Copper-assisted, anti-reflection etching of silicon surfaces

Toor, Fatima; Branz, Howard

Title: Copper-assisted, anti-reflection etching of silicon surfaces

Abstract

A method (300) for etching a silicon surface (116) to reduce reflectivity. The method (300) includes electroless deposition of copper nanoparticles about 20 nanometers in size on the silicon surface (116), with a particle-to-particle spacing of 3 to 8 nanometers. The method (300) includes positioning (310) the substrate (112) with a silicon surface (116) into a vessel (122). The vessel (122) is filled (340) with a volume of an etching solution (124) so as to cover the silicon surface (116). The etching solution (124) includes an oxidant-etchant solution (146), e.g., an aqueous solution of hydrofluoric acid and hydrogen peroxide. The silicon surface (116) is etched (350) by agitating the etching solution (124) with, for example, ultrasonic agitation, and the etching may include heating (360) the etching solution (124) and directing light (365) onto the silicon surface (116). During the etching, copper nanoparticles enhance or drive the etching process.

Inventors:: Toor, Fatima; Branz, Howard

Issue Date:: 2014-08-26

Research Org.:: National Renewable Energy Laboratory (NREL), Golden, CO (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1151783

Patent Number(s):: 8815104

Application Number:: 13/423,745

Assignee:: Alliance for Sustainable Energy, LLC (Golden, CO)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

Show more

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L31/02363 - {of the semiconductor body itself, e.g. textured active layers}
H01L31/0284 - {comprising porous silicon as part of the active layer
H01L31/068 - the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/547 - Monocrystalline silicon PV cells

Show less

DOE Contract Number:: AC36-08GO28308

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Toor, Fatima, and Branz, Howard. Copper-assisted, anti-reflection etching of silicon surfaces.  United States: N. p., 2014. 
        Web.

Copy to clipboard


                    Toor, Fatima, & Branz, Howard. Copper-assisted, anti-reflection etching of silicon surfaces.  United States.

Copy to clipboard


                    Toor, Fatima, and Branz, Howard. Tue .  
        "Copper-assisted, anti-reflection etching of silicon surfaces".  United States.  https://www.osti.gov/servlets/purl/1151783.

Copy to clipboard


                    
@article{osti_1151783,

  title        = {Copper-assisted, anti-reflection etching of silicon surfaces},

  author       = {Toor, Fatima and Branz, Howard},

  abstractNote = {A method (300) for etching a silicon surface (116) to reduce reflectivity. The method (300) includes electroless deposition of copper nanoparticles about 20 nanometers in size on the silicon surface (116), with a particle-to-particle spacing of 3 to 8 nanometers. The method (300) includes positioning (310) the substrate (112) with a silicon surface (116) into a vessel (122). The vessel (122) is filled (340) with a volume of an etching solution (124) so as to cover the silicon surface (116). The etching solution (124) includes an oxidant-etchant solution (146), e.g., an aqueous solution of hydrofluoric acid and hydrogen peroxide. The silicon surface (116) is etched (350) by agitating the etching solution (124) with, for example, ultrasonic agitation, and the etching may include heating (360) the etching solution (124) and directing light (365) onto the silicon surface (116). During the etching, copper nanoparticles enhance or drive the etching process.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2014},

  month        = {8}

}

Copy to clipboard

Patent:

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

Optically black coating and process for forming it
patent, September 1978

Wade, Jackie F.; Peyton, John E.; Klitzky, Bruce R.
US Patent Document 4,111,762
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4111762

Silicon membrane micro-scale
patent, October 1990

Holm-Kennedy, James W.; Umemoto, Donald K.
US Patent Document 4,960,177
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4960177

Process and apparatus for producing non-glare glass by etching
patent, March 1993

Soda, Ken
US Patent Document 5,196,088
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5196088

Method of producing semiconductor substrate
patent, October 1993

Yamagata, Kenji; Yonehara, Takao
US Patent Document 5,250,460
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5250460

