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Title: High-precision micro/nano-scale machining system

Abstract

A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.

Inventors:
; ;
Issue Date:
Research Org.:
University of Illinois, Urbana, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1150741
Patent Number(s):
8,806,995
Application Number:
12/877,863
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
DOE Contract Number:  
FG02-07ER46453; FG02-04ER46471
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Kapoor, Shiv G., Bourne, Keith Allen, and DeVor, Richard E. High-precision micro/nano-scale machining system. United States: N. p., 2014. Web.
Kapoor, Shiv G., Bourne, Keith Allen, & DeVor, Richard E. High-precision micro/nano-scale machining system. United States.
Kapoor, Shiv G., Bourne, Keith Allen, and DeVor, Richard E. Tue . "High-precision micro/nano-scale machining system". United States. https://www.osti.gov/servlets/purl/1150741.
@article{osti_1150741,
title = {High-precision micro/nano-scale machining system},
author = {Kapoor, Shiv G. and Bourne, Keith Allen and DeVor, Richard E.},
abstractNote = {A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {8}
}

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