 83, Issue 1-3, p. 250-255
Field emission of silicon emitter arrays coated with sol-gel (Ba0.65Sr0.35)1−xLaxTiO3 thin films
journal, July 2007
- Lu, H.; Pan, J. S.; Chen, X. F.
- Journal of Applied Physics, Vol. 102, Issue 1
5×5 2D AFM cantilever arrays a first step towards a Terabit storage device
journal, March 1999
- Lutwyche, M.; Andreoli, C.; Binnig, G.
- Sensors and Actuators A: Physical, Vol. 73, Issue 1-2, p. 89-94
Profiling the Thermoelectric Power of Semiconductor Junctions with Nanometer Resolution
journal, February 2004
- Lyeo, H. -K.
- Science, Vol. 303, Issue 5659
Reduction of the cantilever hydrodynamic damping near a surface by ion-beam milling
journal, January 2006
- Maali, A.; Cohen-Bouhacina, T.; Jai, C.
- Journal of Applied Physics, Vol. 99, Issue 2
Thermal writing using a heated atomic force microscope tip
journal, July 1996
- Mamin, H. J.
- Applied Physics Letters, Vol. 69, Issue 3
Adsorption kinetics and mechanical properties of thiol-modified DNA-oligos on gold investigated by microcantilever sensors
journal, May 2002
- Marie, Rodolphe; Jensenius, Henriette; Thaysen, Jacob
- Ultramicroscopy, Vol. 91, Issue 1-4
Nanoscale Control of Exchange Bias with BiFeO 3 Thin Films
journal, July 2008
- Martin, Lane W.; Chu, Ying-Hao; Holcomb, Mikel B.
- Nano Letters, Vol. 8, Issue 7
Chemical warfare agent detection using MEMS-compatible microsensor arrays
journal, August 2005
- Meier, D. C.; Taylor, C. J.; Cavicchi, R. E.
- IEEE Sensors Journal, Vol. 5, Issue 4
Temperature-compensated high-stability silicon resonators
journal, June 2007
- Melamud, Renata; Kim, Bongsang; Chandorkar, Saurabh A.
- Applied Physics Letters, Vol. 90, Issue 24
A micromachined ultra-thin-film gas detector
journal, January 1994
- Najafi, N.; Wise, K. D.; Schwank, J. W.
- IEEE Transactions on Electron Devices, Vol. 41, Issue 10
Direct deposition of continuous metal nanostructures by thermal dip-pen nanolithography
journal, January 2006
- Nelson, B. A.; King, W. P.; Laracuente, A. R.
- Applied Physics Letters, Vol. 88, Issue 3
Measuring material softening with nanoscale spatial resolution using heated silicon probes
journal, February 2007
- Nelson, B. A.; King, W. P.
- Review of Scientific Instruments, Vol. 78, Issue 2
Temperature calibration of heated silicon atomic force microscope cantilevers
journal, October 2007
- Nelson, B. A.; King, W. P.
- Sensors and Actuators A: Physical, Vol. 140, Issue 1, p. 51-59
Uncooled thermal imaging using a piezoresistive microcantilever
journal, November 1996
- Oden, P. I.; Datskos, P. G.; Thundat, T.
- Applied Physics Letters, Vol. 69, Issue 21
The design and operation of a mems differential scanning nanocalorimeter for high-speed heat capacity measurements of ultrathin films
journal, June 2003
- Olson, E. A.; Efremov, M. Yu.
- Journal of Microelectromechanical Systems, Vol. 12, Issue 3
Size-dependent melting of Bi nanoparticles
journal, February 2005
- Olson, E. A.; Efremov, M. Yu.; Zhang, M.
- Journal of Applied Physics, Vol. 97, Issue 3
Fabrication and testing of an integrated thermal flow sensor employing thermal isolation by a porous silicon membrane over an air cavity
journal, April 2004
- Pagonis, D. N.; Kaltsas, G.; Nassiopoulou, A. G.
- Journal of Micromechanics and Microengineering, Vol. 14, Issue 6
Switching kinetics in epitaxial BiFeO3 thin films
journal, April 2010
- Pantel, Daniel; Chu, Ying-Hao; Martin, Lane W.
