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Title: System and method for compressive scanning electron microscopy

Abstract

A scanning transmission electron microscopy (STEM) system is disclosed. The system may make use of an electron beam scanning system configured to generate a plurality of electron beam scans over substantially an entire sample, with each scan varying in electron-illumination intensity over a course of the scan. A signal acquisition system may be used for obtaining at least one of an image, a diffraction pattern, or a spectrum from the scans, the image, diffraction pattern, or spectrum representing only information from at least one of a select subplurality or linear combination of all pixel locations comprising the image. A dataset may be produced from the information. A subsystem may be used for mathematically analyzing the dataset to predict actual information that would have been produced by each pixel location of the image.

Inventors:
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1167207
Patent Number(s):
8,933,401
Application Number:
14/063,319
Assignee:
awrence Livermore National Security, LLC (Livermore, CA)
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Oct 25
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Citation Formats

Reed, Bryan W. System and method for compressive scanning electron microscopy. United States: N. p., 2015. Web.
Reed, Bryan W. System and method for compressive scanning electron microscopy. United States.
Reed, Bryan W. Tue . "System and method for compressive scanning electron microscopy". United States. https://www.osti.gov/servlets/purl/1167207.
@article{osti_1167207,
title = {System and method for compressive scanning electron microscopy},
author = {Reed, Bryan W},
abstractNote = {A scanning transmission electron microscopy (STEM) system is disclosed. The system may make use of an electron beam scanning system configured to generate a plurality of electron beam scans over substantially an entire sample, with each scan varying in electron-illumination intensity over a course of the scan. A signal acquisition system may be used for obtaining at least one of an image, a diffraction pattern, or a spectrum from the scans, the image, diffraction pattern, or spectrum representing only information from at least one of a select subplurality or linear combination of all pixel locations comprising the image. A dataset may be produced from the information. A subsystem may be used for mathematically analyzing the dataset to predict actual information that would have been produced by each pixel location of the image.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {1}
}

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Works referenced in this record:

Robust uncertainty principles: exact signal reconstruction from highly incomplete frequency information
journal, February 2006

  • Candes, E.J.; Romberg, J.; Tao, T.
  • IEEE Transactions on Information Theory, Vol. 52, Issue 2, p. 489-509
  • DOI: 10.1109/TIT.2005.862083

Near-Optimal Signal Recovery From Random Projections: Universal Encoding Strategies?
journal, January 2006

  • Candes, Emmanuel J.; Tao, Terence
  • IEEE Transactions on Information Theory, Vol. 52, Issue 12, p. 5406-5425
  • DOI: 10.1109/TIT.2006.885507

Single-pixel imaging via compressive sampling
journal, March 2008

  • Duarte, Marco F.; Davenport, Mark A.; Takhar, Dharmpal
  • IEEE Signal Processing Magazine, Vol. 25, Issue 2, p. 83-91
  • DOI: 10.1109/MSP.2007.914730

The potential for Bayesian compressive sensing to significantly reduce electron dose in high-resolution STEM images
journal, October 2013


Mapping chemical and bonding information using multivariate analysis of electron energy-loss spectrum images
journal, October 2006


Data Processing for Atomic Resolution Electron Energy Loss Spectroscopy
journal, June 2012


Structure and Composition of Nanometer-Sized Nitrides in a Creep-Resistant Cast Austenitic Alloy
journal, August 2010

  • Evans, Neal D.; Maziasz, Philip J.; Shingledecker, John P.
  • Metallurgical and Materials Transactions A, Vol. 41, Issue 12
  • DOI: 10.1007/s11661-010-0321-4

Preparation of a leaf-like CdS micro-/nanostructure and its enhanced gas-sensing properties for detecting volatile organic compounds
journal, January 2012

  • Fu, Xiangqian; Liu, Jinyun; Wan, Yuteng
  • Journal of Materials Chemistry, Vol. 22, Issue 34
  • DOI: 10.1039/C2JM33352J

Effects of Ampholyte Dissociation Constants on Protein Separation in On-Chip Isoelectric Focusing
journal, July 2008

  • Shim, Jaesool; Dutta, Prashanta; Ivory, Cornelius F.
  • Journal of Nanoscience and Nanotechnology, Vol. 8, Issue 7
  • DOI: 10.1166/jnn.2008.011

3D Nanoscale Characterization of Thin-Film Organic Photovoltaic Device Structures via Spectroscopic Contrast in the TEM 1
journal, September 2010

  • Herzing, Andrew A.; Richter, Lee J.; Anderson, Ian M.
  • The Journal of Physical Chemistry C, Vol. 114, Issue 41
  • DOI: 10.1021/jp105883p

Unconventional immuno double labelling by energy filtered transmission electron microscopy
journal, January 1996


Review of recent advances in spectrum imaging and its extension to reciprocal space
journal, April 2009


Physical vs Photolithographic Patterning of Plasma Polymers: An Investigation by ToF−SSIMS and Multivariate Analysis
journal, March 2010

  • Mishra, Gautam; Easton, Christopher D.; McArthur, Sally L.
  • Langmuir, Vol. 26, Issue 5
  • DOI: 10.1021/la902930z

Key Parameters Affecting Quantitative Analysis of STEM-EDS Spectrum Images
journal, April 2010


Multivariate statistics applications in phase analysis of STEM-EDS spectrum images
journal, January 2010


Point defect characterization in HAADF-STEM images using multivariate statistical analysis
journal, February 2011


Boron segregation to austenite grain boundary in low alloy steel measured by aberration corrected STEM–EELS
journal, October 2012

  • Shigesato, Genichi; Fujishiro, Taishi; Hara, Takuya
  • Materials Science and Engineering: A, Vol. 556, p. 358-365
  • DOI: 10.1016/j.msea.2012.06.099

Two-Dimensional Correlation Localized Surface Plasmon Resonance Spectroscopy for Analysis of the Interaction between Metal Nanoparticles and Bovine Serum Albumin
journal, November 2010

  • Tang, Bin; Xu, Shuping; Tao, Jinlong
  • The Journal of Physical Chemistry C, Vol. 114, Issue 49
  • DOI: 10.1021/jp1056336

EDX spectrum modelling and multivariate analysis of sub-nanometer segregation
journal, April 1999


Polymorph Transformation in Paracetamol Monitored by In-line NIR Spectroscopy During a Cooling Crystallization Process
journal, June 2011


Extracting physically interpretable data from electron energy-loss spectra
journal, October 2010


Observation of three-dimensional elemental distributions of a Si device using a 360°-tilt FIB and the cold field-emission STEM system
journal, November 2008


Dose-limited spectroscopic imaging of soft materials by low-loss EELS in the scanning transmission electron microscope
journal, August 2008


Analysis of EEL spectrum of low-loss region using the Cs-corrected STEM–EELS method and multivariate analysis
journal, April 2011


Chemometric and Microscopic Analyses for the Size Growth of Monolayer-Protected Gold Nanoparticles during Their Superlattice Formation
journal, December 2007

  • Yao, Hiroshi; Moriyama, Keita; Kimura, Keisaku
  • Langmuir, Vol. 23, Issue 26
  • DOI: 10.1021/la701976v

EEL spectroscopic tomography: Towards a new dimension in nanomaterials analysis
journal, November 2012


Depth-Resolved EELS and Chemical State Mapping of N<SUP>+</SUP>-Implanted TiO<SUB>2</SUB> Photocatalyst
journal, January 2007