Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere
Abstract
We have demonstrated that a surface acoustic wave (SAW) sensor coated with a nanoporous framework material (NFM) film can perform ultrasensitive water vapor detection at concentrations in air from 0.05 to 12,000 ppmv at 1 atmosphere pressure. The method is extendable to other MEMS-based sensors, such as microcantilevers, or to quartz crystal microbalance sensors. We identify a specific NFM that provides high sensitivity and selectivity to water vapor. However, our approach is generalizable to detection of other species using NFM to provide sensitivity and selectivity.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1165139
- Patent Number(s):
- 8904850
- Application Number:
- 13/253,274
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 Oct 05
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 54 ENVIRONMENTAL SCIENCES; 47 OTHER INSTRUMENTATION
Citation Formats
Allendorf, Mark D, and Robinson, Alex L. Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere. United States: N. p., 2014.
Web.
Allendorf, Mark D, & Robinson, Alex L. Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere. United States.
Allendorf, Mark D, and Robinson, Alex L. Tue .
"Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere". United States. https://www.osti.gov/servlets/purl/1165139.
@article{osti_1165139,
title = {Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere},
author = {Allendorf, Mark D and Robinson, Alex L},
abstractNote = {We have demonstrated that a surface acoustic wave (SAW) sensor coated with a nanoporous framework material (NFM) film can perform ultrasensitive water vapor detection at concentrations in air from 0.05 to 12,000 ppmv at 1 atmosphere pressure. The method is extendable to other MEMS-based sensors, such as microcantilevers, or to quartz crystal microbalance sensors. We identify a specific NFM that provides high sensitivity and selectivity to water vapor. However, our approach is generalizable to detection of other species using NFM to provide sensitivity and selectivity.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 09 00:00:00 EST 2014},
month = {Tue Dec 09 00:00:00 EST 2014}
}
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