skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Telescopic nanotube device for hot nanolithography

Abstract

A device for maintaining a constant tip-surface distance for producing nanolithography patterns on a surface using a telescopic nanotube for hot nanolithography. An outer nanotube is attached to an AFM cantilever opposite a support end. An inner nanotube is telescopically disposed within the outer nanotube. The tip of the inner nanotube is heated to a sufficiently high temperature and brought in the vicinity of the surface. Heat is transmitted to the surface for thermal imprinting. Because the inner tube moves telescopically along the outer nanotube axis, a tip-surface distance is maintained constant due to the vdW force interaction, which in turn eliminates the need of an active feedback loop.

Inventors:
;
Issue Date:
Research Org.:
Univ. of South Florida, Tampa, FL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1166765
Patent Number(s):
8920700
Application Number:
13/023,782
Assignee:
University of South Florida (Tampa, FL)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B26 - HAND CUTTING TOOLS B26D - CUTTING
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
FG02-06ER46297
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 Feb 09
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats

Popescu, Adrian, and Woods, Lilia M. Telescopic nanotube device for hot nanolithography. United States: N. p., 2014. Web.
Popescu, Adrian, & Woods, Lilia M. Telescopic nanotube device for hot nanolithography. United States.
Popescu, Adrian, and Woods, Lilia M. Tue . "Telescopic nanotube device for hot nanolithography". United States. https://www.osti.gov/servlets/purl/1166765.
@article{osti_1166765,
title = {Telescopic nanotube device for hot nanolithography},
author = {Popescu, Adrian and Woods, Lilia M},
abstractNote = {A device for maintaining a constant tip-surface distance for producing nanolithography patterns on a surface using a telescopic nanotube for hot nanolithography. An outer nanotube is attached to an AFM cantilever opposite a support end. An inner nanotube is telescopically disposed within the outer nanotube. The tip of the inner nanotube is heated to a sufficiently high temperature and brought in the vicinity of the surface. Heat is transmitted to the surface for thermal imprinting. Because the inner tube moves telescopically along the outer nanotube axis, a tip-surface distance is maintained constant due to the vdW force interaction, which in turn eliminates the need of an active feedback loop.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {12}
}

Patent:

Save / Share:

Works referenced in this record:

Floating Tip Nanolithography
journal, July 2008


A carbon nanotube oscillator as a surface profiling device
journal, September 2008


Exploiting the properties of carbon nanotubes for nanolithography
journal, September 1998


Telescopic hot double wall carbon nanotube for nanolithography
journal, November 2009


Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy
journal, March 2002


Nanoscale materials patterning and engineering by atomic force microscopy nanolithography
journal, November 2006


Heat transfer between a nano-tip and a surface
journal, June 2006