High-precision micro/nano-scale machining system
Abstract
A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Illinois at Urbana-Champaign, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1150741
- Patent Number(s):
- 8806995
- Application Number:
- 12/877,863
- Assignee:
- The Board of Trustees of the University of Illinois (Urbana, IL)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B26 - HAND CUTTING TOOLS B26D - CUTTING
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- FG02-07ER46453; FG02-04ER46471
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Kapoor, Shiv G., Bourne, Keith Allen, and DeVor, Richard E. High-precision micro/nano-scale machining system. United States: N. p., 2014.
Web.
Kapoor, Shiv G., Bourne, Keith Allen, & DeVor, Richard E. High-precision micro/nano-scale machining system. United States.
Kapoor, Shiv G., Bourne, Keith Allen, and DeVor, Richard E. Tue .
"High-precision micro/nano-scale machining system". United States. https://www.osti.gov/servlets/purl/1150741.
@article{osti_1150741,
title = {High-precision micro/nano-scale machining system},
author = {Kapoor, Shiv G. and Bourne, Keith Allen and DeVor, Richard E.},
abstractNote = {A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {8}
}
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