Superconducting detector and method of making same
patent, November 1993

Bang, Christopher A.; Flik, Markus; Schmidt, Martin A.
US Patent Document 5,264,375
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5264375

Photonic silicon on a transparent substrate
patent, July 2000

Russell, Stephen D.; Dubbelday, Wadad B.; Shimabukuro, Randy L.
US Patent Document 6,093,941
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6093941

Micromechanical membrane tilt-mirror switch
patent, January 2001

Ford, Joseph E.; Walker, James A.
US Patent Document 6,178,033
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6178033

Derivatization of silicon surfaces
patent, September 2001

Laibinis, Paul; Kim, Namyong
US Patent Document 6,284,317
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6284317

Metal catalyst technique for texturing silicon solar cells
patent, December 2001

Ruby, Douglas S.; Zaidi, Saleem H.
US Patent Document 6,329,296
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6329296

Method for removing black silicon in semiconductor fabrication
patent, May 2002

Tsai, Tzu-Ching; Lin, Hung-Hsin
US Patent Document 6,383,936
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6383936

Electrophoretic displays using nanoparticles
patent, March 2003

Jacobson, Joseph M.; Drzaic, Paul S.; Morrison, Ian D.
US Patent Document 6,538,801
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6538801

Electrophoretic displays using nanoparticles
patent, April 2004

Jacobson, Joseph M.; Pullen, Anthony; Whitesides, Thomas H.
US Patent Document 6,721,083
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6721083

Method of fabricating a semiconductor device
patent, July 2004

Yamazaki, Shunpei; Takano, Tamae; Dairiki, Koji
US Patent Document 6,759,313
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6759313

Metal-assisted chemical etch to produce porous group III-V materials
patent, July 2004

Bohn, Paul W.; Li, Xiuling; Sweedler, Jonathan V.
US Patent Document 6,762,134
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6762134

Metal-assisted chemical etch porous silicon formation method
patent, September 2004

Li, Xiuling; Bohn, Paul W.; Sweedler, Jonathan V.
US Patent Document 6,790,785
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6790785

Electroless deposition method
patent, May 2005

Padhi, Deenesh; Yahalom, Joseph; Ramanathan, Sivakami
US Patent Document 6,899,816
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6899816

Electroless deposition method
patent, June 2005

Padhi, Deenesh; Yahalom, Joseph; Ramanathan, Sivakami
US Patent Document 6,905,622
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6905622

Photoelectrochemical device and electrode
patent, May 2006

Gibson, Thomas L.; Kelly, Nelson A.
US Patent Document 7,052,587
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7052587

Lithography-based patterning of layer-by-layer nano-assembled thin films
patent, August 2006

Cui, Tianhong; Lvov, Yuri; Hua, Feng
US Patent Document 7,090,783
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7090783

Method for producing multicrystalline silicon substrate for solar cells
patent, November 2006

Matsumura, Michio; Tujino, Kazuya
US Patent Document 7,135,414
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7135414

Method of fabricating a semiconductor device
patent, November 2006

Yamazaki, Shunpei; Takano, Tamae; Dairiki, Koji
US Patent Document 7,141,490
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7141490

Methods of selective deposition of fine particles onto selected regions of a substrate
patent, January 2009

Cohen, Guy
US Patent Document 7,476,573
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7476573

Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
patent, September 2009

Goo, Juseon; Hong, Eunkee; Kim, Hong-Gun
US Patent Document 7,585,786
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7585786

Method of forming pores in crystal substrate, and crystal substrate containing pores formed by the same
patent, May 2010

Matsumura, Michio; Tsujino, Kazuya
US Patent Document 7,718,254
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7718254

Solar hydrogen charger
patent, November 2010

Fan, Qinbai; Liss, William E.
US Patent Document 7,833,391
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7833391

Method for producing silicon substrate for solar cells
patent, November 2011

Dimitrov, Dimitre Zahariev; Huang, Chien-Rong; Lin, Ching-Hsi
US Patent Document 8,053,270
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8053270

