Copper-assisted, anti-reflection etching of silicon surfaces
Abstract
A method (300) for etching a silicon surface (116) to reduce reflectivity. The method (300) includes electroless deposition of copper nanoparticles about 20 nanometers in size on the silicon surface (116), with a particle-to-particle spacing of 3 to 8 nanometers. The method (300) includes positioning (310) the substrate (112) with a silicon surface (116) into a vessel (122). The vessel (122) is filled (340) with a volume of an etching solution (124) so as to cover the silicon surface (116). The etching solution (124) includes an oxidant-etchant solution (146), e.g., an aqueous solution of hydrofluoric acid and hydrogen peroxide. The silicon surface (116) is etched (350) by agitating the etching solution (124) with, for example, ultrasonic agitation, and the etching may include heating (360) the etching solution (124) and directing light (365) onto the silicon surface (116). During the etching, copper nanoparticles enhance or drive the etching process.
- Inventors:
- Issue Date:
- Research Org.:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1151783
- Patent Number(s):
- 8815104
- Application Number:
- 13/423,745
- Assignee:
- Alliance for Sustainable Energy, LLC (Golden, CO)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- DOE Contract Number:
- AC36-08GO28308
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Toor, Fatima, and Branz, Howard. Copper-assisted, anti-reflection etching of silicon surfaces. United States: N. p., 2014.
Web.
Toor, Fatima, & Branz, Howard. Copper-assisted, anti-reflection etching of silicon surfaces. United States.
Toor, Fatima, and Branz, Howard. Tue .
"Copper-assisted, anti-reflection etching of silicon surfaces". United States. https://www.osti.gov/servlets/purl/1151783.
@article{osti_1151783,
title = {Copper-assisted, anti-reflection etching of silicon surfaces},
author = {Toor, Fatima and Branz, Howard},
abstractNote = {A method (300) for etching a silicon surface (116) to reduce reflectivity. The method (300) includes electroless deposition of copper nanoparticles about 20 nanometers in size on the silicon surface (116), with a particle-to-particle spacing of 3 to 8 nanometers. The method (300) includes positioning (310) the substrate (112) with a silicon surface (116) into a vessel (122). The vessel (122) is filled (340) with a volume of an etching solution (124) so as to cover the silicon surface (116). The etching solution (124) includes an oxidant-etchant solution (146), e.g., an aqueous solution of hydrofluoric acid and hydrogen peroxide. The silicon surface (116) is etched (350) by agitating the etching solution (124) with, for example, ultrasonic agitation, and the etching may include heating (360) the etching solution (124) and directing light (365) onto the silicon surface (116). During the etching, copper nanoparticles enhance or drive the etching process.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 26 00:00:00 EDT 2014},
month = {Tue Aug 26 00:00:00 EDT 2014}
}
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Works referenced in this record:
Optically black coating and process for forming it
patent, September 1978
- Wade, Jackie F.; Peyton, John E.; Klitzky, Bruce R.
- US Patent Document 4,111,762
Silicon membrane micro-scale
patent, October 1990
- Holm-Kennedy, James W.; Umemoto, Donald K.
- US Patent Document 4,960,177
Process and apparatus for producing non-glare glass by etching
patent, March 1993
- Soda, Ken
- US Patent Document 5,196,088
Method of producing semiconductor substrate
patent, October 1993
- Yamagata, Kenji; Yonehara, Takao
- US Patent Document 5,250,460
Superconducting detector and method of making same
patent, November 1993
- Bang, Christopher A.; Flik, Markus; Schmidt, Martin A.
- US Patent Document 5,264,375
Photonic silicon on a transparent substrate
patent, July 2000
- Russell, Stephen D.; Dubbelday, Wadad B.; Shimabukuro, Randy L.
- US Patent Document 6,093,941
Micromechanical membrane tilt-mirror switch
patent, January 2001
- Ford, Joseph E.; Walker, James A.
- US Patent Document 6,178,033
Derivatization of silicon surfaces
patent, September 2001
- Laibinis, Paul; Kim, Namyong
- US Patent Document 6,284,317
Metal catalyst technique for texturing silicon solar cells
patent, December 2001
- Ruby, Douglas S.; Zaidi, Saleem H.