- Journal of Applied Physics, Vol. 107, Issue 8
Low temperature characterization of heated microcantilevers
journal, May 2007
- Park, Keunhan; Marchenkov, Alexei; Zhang, Zhuomin M.
- Journal of Applied Physics, Vol. 101, Issue 9
Topography imaging with a heated atomic force microscope cantilever in tapping mode
journal, January 2007
- Park, Keunhan; Lee, Jungchul; Zhang, Zhuomin M.
- Review of Scientific Instruments, Vol. 78, Issue 4
Routine Femtogram-Level Chemical Analyses Using Vibrational Spectroscopy and Self-Cleaning Scanning Probe Microscopy Tips
journal, May 2008
- Park, Keunhan; Lee, Jungchul; Bhargava, Rohit
- Analytical Chemistry, Vol. 80, Issue 9
Frequency-Dependent Electrical and Thermal Response of Heated Atomic Force Microscope Cantilevers
journal, April 2007
- Park, Keunhan; Lee, Jungchul; Zhang, Zhuomin M.
- Journal of Microelectromechanical Systems, Vol. 16, Issue 2
Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes
journal, January 2003
- Pedrak, R.; Ivanov, Tzv.; Ivanova, K.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6
A sensitive, handheld vapor sensor based on microcantilevers
journal, November 2004
- Pinnaduwage, L. A.; Hedden, D. L.; Gehl, A.
- Review of Scientific Instruments, Vol. 75, Issue 11
A microsensor for trinitrotoluene vapour
journal, October 2003
- Pinnaduwage, L. A.; Gehl, A.; Hedden, D. L.
- Nature, Vol. 425, Issue 6957
Orientation-dependent potential barriers in case of epitaxial Pt–BiFeO3–SrRuO3 capacitors
journal, June 2009
- Pintilie, L.; Dragoi, C.; Chu, Y. H.
- Applied Physics Letters, Vol. 94, Issue 23
Corrected field enhancement factor for the floating sphere model of carbon nanotube emitter
journal, August 2010
- Pogorelov, Evgeny G.; Chang, Yia-Chung; Zhbanov, Alexander I.
- Journal of Applied Physics, Vol. 108, Issue 4
Silicon microcantilever hotplates with high temperature uniformity
journal, June 2009
- Privorotskaya, Natalya L.; King, William P.
- Sensors and Actuators A: Physical, Vol. 152, Issue 2, p. 160-167
Quantitative determination of contact stiffness using atomic force acoustic microscopy
journal, March 2000
- Rabe, U.; Amelio, S.; Kester, E.
- Ultrasonics, Vol. 38, Issue 1-8, p. 430-437
Optimised cantilever biosensor with piezoresistive read-out
journal, October 2003
- Rasmussen, P. A.; Thaysen, J.; Hansen, O.
- Ultramicroscopy, Vol. 97, Issue 1-4, p. 371-376
Oxidation sharpening of silicon tips
journal, November 1991
- Ravi, T. S.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 9, Issue 6
Electron and hole mobility in silicon at large operating temperatures. I. Bulk mobility
journal, March 2002
- Reggiani, S.; Valdinoci, M.; Colalongo, L.
- IEEE Transactions on Electron Devices, Vol. 49, Issue 3
Contact potential measurement using a heated atomic force microscope tip
journal, October 2007
- Remmert, Jessica L.; Wu, Yan; Lee, Jungchul
- Applied Physics Letters, Vol. 91, Issue 14
Electron emission from ferroelectrics - a review
journal, February 1994
- Riege, H.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 340, Issue 1, p. 80-89
Frequency tuning AFM optical levers using a slot
journal, November 2007
- Rinaldi, Gino; Packirisamy, Muthukumaran; Stiharu, Ion
- Microsystem Technologies, Vol. 14, Issue 3
Thermally stimulated field emission from pyroelectric LiNbO 3
journal, July 1974
- Rosenblum, B.; Bräunlich, P.; Carrico, J. P.
