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Title: Stretchable and foldable electronic devices

Abstract

Disclosed herein are stretchable, foldable and optionally printable, processes for making devices and devices such as semiconductors, electronic circuits and components thereof that are capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Strain isolation layers provide good strain isolation to functional device layers. Multilayer devices are constructed to position a neutral mechanical surface coincident or proximate to a functional layer having a material that is susceptible to strain-induced failure. Neutral mechanical surfaces are positioned by one or more layers having a property that is spatially inhomogeneous, such as by patterning any of the layers of the multilayer device.

Inventors:
; ; ; ; ; ; ;
Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1165136
Patent Number(s):
8905772
Application Number:
13/974,963
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B33 - ADDITIVE MANUFACTURING TECHNOLOGY B33Y - ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
FG02-07ER46471
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Aug 23
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Rogers, John A, Huang, Yonggang, Ko, Heung Cho, Stoykovich, Mark, Choi, Won Mook, Song, Jizhou, Ahn, Jong Hyun, and Kim, Dae Hyeong. Stretchable and foldable electronic devices. United States: N. p., 2014. Web.
Rogers, John A, Huang, Yonggang, Ko, Heung Cho, Stoykovich, Mark, Choi, Won Mook, Song, Jizhou, Ahn, Jong Hyun, & Kim, Dae Hyeong. Stretchable and foldable electronic devices. United States.
Rogers, John A, Huang, Yonggang, Ko, Heung Cho, Stoykovich, Mark, Choi, Won Mook, Song, Jizhou, Ahn, Jong Hyun, and Kim, Dae Hyeong. Tue . "Stretchable and foldable electronic devices". United States. https://www.osti.gov/servlets/purl/1165136.
@article{osti_1165136,
title = {Stretchable and foldable electronic devices},
author = {Rogers, John A and Huang, Yonggang and Ko, Heung Cho and Stoykovich, Mark and Choi, Won Mook and Song, Jizhou and Ahn, Jong Hyun and Kim, Dae Hyeong},
abstractNote = {Disclosed herein are stretchable, foldable and optionally printable, processes for making devices and devices such as semiconductors, electronic circuits and components thereof that are capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Strain isolation layers provide good strain isolation to functional device layers. Multilayer devices are constructed to position a neutral mechanical surface coincident or proximate to a functional layer having a material that is susceptible to strain-induced failure. Neutral mechanical surfaces are positioned by one or more layers having a property that is spatially inhomogeneous, such as by patterning any of the layers of the multilayer device.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {12}
}

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Vertical Etching of Silicon at very High Aspect Ratios
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Stretchable and Foldable Silicon Integrated Circuits
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Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon
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Organic TFT Array on a Paper Substrate
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Highly Emissive Self-assembled Organic Nanoparticles having Dual Color Capacity for Targeted Immunofluorescence Labeling
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Ultrathin Silicon Circuits With Strain-Isolation Layers and Mesh Layouts for High-Performance Electronics on Fabric, Vinyl, Leather, and Paper
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Microheater-integrated single gas sensor array chip fabricated on flexible polyimide substrate
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Fabrication of periodic nanostructures by phase-controlled multiple-beam interference
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A hemispherical electronic eye camera based on compressible silicon optoelectronics
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Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements
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Spatially Selective Guided Growth of High-Coverage Arrays and Random Networks of Single-Walled Carbon Nanotubes and Their Integration into Electronic Devices
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Radio frequency analog electronics based on carbon nanotube transistors
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Control of Si Nanowire Growth by Oxygen
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Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers
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High efficiency GaAs thin film solar cells by peeled film technology
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Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts
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Nanotube Molecular Wires as Chemical Sensors
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Structures of indium oxide nanobelts
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Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers
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A flexible and wearable glucose sensor based on functional polymers with Soft-MEMS techniques
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Thermally-stable low-resistance Ti/Al/Mo/Au multilayer ohmic contacts on n–GaN
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Crystallographic alignment of high-density gallium nitride nanowire arrays
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Stretchable gold conductors on elastomeric substrates
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Stretchable Interconnects for Elastic Electronic Surfaces
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Design and Performance of Thin Metal Film Interconnects for Skin-Like Electronic Circuits
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An Elastically Stretchable TFT Circuit
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Stiff subcircuit islands of diamondlike carbon for stretchable electronics
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Electrical imaging of neuronal activity by multi-transistor-array (MTA) recording at 7.8 μm resolution
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Nanoribbon Waveguides for Subwavelength Photonics Integration
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Degradation mechanism of diethylene glycol units in a terephthalate polymer
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Thin film transistors for displays on plastic substrates
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High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach
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Organic light-emitting diodes formed by soft contact lamination
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A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems
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The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon
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Application of carbon nanotubes to field emission displays
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Weave Patterned Organic Transistors on Fiber for E-Textiles
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High-Resolution Contact Printing with Dendrimers
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Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus
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Electrospinning of Nanofibers: Reinventing the Wheel?
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Compliant thin film patterns of stiff materials as platforms for stretchable electronics
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ZnO nanobelts grown on Si substrate
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Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment
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The Incredible Shrinking Circuit
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Nanoscale Science and Technology: Building a Big Future from Small Things
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Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination
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Electrical Contacts to Molecular Layers by Nanotransfer Printing
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Electronic materials: Buckling down for flexible electronics
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One-dimensional hole gas in germanium/silicon nanowire heterostructures
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Nanowire Transistor Performance Limits and Applications
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An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors
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Single-Crystal CdSe Nanosaws
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Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers
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Mechanically Strained Strained-Si NMOSFETs
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