- US Patent Document 6,329,296
Method for removing black silicon in semiconductor fabrication
patent, May 2002
- Tsai, Tzu-Ching; Lin, Hung-Hsin
- US Patent Document 6,383,936
Electrophoretic displays using nanoparticles
patent, March 2003
- Jacobson, Joseph M.; Drzaic, Paul S.; Morrison, Ian D.
- US Patent Document 6,538,801
Electrophoretic displays using nanoparticles
patent, April 2004
- Jacobson, Joseph M.; Pullen, Anthony; Whitesides, Thomas H.
- US Patent Document 6,721,083
Method of fabricating a semiconductor device
patent, July 2004
- Yamazaki, Shunpei; Takano, Tamae; Dairiki, Koji
- US Patent Document 6,759,313
Metal-assisted chemical etch to produce porous group III-V materials
patent, July 2004
- Bohn, Paul W.; Li, Xiuling; Sweedler, Jonathan V.
- US Patent Document 6,762,134
Metal-assisted chemical etch porous silicon formation method
patent, September 2004
- Li, Xiuling; Bohn, Paul W.; Sweedler, Jonathan V.
- US Patent Document 6,790,785
Electroless deposition method
patent, May 2005
- Padhi, Deenesh; Yahalom, Joseph; Ramanathan, Sivakami
- US Patent Document 6,899,816
Electroless deposition method
patent, June 2005
- Padhi, Deenesh; Yahalom, Joseph; Ramanathan, Sivakami
- US Patent Document 6,905,622
Photoelectrochemical device and electrode
patent, May 2006
- Gibson, Thomas L.; Kelly, Nelson A.
- US Patent Document 7,052,587
Lithography-based patterning of layer-by-layer nano-assembled thin films
patent, August 2006
- Cui, Tianhong; Lvov, Yuri; Hua, Feng
- US Patent Document 7,090,783
Method for producing multicrystalline silicon substrate for solar cells
patent, November 2006
- Matsumura, Michio; Tujino, Kazuya
- US Patent Document 7,135,414
Method of fabricating a semiconductor device
patent, November 2006
- Yamazaki, Shunpei; Takano, Tamae; Dairiki, Koji
- US Patent Document 7,141,490
Methods of selective deposition of fine particles onto selected regions of a substrate
patent, January 2009
- Cohen, Guy
- US Patent Document 7,476,573
Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
patent, September 2009
- Goo, Juseon; Hong, Eunkee; Kim, Hong-Gun
- US Patent Document 7,585,786
Method of forming pores in crystal substrate, and crystal substrate containing pores formed by the same
patent, May 2010
- Matsumura, Michio; Tsujino, Kazuya
- US Patent Document 7,718,254
Solar hydrogen charger
patent, November 2010
- Fan, Qinbai; Liss, William E.
- US Patent Document 7,833,391
Method for producing silicon substrate for solar cells
patent, November 2011
- Dimitrov, Dimitre Zahariev; Huang, Chien-Rong; Lin, Ching-Hsi
- US Patent Document 8,053,270
Methods of selective deposition of fine particles onto selected regions of a substrate
patent, November 2011
- Cohen, Guy
- US Patent Document 8,053,328
Nanoparticle-based etching of silicon surfaces
patent, December 2011
- Branz, Howard M.; Duda, Anna; Ginley, David S.
- US Patent Document 8,075,792
Method of manufacturing solar cell
patent, February 2012
- Nishimoto, Yoichiro
- US Patent Document 8,119,438
Method of fabricating solar cell
patent, February 2012
- Lin, Ching-Hsi; Huang, Chien-Rong; Dimitrov, Dimitre Zahariev
- US Patent Document 8,124,535
Method for forming silicon trench
patent, June 2012
- Lin, Ching-Fuh; Hung, Shih-Che; Syu, Shu-Jia
- US Patent Document 8,193,095
Method for producing silicon nanostructures
patent, December 2012
- Lin, Ching-Fuh; Syu, Shu-Jia
- US Patent Document 8,334,216
Method of forming nanoscale three-dimensional patterns in a porous material
patent, July 2013
- Li, Xiuling; Ruzic, David N.; Chun, Ik Su
- US Patent Document 8,486,843
Method of fabricating a semiconductor device
patent-application, June 2002
- Yamazaki, Shunpei; Takano, Tamae; Dairiki, Koji
- US Patent Application 10/001785; 20020068421
Systems and methods for forming processing streams
patent-application, August 2002
- Bay, Steven; Kaiser, JR., Roger
- US Patent Application 09/930009; 20020104552
Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation
patent-application, September 2002
- Winningham, Thomas Andrew; Douglas, Kenneth
- US Patent Application 09/750522; 20020123227
Electrophoretic displays using nanoparticles
patent-application, October 2002
- Jacobson, Joseph M.; Drzaic, Paul S.; Morrison, Ian D.