- Applied Physics Letters, Vol. 25, Issue 1
Electron emission from ferroelectrics
journal, December 2000
- Rosenman, G.; Shur, D.; Krasik, Ya. E.
- Journal of Applied Physics, Vol. 88, Issue 11
A batch-fabricated silicon accelerometer
journal, December 1979
- Roylance, L. M.; Angell, J. B.
- IEEE Transactions on Electron Devices, Vol. 26, Issue 12
Special cantilever geometry for the access of higher oscillation modes in atomic force microscopy
journal, July 2006
- Sadewasser, S.; Villanueva, G.; Plaza, J. A.
- Applied Physics Letters, Vol. 89, Issue 3
Modified atomic force microscopy cantilever design to facilitate access of higher modes of oscillation
journal, July 2006
- Sadewasser, S.; Villanueva, G.; Plaza, J. A.
- Review of Scientific Instruments, Vol. 77, Issue 7
High-resolution imaging of elastic properties using harmonic cantilevers
journal, September 2004
- Sahin, O.; Yaralioglu, G.; Grow, R.
- Sensors and Actuators A: Physical, Vol. 114, Issue 2-3, p. 183-190
Fourier transform infrared spectroscopic method for the quantitative trace analysis of transition-metal carbonyl-labeled bioligands
journal, October 1991
- Salmain, Michele.; Vessieres, Anne.; Jaouen, Gerard.
- Analytical Chemistry, Vol. 63, Issue 20
Silicon hotplates for metal oxide gas sensor elements
journal, August 1997
- Sberveglieri, G.; Hellmich, W.; Müller, G.
- Microsystem Technologies, Vol. 3, Issue 4
Conduction at domain walls in oxide multiferroics
journal, January 2009
- Seidel, J.; Martin, L. W.; He, Q.
- Nature Materials, Vol. 8, Issue 3
Dual mode electron emission from ferroelectric ceramics
journal, March 1997
- Shannon, D. N. J.; Smith, P. W.; Dobson, P. J.
- Applied Physics Letters, Vol. 70, Issue 12
Use of low‐frequency sinusoidal temperature waves to separate pyroelectric currents from nonpyroelectric currents. Part II. Experiment
journal, December 1982
- Sharp, Edward J.; Garn, Lynn E.
- Journal of Applied Physics, Vol. 53, Issue 12
Nanoscale deposition of solid inks via thermal dip pen nanolithography
journal, August 2004
- Sheehan, P. E.; Whitman, L. J.; King, William P.
- Applied Physics Letters, Vol. 85, Issue 9
A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering
journal, June 1998
- Sheng, Lie-yi; Tang, Zhenan; Wu, Jian
- Sensors and Actuators B: Chemical, Vol. 49, Issue 1-2, p. 81-87
Femtomolar isothermal desorption using microhotplate sensors
journal, May 2007
- Shirke, Amol G.; Cavicchi, Richard E.; Semancik, Steve
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 25, Issue 3
Plasma‐assisted electron emission from (Pb,La)(Zr,Ti)O 3 ceramic cathodes
journal, April 1996
- Shur, D.; Rosenman, G.; Krasik, Ya. E.
- Journal of Applied Physics, Vol. 79, Issue 7
Surface discharge plasma induced by spontaneous polarization switching
journal, February 1997
- Shur, D.; Rosenman, G.; Krasik, Ya. E.
- Applied Physics Letters, Vol. 70, Issue 5
A high-perveance ferroelectric cathode with a narrowed electron energy spread
journal, June 1998
- Shur, D.; Rosenman, G.; Krasik, Ya E.
- Journal of Physics D: Applied Physics, Vol. 31, Issue 11
Two modes of plasma-assisted electron emission from ferroelectric ceramics
journal, January 1999
- Shur, D.; Rosenman, G.
- Journal of Physics D: Applied Physics, Vol. 32, Issue 6
A comprehensive analytical and numerical analysis of transient and static micro hotplate characteristics
conference, January 2003
- Solzbacher, F.; Doll, T.; Obermeier, E.
- IEEE International Solid-State Sensors and Actuators Conference, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
A modular system of SiC-based microhotplates for the application in metal oxide gas sensors
journal, June 2000
- Solzbacher, F.; Imawan, C.; Steffes, H.