Methods of selective deposition of fine particles onto selected regions of a substrate
patent, November 2011

Cohen, Guy
US Patent Document 8,053,328
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8053328

Nanoparticle-based etching of silicon surfaces
patent, December 2011

Branz, Howard M.; Duda, Anna; Ginley, David S.
US Patent Document 8,075,792
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8075792

Method of manufacturing solar cell
patent, February 2012

Nishimoto, Yoichiro
US Patent Document 8,119,438
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8119438

Method of fabricating solar cell
patent, February 2012

Lin, Ching-Hsi; Huang, Chien-Rong; Dimitrov, Dimitre Zahariev
US Patent Document 8,124,535
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8124535

Method for forming silicon trench
patent, June 2012

Lin, Ching-Fuh; Hung, Shih-Che; Syu, Shu-Jia
US Patent Document 8,193,095
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8193095

Method for producing silicon nanostructures
patent, December 2012

Lin, Ching-Fuh; Syu, Shu-Jia
US Patent Document 8,334,216
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8334216

Method of forming nanoscale three-dimensional patterns in a porous material
patent, July 2013

Li, Xiuling; Ruzic, David N.; Chun, Ik Su
US Patent Document 8,486,843
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8486843

Method of fabricating a semiconductor device
patent-application, June 2002

Yamazaki, Shunpei; Takano, Tamae; Dairiki, Koji
US Patent Application 10/001785; 20020068421
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020068421

Systems and methods for forming processing streams
patent-application, August 2002

Bay, Steven; Kaiser, JR., Roger
US Patent Application 09/930009; 20020104552
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020104552

Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation
patent-application, September 2002

Winningham, Thomas Andrew; Douglas, Kenneth
US Patent Application 09/750522; 20020123227
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020123227

Electrophoretic displays using nanoparticles
patent-application, October 2002

Jacobson, Joseph M.; Drzaic, Paul S.; Morrison, Ian D.
US Patent Application 10/054721; 20020145792
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020145792

Electrophoretic displays using nanoparticles
patent-application, May 2003

Jacobson, Joseph M.; Pullen, Anthony E.; Whitesides, Thomas H.
US Patent Application 10/065617; 20030096113
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030096113

Method for raw etching silicon solar cells
patent-application, June 2003

Kuebelbeck, Armin; Zielinski, Claudia; Goelzenleuchter, Thomas
US Patent Application 10/168797; 20030119332
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030119332

Electroless deposition method
patent-application, October 2003

Padhi, Deenesh; Yahalom, Joseph; Ramanathan, Sivakami
US Patent Application 10/117711; 20030190812
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030190812

Spatial light modulators with light absorbing areas
patent-application, May 2014

Huibers, Andrw G.; Richards, Peter W.
US Patent Application 10/305507; 20040100594
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040100594

Spatial Light Modulators With Light Blocking/absorbing Areas
patent-application, May 2004

Huibers, Andrew G.; Patel, Satyadev R.
US Patent Application 10/305536; 20040100677
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040100677

Method of fabricating a semiconductor device
patent-application, December 2004

Yamazaki, Shumpei; Takano, Tamae; Dairiki, Koji
US Patent Application 10/882634; 20040241967
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040241967

Methods of nanostructure formation and shape selection
patent-application, March 2005

Xia, Younan; Sun, Yugang
US Patent Application 10/732910; 20050056118
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050056118

Method for producing multicrystalline silicon substrate for solar cells
patent-application, May 2005

Matsumura, Michio; Tujino, Kazuya
US Patent Application 11/002657; 20050101153
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050101153

Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
patent-application, June 2005

Goo, Juseon; Hong, Eunkee; Kim, Hong-Gun
US Patent Application 11/010223; 20050130439
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050130439

Devices and methods for enhanced microneedle penetration of biological barriers
patent-application, June 2005

Prausnitz, Mark R.; Allen, Mark G.; Henry, Sebastian
US Patent Application 10/856691; 20050137531
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050137531