- US Patent Application 10/054721; 20020145792
Electrophoretic displays using nanoparticles
patent-application, May 2003
- Jacobson, Joseph M.; Pullen, Anthony E.; Whitesides, Thomas H.
- US Patent Application 10/065617; 20030096113
Method for raw etching silicon solar cells
patent-application, June 2003
- Kuebelbeck, Armin; Zielinski, Claudia; Goelzenleuchter, Thomas
- US Patent Application 10/168797; 20030119332
Electroless deposition method
patent-application, October 2003
- Padhi, Deenesh; Yahalom, Joseph; Ramanathan, Sivakami
- US Patent Application 10/117711; 20030190812
Spatial light modulators with light absorbing areas
patent-application, May 2014
- Huibers, Andrw G.; Richards, Peter W.
- US Patent Application 10/305507; 20040100594
Spatial Light Modulators With Light Blocking/absorbing Areas
patent-application, May 2004
- Huibers, Andrew G.; Patel, Satyadev R.
- US Patent Application 10/305536; 20040100677
Method of fabricating a semiconductor device
patent-application, December 2004
- Yamazaki, Shumpei; Takano, Tamae; Dairiki, Koji
- US Patent Application 10/882634; 20040241967
Methods of nanostructure formation and shape selection
patent-application, March 2005
- Xia, Younan; Sun, Yugang
- US Patent Application 10/732910; 20050056118
Method for producing multicrystalline silicon substrate for solar cells
patent-application, May 2005
- Matsumura, Michio; Tujino, Kazuya
- US Patent Application 11/002657; 20050101153
Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
patent-application, June 2005
- Goo, Juseon; Hong, Eunkee; Kim, Hong-Gun
- US Patent Application 11/010223; 20050130439
Devices and methods for enhanced microneedle penetration of biological barriers
patent-application, June 2005
- Prausnitz, Mark R.; Allen, Mark G.; Henry, Sebastian
- US Patent Application 10/856691; 20050137531
Self-assembled structures
patent-application, December 2005
- Kambe, Nobuyuki; Dardi, Peter S.
- US Patent Application 11/064706; 20050271805
Method for forming high-resolution pattern with direct writing means
patent-application, December 2006
- Shin, Dong-Youn; Shin, Bu-Gon
- US Patent Application 11/431922; 20060281333
Method for forming high-resolution pattern and substrate having prepattern formed thereby
patent-application, December 2006
- Shin, Dong-Youn
- US Patent Application 11/431923; 20060281334
Method and Device for Modulating Light
patent-application, May 2007
- Miles, Mark W.
- US Patent Application 11/668973; 20070121205
Method of fabricating semiconductor device
patent-application, June 2007
- Yamazaki, Shunpei; Takano, Tamae; Dairiki, Koji
- US Patent Application 11/601699; 20070148922
Light Emitting Device
patent-application, July 2007
- Yamamoto, Kazushige; Shimizu, Tatsuo; Haneda, Shigeru
- US Patent Application 11/533149; 20070152234
Modification of metal nanoparticles for improved analyte detection by surface enhanced Raman spectroscopy (SERS)
patent-application, July 2007
- Zhang, Jingwu; Sundararajan, Narayan; Ngola, Sarah M.