- Sensors and Actuators B: Chemical, Vol. 64, Issue 1-3, p. 95-101
SnO2:Sb – A new material for high-temperature MEMS heater applications: Performance and limitations
journal, June 2007
- Spannhake, J.; Helwig, A.; Müller, G.
- Sensors and Actuators B: Chemical, Vol. 124, Issue 2, p. 421-428
Simultaneous FT-Raman Differential Scanning Calorimetry Measurements Using a Low-Cost Fiber-Optic Probe
journal, September 1997
- Sprunt, John C.; Jayasooriya, Upali A.
- Applied Spectroscopy, Vol. 51, Issue 9
Optical lever detection in higher eigenmode dynamic atomic force microscopy
journal, November 2004
- Stark, Robert W.
- Review of Scientific Instruments, Vol. 75, Issue 11
Tapping-mode atomic force microscopy and phase-imaging in higher eigenmodes
journal, May 1999
- Stark, Robert W.; Drobek, Tanja; Heckl, Wolfgang M.
- Applied Physics Letters, Vol. 74, Issue 22
Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing
journal, September 2002
- Su, Y.; Evans, A. G. R.; Brunnschweiler, A.
- Journal of Micromechanics and Microengineering, Vol. 12, Issue 6
Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing
journal, March 1993
- Suehle, J. S.; Cavicchi, R. E.; Gaitan, M.
- IEEE Electron Device Letters, Vol. 14, Issue 3
High-speed atomic force microscopy in liquid
journal, May 2000
- Sulchek, T.; Hsieh, R.; Adams, J. D.
- Review of Scientific Instruments, Vol. 71, Issue 5
Room-temperature chemical vapor deposition and mass detection on a heated atomic force microscope cantilever
journal, January 2006
- Sunden, Erik O.; Wright, Tanya L.; Lee, Jungchul
- Applied Physics Letters, Vol. 88, Issue 3
High-Speed, Sub-15 nm Feature Size Thermochemical Nanolithography
journal, April 2007
- Szoszkiewicz, Robert; Okada, Takashi; Jones, Simon C.
- Nano Letters, Vol. 7, Issue 4
Vapor Detection Using Resonating Microcantilevers
journal, February 1995
- Thundat, T.; Chen, G. Y.; Warmack, R. J.
- Analytical Chemistry, Vol. 67, Issue 3
Thermal and ambient‐induced deflections of scanning force microscope cantilevers
journal, May 1994
- Thundat, T.; Warmack, R. J.; Chen, G. Y.
- Applied Physics Letters, Vol. 64, Issue 21
Atomic resolution with an atomic force microscope using piezoresistive detection
journal, February 1993
- Tortonese, M.; Barrett, R. C.; Quate, C. F.
- Applied Physics Letters, Vol. 62, Issue 8
Alternative micro-hotplate design for low power sensor arrays
journal, April 2006
- Triantafyllopoulou, R.; Chatzandroulis, S.; Tsamis, C.
- Microelectronic Engineering, Vol. 83, Issue 4-9, p. 1189-1191
Thermal properties of suspended porous silicon micro-hotplates for sensor applications
journal, October 2003
- Tsamis, C.; Nassiopoulou, A. G.; Tserepi, A.
- Sensors and Actuators B: Chemical, Vol. 95, Issue 1-3, p. 78-82
Design and simulations of SOI CMOS micro-hotplate gas sensors
journal, August 2001
- Udrea, F.; Gardner, J. W.; Setiadi, D.
- Sensors and Actuators B: Chemical, Vol. 78, Issue 1-3, p. 180-190
Ultrafast molecule sorting and delivery by atomic force microscopy
journal, May 2006
- Unal, Kerem; Frommer, Jane; Kumar Wickramasinghe, H.
- Applied Physics Letters, Vol. 88, Issue 18
Nanoscale quantitative stress mapping with atomic force microscopy
journal, March 2007
- Unal, Kerem; Wickramasinghe, H. Kumar
- Applied Physics Letters, Vol. 90, Issue 11
Scanning Joule expansion microscopy at nanometer scales
journal, January 1998
- Varesi, J.; Majumdar, A.
