Telescopic nanotube device for hot nanolithography
Abstract
A device for maintaining a constant tip-surface distance for producing nanolithography patterns on a surface using a telescopic nanotube for hot nanolithography. An outer nanotube is attached to an AFM cantilever opposite a support end. An inner nanotube is telescopically disposed within the outer nanotube. The tip of the inner nanotube is heated to a sufficiently high temperature and brought in the vicinity of the surface. Heat is transmitted to the surface for thermal imprinting. Because the inner tube moves telescopically along the outer nanotube axis, a tip-surface distance is maintained constant due to the vdW force interaction, which in turn eliminates the need of an active feedback loop.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of South Florida, Tampa, FL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1166765
- Patent Number(s):
- 8920700
- Application Number:
- 13/023,782
- Assignee:
- University of South Florida (Tampa, FL)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B26 - HAND CUTTING TOOLS B26D - CUTTING
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
- DOE Contract Number:
- FG02-06ER46297
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 Feb 09
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Popescu, Adrian, and Woods, Lilia M. Telescopic nanotube device for hot nanolithography. United States: N. p., 2014.
Web.
Popescu, Adrian, & Woods, Lilia M. Telescopic nanotube device for hot nanolithography. United States.
Popescu, Adrian, and Woods, Lilia M. Tue .
"Telescopic nanotube device for hot nanolithography". United States. https://www.osti.gov/servlets/purl/1166765.
@article{osti_1166765,
title = {Telescopic nanotube device for hot nanolithography},
author = {Popescu, Adrian and Woods, Lilia M},
abstractNote = {A device for maintaining a constant tip-surface distance for producing nanolithography patterns on a surface using a telescopic nanotube for hot nanolithography. An outer nanotube is attached to an AFM cantilever opposite a support end. An inner nanotube is telescopically disposed within the outer nanotube. The tip of the inner nanotube is heated to a sufficiently high temperature and brought in the vicinity of the surface. Heat is transmitted to the surface for thermal imprinting. Because the inner tube moves telescopically along the outer nanotube axis, a tip-surface distance is maintained constant due to the vdW force interaction, which in turn eliminates the need of an active feedback loop.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {12}
}
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