- US Patent Application 11/319747; 20070155021
Degenerate binding detection and protein identification using Raman spectroscopy nanoparticle labels
patent-application, July 2007
- Yamakawa, Mineo; Sundararajan, Narayan; Berlin, Andrew
- US Patent Application 11/325833; 20070155022
Solution Deposition of Inorganic Materials and Electronic Devices Made Comprising the Inorganic Materials
patent-application, August 2007
- Chang, Chih-hung; Lee, DooHyoung; Chang, Yu-Jen
- US Patent Application 11/564759; 20070184576
Method for Patterning Metal Using Nanoparticle Containing Precursors
patent-application, August 2007
- Perry, Joseph W.; Marder, Seth R.; Stellacci, Francesco
- US Patent Application 11/736695; 20070190326
Methods for producing MEMS with protective coatings using multi-component sacrificial layers
patent-application, September 2007
- Tung, Ming-Hau; Kogut, Lior
- US Patent Application 11/367098; 20070206267
Apparatus and method for imaging with surface enhanced coherent anti-stokes raman scattering (SECARS)
patent-application, October 2007
- Koo, Tae-Woong
- US Patent Application 11/408185; 20070247620
Novel Nanoparticle Patterning Process
patent-application, December 2007
- Tutt, Lee W.; Feller, Therese M.
- US Patent Application 11/421894; 20070281249
Solar hydrogen charger
patent-application, January 2009
- Fan, Qinbai; Liss, William E.
- US Patent Document 11/881198; 20090026070
Template for Pyramidal Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use
patent-application, April 2009
- Moslehi, Mehrdad
- US Patent Application 11/868492; 20090107545
Nanostructure-Film LCD Devices
patent-application, June 2009
- Park, Young-Bae
- US Patent Application 12/259613; 20090147167
Solar cell, method of manufacturing the same, and method of texturing solar cell
patent-application, July 2009
- Kwag, Gyeayoung; Do, Younggu
- US Patent Application 12/318630; 20090183776
Anti-Reflection Etching of Silicon Surfaces Catalyzed with Ionic Metal Solutions
patent-application, September 2009
- Yost, Vernon; Branz, Howard
- US Patent Application 12/053445; 20090236317
Mixed-typed heterojunction thin-film solar cell structure and method for fabricating the same
patent-application, December 2009
- Lin, Ching-Fuh; Hsiao, Chieh-Yu; Chao, Jiun-JIe
- US Patent Application 12/222691; 20090293946
Local heterostructure contacts
patent-application, December 2009
- Scherff, Maximilian; Fahrner, Wolfgang Rainer
- US Patent Application 12/310666; 20090317934
Process for Structuring Silicon
patent-application, April 2010
- Buchine, Brent A.; Modawar, Faris; Black, Marcie R.
- US Patent Application 12/576490; 20100092888
Method for Producing an Emitter Structure and Emitter Structures Resulting Therefrom
patent-application, June 2010
- Van Nieuwenhuysen, Kris; Duerinckx, Filip
- US Patent Application 12/608761; 20100139763
Applications of laser-processed substrate for molecular diagnostics
patent-application, July 2010
- Ebstein, Steven M.
- US Patent Application 12/584574; 20100165336
Conversion of Carbon Dioxide to Organic Products
patent-application, July 2010
- Bocarsly, Andrew B.; Cole, Emily Barton
- US Patent Document 12/696840; 20100187123
Metal-Assisted Chemical Etching of Substrates
patent-application, September 2010
- Hildreth, Owen; Wong, C. P.; Xiu, Yonghao
- US Patent Application 12/751080; 20100248449
Solar Cell and Method of Manufacturing the Same
patent-application, October 2010
- Ko, Jihoon; Kang, Juwan; Kim, Jonghwan
- US Patent Application 12/559542; 20100258177
Method for preparing substrate with periodical structure
patent-application, October 2010
- Li, Chung-Hua; Lee, Sheng-Ru
- US Patent Application 12/662543; 20100270263
Silicon substrate with periodical structure
patent-application, October 2010
- Li, Chung-Hua; Lee, Sheng-Ru
- US Patent Application 12/662542; 20100270650
Microscreen for filtering particles in microfluidics applications and production thereof
patent-application, November 2010
- Feyh, Ando
- US Patent Application 12/308303; 20100296986
Methods of forming a multi-doped junction with silicon-containing particles
patent-application, January 2011
- Scardera, Giuseppe; Kan, Shihai; Kelman, Maxim
- US Patent Application 12/656710; 20110003465
High-Productivity Porous Semiconductor Manufacturing Equipment
patent-application, February 2011
- Kamian, George D.; Nag, Somnath; Tamilman, Subbu
- US Patent Application 12/774667; 20110030610
Solar Cells with Textured Surfaces
patent-application, February 2011
- Sachs, Emanuel M.; Bredt, James F.
