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Title: Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere

We have demonstrated that a surface acoustic wave (SAW) sensor coated with a nanoporous framework material (NFM) film can perform ultrasensitive water vapor detection at concentrations in air from 0.05 to 12,000 ppmv at 1 atmosphere pressure. The method is extendable to other MEMS-based sensors, such as microcantilevers, or to quartz crystal microbalance sensors. We identify a specific NFM that provides high sensitivity and selectivity to water vapor. However, our approach is generalizable to detection of other species using NFM to provide sensitivity and selectivity.
Inventors:
;
Issue Date:
OSTI Identifier:
1165139
Assignee:
Sandia Corporation (Albuquerque, NM) SSO
Patent Number(s):
8,904,850
Application Number:
13/253,274
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2011 Oct 05
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 54 ENVIRONMENTAL SCIENCES; 47 OTHER INSTRUMENTATION

Other works cited in this record:

Acoustic wave (AW) based moisture sensor for use with corrosive gases
patent, November 1996

Porous organo-metallic skeleton material containing an additional polymer
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