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Title: Large-scale fabrication of vertically aligned ZnO nanowire arrays

Abstract

A generator includes a substrate, a first electrode layer, a dense plurality of vertically-aligned piezoelectric elongated nanostructures, an insulating layer and a second electrode layer. The substrate has a top surface and the first electrode layer is disposed on the top surface of the substrate. The dense plurality of vertically-aligned piezoelectric elongated nanostructures extends from the first electrode layer. Each of the nanostructures has a top end. The insulating layer is disposed on the top ends of the nanostructures. The second electrode layer is disposed on the non-conductive layer and is spaced apart from the nanostructures.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Georgia Tech Research Corporation, Atlanta, GA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1157074
Patent Number(s):
8,829,767
Application Number:
13/473,867
Assignee:
Georgia Tech Research Corporation (Atlanta, GA) CHO
DOE Contract Number:  
FG02-07ER46394
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats

Wang, Zhong Lin, Hu, Youfan, Zhang, Yan, Xu, Chen, and Zhu, Guang. Large-scale fabrication of vertically aligned ZnO nanowire arrays. United States: N. p., 2014. Web.
Wang, Zhong Lin, Hu, Youfan, Zhang, Yan, Xu, Chen, & Zhu, Guang. Large-scale fabrication of vertically aligned ZnO nanowire arrays. United States.
Wang, Zhong Lin, Hu, Youfan, Zhang, Yan, Xu, Chen, and Zhu, Guang. Tue . "Large-scale fabrication of vertically aligned ZnO nanowire arrays". United States. https://www.osti.gov/servlets/purl/1157074.
@article{osti_1157074,
title = {Large-scale fabrication of vertically aligned ZnO nanowire arrays},
author = {Wang, Zhong Lin and Hu, Youfan and Zhang, Yan and Xu, Chen and Zhu, Guang},
abstractNote = {A generator includes a substrate, a first electrode layer, a dense plurality of vertically-aligned piezoelectric elongated nanostructures, an insulating layer and a second electrode layer. The substrate has a top surface and the first electrode layer is disposed on the top surface of the substrate. The dense plurality of vertically-aligned piezoelectric elongated nanostructures extends from the first electrode layer. Each of the nanostructures has a top end. The insulating layer is disposed on the top ends of the nanostructures. The second electrode layer is disposed on the non-conductive layer and is spaced apart from the nanostructures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {9}
}

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Works referenced in this record:

MEMS power generator with transverse mode thin film PZT
journal, July 2005

  • Jeon, Y. B.; Sood, R.; Jeong, J.-h.
  • Sensors and Actuators A: Physical, Vol. 122, Issue 1, p. 16-22
  • DOI: 10.1016/j.sna.2004.12.032