Self-assembled structures
patent-application, December 2005

Kambe, Nobuyuki; Dardi, Peter S.
US Patent Application 11/064706; 20050271805
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050271805

Method for forming high-resolution pattern with direct writing means
patent-application, December 2006

Shin, Dong-Youn; Shin, Bu-Gon
US Patent Application 11/431922; 20060281333
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060281333

Method for forming high-resolution pattern and substrate having prepattern formed thereby
patent-application, December 2006

Shin, Dong-Youn
US Patent Application 11/431923; 20060281334
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060281334

Method and Device for Modulating Light
patent-application, May 2007

Miles, Mark W.
US Patent Application 11/668973; 20070121205
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070121205

Method of fabricating semiconductor device
patent-application, June 2007

Yamazaki, Shunpei; Takano, Tamae; Dairiki, Koji
US Patent Application 11/601699; 20070148922
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070148922

Light Emitting Device
patent-application, July 2007

Yamamoto, Kazushige; Shimizu, Tatsuo; Haneda, Shigeru
US Patent Application 11/533149; 20070152234
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070152234

Modification of metal nanoparticles for improved analyte detection by surface enhanced Raman spectroscopy (SERS)
patent-application, July 2007

Zhang, Jingwu; Sundararajan, Narayan; Ngola, Sarah M.
US Patent Application 11/319747; 20070155021
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070155021

Degenerate binding detection and protein identification using Raman spectroscopy nanoparticle labels
patent-application, July 2007

Yamakawa, Mineo; Sundararajan, Narayan; Berlin, Andrew
US Patent Application 11/325833; 20070155022
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070155022

Solution Deposition of Inorganic Materials and Electronic Devices Made Comprising the Inorganic Materials
patent-application, August 2007

Chang, Chih-hung; Lee, DooHyoung; Chang, Yu-Jen
US Patent Application 11/564759; 20070184576
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070184576

Method for Patterning Metal Using Nanoparticle Containing Precursors
patent-application, August 2007

Perry, Joseph W.; Marder, Seth R.; Stellacci, Francesco
US Patent Application 11/736695; 20070190326
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070190326

Methods for producing MEMS with protective coatings using multi-component sacrificial layers
patent-application, September 2007

Tung, Ming-Hau; Kogut, Lior
US Patent Application 11/367098; 20070206267
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070206267

Apparatus and method for imaging with surface enhanced coherent anti-stokes raman scattering (SECARS)
patent-application, October 2007

Koo, Tae-Woong
US Patent Application 11/408185; 20070247620
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070247620

Novel Nanoparticle Patterning Process
patent-application, December 2007

Tutt, Lee W.; Feller, Therese M.
US Patent Application 11/421894; 20070281249
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070281249

Solar hydrogen charger
patent-application, January 2009

Fan, Qinbai; Liss, William E.
US Patent Document 11/881198; 20090026070
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090026070

Template for Pyramidal Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use
patent-application, April 2009

Moslehi, Mehrdad
US Patent Application 11/868492; 20090107545
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090107545

Nanostructure-Film LCD Devices
patent-application, June 2009

Park, Young-Bae
US Patent Application 12/259613; 20090147167
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090147167

Solar cell, method of manufacturing the same, and method of texturing solar cell
patent-application, July 2009

Kwag, Gyeayoung; Do, Younggu
US Patent Application 12/318630; 20090183776
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090183776

Anti-Reflection Etching of Silicon Surfaces Catalyzed with Ionic Metal Solutions
patent-application, September 2009

Yost, Vernon; Branz, Howard
US Patent Application 12/053445; 20090236317
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090236317

Mixed-typed heterojunction thin-film solar cell structure and method for fabricating the same
patent-application, December 2009

Lin, Ching-Fuh; Hsiao, Chieh-Yu; Chao, Jiun-JIe
US Patent Application 12/222691; 20090293946
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090293946

Local heterostructure contacts
patent-application, December 2009

Scherff, Maximilian; Fahrner, Wolfgang Rainer
US Patent Application 12/310666; 20090317934
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090317934

