High-precision micro/nano-scale machining system

Kapoor, Shiv G.; Bourne, Keith Allen; DeVor, Richard E.

Title: High-precision micro/nano-scale machining system

Abstract

A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.

Inventors:: Kapoor, Shiv G.; Bourne, Keith Allen; DeVor, Richard E.

Issue Date:: 2014-08-19

Research Org.:: Univ. of Illinois at Urbana-Champaign, IL (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1150741

Patent Number(s):: 8806995

Application Number:: 12/877,863

Assignee:: The Board of Trustees of the University of Illinois (Urbana, IL)

Patent Classifications (CPCs):: Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

B - PERFORMING OPERATIONS B26 - HAND CUTTING TOOLS B26D - CUTTING

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Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T82/2502 - with program control
Y10T83/929 - Tool or tool with support
Y10T83/0304 - Grooving

B - PERFORMING OPERATIONS B26 - HAND CUTTING TOOLS B26D - CUTTING
B26D2001/006 - {the cutting blade having a special shape, e.g. a special outline, serrations}
B26D1/0006 - {Cutting members therefor}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T82/10 - Process of turning

B - PERFORMING OPERATIONS B26 - HAND CUTTING TOOLS B26D - CUTTING
B26D3/08 - Making a superficial cut in the surface of the work without removal of material, e.g. scoring, incising

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T82/2535 - Electrical type

B - PERFORMING OPERATIONS B26 - HAND CUTTING TOOLS B26D - CUTTING
B26D2001/0053 - {having a special cutting edge section or blade section}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T82/2585 - Tool rest

B - PERFORMING OPERATIONS B26 - HAND CUTTING TOOLS B26D - CUTTING
B26D2001/002 - {Materials or surface treatments therefor, e.g. composite materials}
B26D3/06 - Grooving involving removal of material from the surface of the work

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DOE Contract Number:: FG02-07ER46453; FG02-04ER46471

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Kapoor, Shiv G., Bourne, Keith Allen, and DeVor, Richard E. High-precision micro/nano-scale machining system.  United States: N. p., 2014. 
        Web.

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                    Kapoor, Shiv G., Bourne, Keith Allen, & DeVor, Richard E. High-precision micro/nano-scale machining system.  United States.

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                    Kapoor, Shiv G., Bourne, Keith Allen, and DeVor, Richard E. Tue .  
        "High-precision micro/nano-scale machining system".  United States.  https://www.osti.gov/servlets/purl/1150741.

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@article{osti_1150741,

  title        = {High-precision micro/nano-scale machining system},

  author       = {Kapoor, Shiv G. and Bourne, Keith Allen and DeVor, Richard E.},

  abstractNote = {A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2014},

  month        = {8}

}

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Works referenced in this record:

Microgrooving and microthreading tools for fabricating curvilinear features
journal, October 2000

Adams, D. P.; Vasile, M. J.; Krishnan, A. S. M.
Precision Engineering, Vol. 24, Issue 4, p. 347-356
https://doi.org/10.1016/S0141-6359(00)00045-3

Machining characterization of the nano-lithography process using atomic force microscopy
journal, August 2000

Fang, Te-Hua; Weng, Cheng-I; Chang, Jee-Gong
Nanotechnology, Vol. 11, Issue 3
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Mechanical lithography using a single point diamond machining
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Goss, S. H.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 3
https://doi.org/10.1116/1.589962

Micro-machining using 1.55μm band fiber pulse laser with 10kW peak power
conference, February 2012

Maeda, Junya; Sawada, Hisashi; Yoshida, Minoru
SPIE Proceedings
https://doi.org/10.1117/12.596380

Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components
journal, January 2003

Picard, Y. N.; Adams, D. P.; Vasile, M. J.
Precision Engineering, Vol. 27, Issue 1, p. 59-69
https://doi.org/10.1016/S0141-6359(02)00188-5

Atomic Force Microscopy-Induced Nanopatterning of Si(100) Surfaces
journal, January 2001

Santinacci, L.; Djenizian, T.; Schmuki, P.
Journal of The Electrochemical Society, Vol. 148, Issue 9
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Nanoscale layer removal of metal surfaces by scanning probe microscope scratching
journal, May 1995

Sumomogi, T.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 13, Issue 3
https://doi.org/10.1116/1.588247

Nanofabrication by scanning probe microscope lithography: A review
journal, January 2005

Tseng, Ampere A.; Notargiacomo, Andrea; Chen, T. P.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 3
https://doi.org/10.1116/1.1926293

Scanning probe tips formed by focused ion beams
journal, September 1991

Vasile, M. J.; Grigg, D. A.; Griffith, J. E.
Review of Scientific Instruments, Vol. 62, Issue 9
https://doi.org/10.1063/1.1142334

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Similar Records

Title: High-precision micro/nano-scale machining system

Abstract

Citation Formats

Microgrooving and microthreading tools for fabricating curvilinear features journal, October 2000

Machining characterization of the nano-lithography process using atomic force microscopy journal, August 2000

Mechanical lithography using a single point diamond machining journal, May 1998

Micro-machining using 1.55μm band fiber pulse laser with 10kW peak power conference, February 2012

Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components journal, January 2003

Atomic Force Microscopy-Induced Nanopatterning of Si(100) Surfaces journal, January 2001

Nanoscale layer removal of metal surfaces by scanning probe microscope scratching journal, May 1995

Nanofabrication by scanning probe microscope lithography: A review journal, January 2005

Scanning probe tips formed by focused ion beams journal, September 1991

Microgrooving and microthreading tools for fabricating curvilinear features
journal, October 2000

Machining characterization of the nano-lithography process using atomic force microscopy
journal, August 2000

Mechanical lithography using a single point diamond machining
journal, May 1998

Micro-machining using 1.55μm band fiber pulse laser with 10kW peak power
conference, February 2012

Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components
journal, January 2003

Atomic Force Microscopy-Induced Nanopatterning of Si(100) Surfaces
journal, January 2001

Nanoscale layer removal of metal surfaces by scanning probe microscope scratching
journal, May 1995

Nanofabrication by scanning probe microscope lithography: A review
journal, January 2005

Scanning probe tips formed by focused ion beams
journal, September 1991