- US Patent Application 12/526438; 20110045627
Method of fabricating solar cell
patent-application, June 2011
- Lin, Ching-Hsi; Huang, Chien-Rong; Dimitrov, Dimitre Zahariev
- US Patent Application 12/658663; 20110143484
Epitaxial Structures, Methods of Forming the Same, and Devices Including the Same
patent-application, October 2011
- Rockenberger, Joerg; Zurcher, Fabio; Takashima, Mao
- US Patent Application 13/081257; 20110240997
Forming High Efficiency Silicon Solar Cells Using Density-Graded Anti-reflection Surfaces
patent-application, December 2011
- Yuan, Hao-Chih; Branz, Howard M.; Page, Matthew R.
- US Patent Application 12/797590; 20110303265
Nano/Micro-Structure and Fabrication Method Thereof
patent-application, December 2011
- Tsao, Chia-Wen; Chang, Chia-Pin; Chen, Wen-Yih
- US Patent Application 13/018444; 20110316145
Solae Energy Systems
patent-application, February 2012
- Branz, Howard M.; Vandermeulen, Peter
- US Patent Application 12/844212; 20120024365
Method of Forming Micro-Pore Structures or Trench Structures on Surface of Silicon Wafer Substrate
patent-application, April 2012
- Chien, Ray; Lin, Yu-Mei; Kao, Wei-Che
- US Patent Application 13/228597; 20120088372
Anti-Reflective Nanoporous Silicon for Efficient Hydrogen Production
patent-application, May 2012
- Oh, Jihun; Branz, Howard
- US Patent Application 13/284861; 20120103825
Copper-Assisted, Anti-Reflection Etching of Silicon Surfaces
patent-application, July 2012
- Toor, Fatima; Branz, Howard
- US Patent Application 13/423745; 20120178204
Texturing Surface of Light Absorbing Substrate
patent-application, September 2012
- Zhang, Jun-Ying
- US Patent Application 13/509504; 20120225517
Method of Forming an Array of High Aspect Ration Semiconductor Nanostructures
patent-application, February 2013
- Li, Xiuling; Fang, Nicholas X.; Ferreira, Placid M.
- US Patent Application 13/503123; 20130052762
Nanostructured black silicon and the optical reflectance of graded-density surfaces
journal, June 2009
- Branz, Howard M.; Yost, Vernon E.; Ward, Scott
- Applied Physics Letters, Vol. 94, Issue 23
Efficient black silicon solar cell with a density-graded nanoporous surface: Optical properties, performance limitations, and design rules
journal, September 2009
- Yuan, Hao-Chih; Yost, Vernon E.; Page, Matthew R.
- Applied Physics Letters, Vol. 95, Issue 12
Multi-scale surface texture to improve blue response of nanoporous black silicon solar cells
journal, September 2011
- Toor, Fatima; Branz, Howard M.; Page, Matthew R.
- Applied Physics Letters, Vol. 99, Issue 10
Extremely Superhydrophobic Surfaces with Micro- and Nanostructures Fabricated by Copper Catalytic Etching
journal, January 2011
- Lee, Jung-Pil; Choi, Sinho; Park, Soojin
- Langmuir, Vol. 27, Issue 2
Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles
journal, February 2006
- Peng, K. Q.; Hu, J. J.; Yan, Y. J.
- Advanced Functional Materials, Vol. 16, Issue 3, p. 387-394
Patterning of various silicon structures via polymer lithography and catalytic chemical etching
journal, May 2011
- Lee, Jung-Pil; Bang, Byoung Man; Choi, Sinho
- Nanotechnology, Vol. 22, Issue 27
Texturization of multicrystalline silicon wafers for solar cells by chemical treatment using metallic catalyst
journal, January 2006
- Tsujino, K.; Matsumura, M.; Nishimoto, Y.
