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Title: High-precision micro/nano-scale machining system

Abstract

A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.

Inventors:
; ;
Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1150741
Patent Number(s):
8806995
Application Number:
12/877,863
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
B - PERFORMING OPERATIONS B26 - HAND CUTTING TOOLS B26D - CUTTING
DOE Contract Number:  
FG02-07ER46453; FG02-04ER46471
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Kapoor, Shiv G., Bourne, Keith Allen, and DeVor, Richard E. High-precision micro/nano-scale machining system. United States: N. p., 2014. Web.
Kapoor, Shiv G., Bourne, Keith Allen, & DeVor, Richard E. High-precision micro/nano-scale machining system. United States.
Kapoor, Shiv G., Bourne, Keith Allen, and DeVor, Richard E. Tue . "High-precision micro/nano-scale machining system". United States. https://www.osti.gov/servlets/purl/1150741.
@article{osti_1150741,
title = {High-precision micro/nano-scale machining system},
author = {Kapoor, Shiv G. and Bourne, Keith Allen and DeVor, Richard E.},
abstractNote = {A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {8}
}

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Works referenced in this record:

Microgrooving and microthreading tools for fabricating curvilinear features
journal, October 2000


Machining characterization of the nano-lithography process using atomic force microscopy
journal, August 2000


Mechanical lithography using a single point diamond machining
journal, May 1998


Micro-machining using 1.55μm band fiber pulse laser with 10kW peak power
conference, February 2012


Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components
journal, January 2003


Atomic Force Microscopy-Induced Nanopatterning of Si(100) Surfaces
journal, January 2001


Nanoscale layer removal of metal surfaces by scanning probe microscope scratching
journal, May 1995


Nanofabrication by scanning probe microscope lithography: A review
journal, January 2005

  • Tseng, Ampere A.; Notargiacomo, Andrea; Chen, T. P.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 3
  • https://doi.org/10.1116/1.1926293

Scanning probe tips formed by focused ion beams
journal, September 1991