Process for Structuring Silicon
patent-application, April 2010

Buchine, Brent A.; Modawar, Faris; Black, Marcie R.
US Patent Application 12/576490; 20100092888
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100092888

Method for Producing an Emitter Structure and Emitter Structures Resulting Therefrom
patent-application, June 2010

Van Nieuwenhuysen, Kris; Duerinckx, Filip
US Patent Application 12/608761; 20100139763
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100139763

Applications of laser-processed substrate for molecular diagnostics
patent-application, July 2010

Ebstein, Steven M.
US Patent Application 12/584574; 20100165336
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100165336

Conversion of Carbon Dioxide to Organic Products
patent-application, July 2010

Bocarsly, Andrew B.; Cole, Emily Barton
US Patent Document 12/696840; 20100187123
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100187123

Metal-Assisted Chemical Etching of Substrates
patent-application, September 2010

Hildreth, Owen; Wong, C. P.; Xiu, Yonghao
US Patent Application 12/751080; 20100248449
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100248449

Solar Cell and Method of Manufacturing the Same
patent-application, October 2010

Ko, Jihoon; Kang, Juwan; Kim, Jonghwan
US Patent Application 12/559542; 20100258177
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100258177

Method for preparing substrate with periodical structure
patent-application, October 2010

Li, Chung-Hua; Lee, Sheng-Ru
US Patent Application 12/662543; 20100270263
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100270263

Silicon substrate with periodical structure
patent-application, October 2010

Li, Chung-Hua; Lee, Sheng-Ru
US Patent Application 12/662542; 20100270650
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100270650

Microscreen for filtering particles in microfluidics applications and production thereof
patent-application, November 2010

Feyh, Ando
US Patent Application 12/308303; 20100296986
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100296986

Methods of forming a multi-doped junction with silicon-containing particles
patent-application, January 2011

Scardera, Giuseppe; Kan, Shihai; Kelman, Maxim
US Patent Application 12/656710; 20110003465
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110003465

High-Productivity Porous Semiconductor Manufacturing Equipment
patent-application, February 2011

Kamian, George D.; Nag, Somnath; Tamilman, Subbu
US Patent Application 12/774667; 20110030610
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110030610

Solar Cells with Textured Surfaces
patent-application, February 2011

Sachs, Emanuel M.; Bredt, James F.
US Patent Application 12/526438; 20110045627
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110045627

Method of fabricating solar cell
patent-application, June 2011

Lin, Ching-Hsi; Huang, Chien-Rong; Dimitrov, Dimitre Zahariev
US Patent Application 12/658663; 20110143484
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110143484

Epitaxial Structures, Methods of Forming the Same, and Devices Including the Same
patent-application, October 2011

Rockenberger, Joerg; Zurcher, Fabio; Takashima, Mao
US Patent Application 13/081257; 20110240997
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110240997

Forming High Efficiency Silicon Solar Cells Using Density-Graded Anti-reflection Surfaces
patent-application, December 2011

Yuan, Hao-Chih; Branz, Howard M.; Page, Matthew R.
US Patent Application 12/797590; 20110303265
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110303265

Nano/Micro-Structure and Fabrication Method Thereof
patent-application, December 2011

Tsao, Chia-Wen; Chang, Chia-Pin; Chen, Wen-Yih
US Patent Application 13/018444; 20110316145
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110316145

Solae Energy Systems
patent-application, February 2012

Branz, Howard M.; Vandermeulen, Peter
US Patent Application 12/844212; 20120024365
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120024365

Method of Forming Micro-Pore Structures or Trench Structures on Surface of Silicon Wafer Substrate
patent-application, April 2012

Chien, Ray; Lin, Yu-Mei; Kao, Wei-Che
US Patent Application 13/228597; 20120088372
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120088372

Anti-Reflective Nanoporous Silicon for Efficient Hydrogen Production
patent-application, May 2012

Oh, Jihun; Branz, Howard
US Patent Application 13/284861; 20120103825
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120103825