- Applied Physics Letters, Vol. 72, Issue 1, p. 37-39
The "millipede" - nanotechnology entering data storage
journal, March 2002
- Vettiger, P.; Cross, G.; Despont, M.
- IEEE Transactions on Nanotechnology, Vol. 1, Issue 1
Micro-Flame Ionization Detection Using a Catalytic Micro-combuster
conference, January 2005
- Washburn, C.; Moorman, M. W.; Hamilton, T. W.
- IEEE Sensors, 2005.
Thermal analysis of silicon carbide based micro hotplates for metal oxide gas sensors
journal, September 2005
- Wiche, G.; Berns, A.; Steffes, H.
- Sensors and Actuators A: Physical, Vol. 123-124, p. 12-17
Scanning thermal profiler
journal, December 1986
- Williams, C. C.; Wickramasinghe, H. K.
- Applied Physics Letters, Vol. 49, Issue 23
Bioassay of prostate-specific antigen (PSA) using microcantilevers
journal, September 2001
- Wu, Guanghua; Datar, Ram H.; Hansen, Karolyn M.
- Nature Biotechnology, Vol. 19, Issue 9
Large pyroelectric effect in undoped epitaxial Pb(Zr,Ti)O3 thin films on SrTiO3 substrates
journal, August 2008
- Xiao, Bo; Avrutin, Vitaliy; Liu, Huiyong
- Applied Physics Letters, Vol. 93, Issue 5
Nano-mechanical electro-thermal probe array used for high-density storage based on NEMS technology
journal, May 2006
- Yang, Zunxian; Yu, Ying; Li, Xinxin
- Microelectronics Reliability, Vol. 46, Issue 5-6, p. 805-810
Above-bandgap voltages from ferroelectric photovoltaic devices
journal, January 2010
- Yang, S. Y.; Seidel, J.; Byrnes, S. J.
- Nature Nanotechnology, Vol. 5, Issue 2
Interface Ferromagnetism and Orbital Reconstruction in Heterostructures
journal, July 2010
- Yu, P.; Lee, J. -S.; Okamoto, S.
- Physical Review Letters, Vol. 105, Issue 2
Design and Test of a Novel Higher Harmonic Imaging AFM Probe with a Dedicated Second Cantilever for Harmonic Amplification
conference, June 2007
- Zeyen, B.; Turner, K. L.
- TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
Preamplifying cantilevers for dynamic atomic force microscopy
journal, March 2009
- Zeyen, Benedikt; Virwani, Kumar; Pittenger, Bede
- Applied Physics Letters, Vol. 94, Issue 10
Large field-induced strains in a lead-free piezoelectric material
journal, January 2011
- Zhang, J. X.; Xiang, B.; He, Q.
- Nature Nanotechnology, Vol. 6, Issue 2, p. 98-102
Nanoscale Calorimetry Using a Suspended Bridge Configuration
journal, August 2007
- Zhang, Shu; Rabin, Yoed; Yang, Yizhang
- Journal of Microelectromechanical Systems, Vol. 16, Issue 4
A micro-Pirani vacuum gauge based on micro-hotplate technology
journal, February 2006
- Zhang, F. T.; Tang, Z.; Yu, J.
- Sensors and Actuators A: Physical, Vol. 126, Issue 2, p. 300-305
Thermal characterization of liquids and polymer thin films using a microcalorimeter
journal, January 2005
- Zhang, Yuyan; Tadigadapa, Srinivas
- Applied Physics Letters, Vol. 86, Issue 3
Thermal contributions to the bending of bimaterial cantilever sensors
journal, July 2006
- Zhao, Jun; Berger, Rüdiger; Gutmann, Jochen S.
- Applied Physics Letters, Vol. 89, Issue 3
Fractured polymer/silica fiber surface studied by tapping mode atomic force microscopy
journal, June 1993
- Zhong, Q.; Inniss, D.; Kjoller, K.
- Surface Science Letters, Vol. 290, Issue 1-2, p. L688-L692