- Solar Energy Materials and Solar Cells, Vol. 90, Issue 1, p. 100-110
Antireflection subwavelength structure of silicon surface formed by wet process using catalysis of single nano-sized gold particle
journal, August 2008
- Nishioka, Kensuke; Horita, Susumu; Ohdaira, Keisuke
- Solar Energy Materials and Solar Cells, Vol. 92, Issue 8, p. 919-922
10 μm minority-carrier diffusion lengths in Si wires synthesized by Cu-catalyzed vapor-liquid-solid growth
journal, October 2009
- Putnam, Morgan C.; Turner-Evans, Daniel B.; Kelzenberg, Michael D.
- Applied Physics Letters, Vol. 95, Issue 16, 163116
>16% thin-film epitaxial silicon solar cells on 70-cm 2 area with 30-µm active layer, porous silicon back reflector, and Cu-based top-contact metallization : Silicon solar cells, silicon reflector, metallization
journal, September 2011
- Kuzma-Filipek, Izabela; Dross, Frederic; Baert, Kris
- Progress in Photovoltaics: Research and Applications, Vol. 20, Issue 3
Nano-sized Taper Structure Formed by Wet Process Using Catalysis of Gold Nanoparticle
journal, January 2007
- Nishioka, Kensuke; Horita, Susumu
- MRS Proceedings, Vol. 1059
Black multi-crystalline silicon solar cells
journal, March 2007
- Koynov, Svetoslav; Brandt, Martin S.; Stutzmann, Martin
- physica status solidi (RRL) – Rapid Research Letters, Vol. 1, Issue 2
Black nonreflecting silicon surfaces for solar cells
journal, May 2006
- Koynov, Svetoslav; Brandt, Martin S.; Stutzmann, Martin
- Applied Physics Letters, Vol. 88, Issue 20
Surface texturing for silicon solar cells using reactive ion etching technique
conference, January 2002
- Kumaravelu, G.; Alkaisi, M. M.; Bittar, A.
- Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference 2002, Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002.
Porous silicon in solar cells: A review and a description of its application as an AR coating
journal, April 1995
- Menna, P.; Di Francia, G.; La Ferrara, V.
- Solar Energy Materials and Solar Cells, Vol. 37, Issue 1, p. 13-24
Hydrogen generation from photoelectrochemical water splitting based on nanomaterials
journal, September 2009
- Li, Y.; Zhang, J. Z.
- Laser & Photonics Reviews, Vol. 4, Issue 4
Wide-Angle Antireflection Effect of Subwavelength Structures for Solar Cells
journal, June 2007
- Sai, Hitoshi; Fujii, Homare; Arafune, Koji
- Japanese Journal of Applied Physics, Vol. 46, Issue 6A
Optical reflectance and transmission of a textured surface
journal, August 1977
- Stephens, Richard B.; Cody, George D.
- Thin Solid Films, Vol. 45, Issue 1, p. 19-29
Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff
journal, January 2003
- Yu, Zhaoning; Gao, He; Wu, Wei
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6
Metal-assisted chemical etching of silicon in HF–H2O2
journal, July 2008
- Chartier, C.; Bastide, S.; Lévy-Clément, C.
- Electrochimica Acta, Vol. 53, Issue 17, p. 5509-5516
Design and characterization of a robust photoelectrochemical device to generate hydrogen using solar water splitting
journal, September 2006
- Kelly, Nelson A.; Gibson, Thomas L.
- International Journal of Hydrogen Energy, Vol. 31, Issue 12, p. 1658-1673
Photoelectrochemical Behavior of n-Type Porous-Si Electrodes
journal, July 1986
- Koshida, Nobuyoshi; Koyama, Hideki; Kiuchi, Yuji
- Japanese Journal of Applied Physics, Vol. 25, Issue Part 1, No. 7
Superhydrophobic and Low Light Reflectivity Silicon Surfaces Fabricated by Hierarchical Etching
journal, September 2008
- Xiu, Yonghao; Zhang, Shu; Yelundur, Vijay
- Langmuir, Vol. 24, Issue 18
Black silicon layer formation for application in solar cells
journal, November 2006
- Yoo, J. S.; Parm, I. O.; Gangopadhyay, U.
- Solar Energy Materials and Solar Cells, Vol. 90, Issue 18-19, p. 3085-3093