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Title: Fast electron microscopy via compressive sensing

Various technologies described herein pertain to compressive sensing electron microscopy. A compressive sensing electron microscope includes a multi-beam generator and a detector. The multi-beam generator emits a sequence of electron patterns over time. Each of the electron patterns can include a plurality of electron beams, where the plurality of electron beams is configured to impart a spatially varying electron density on a sample. Further, the spatially varying electron density varies between each of the electron patterns in the sequence. Moreover, the detector collects signals respectively corresponding to interactions between the sample and each of the electron patterns in the sequence.
Inventors:
; ;
Issue Date:
OSTI Identifier:
1165123
Assignee:
Sandia Corporation (Albuquerque, NM) SSO
Patent Number(s):
8,907,280
Application Number:
13/622,943
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2012 Sep 19
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Other works cited in this record:

Method and apparatus for compressive imaging device
patent, June 2012

Decreasing Image Acquisition Time for Compressive Imaging Devices
patent-application, February 2012

Secondary electron detection for distributed axis electron beam systems
journal, August 2008
  • Tanimoto, S.; Pickard, D. S.; Kenney, C.
  • Microelectronic Engineering, Vol. 85, Issue 8, p. 1786-1791
  • DOI: 10.1016/j.mee.2008.05.021

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