Microcantilever-based gas sensor employing two simultaneous physical sensing modes

Loui, Albert; Sirbuly, Donald J; Elhadj, Selim; McCall, Scott K; Hart, Bradley R; Ratto, Timothy V

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Title: Microcantilever-based gas sensor employing two simultaneous physical sensing modes

Abstract

According to one embodiment, a system for detecting and identifying gases includes a piezoresistive microcantilever transducer, wherein dissipation of heat from the piezoresistive microcantilever into one or more gases is measured by changes in an electrical resistance of the piezoresistor, a vibrating microcantilever transducer, wherein shifts are measured in resonant frequency of the vibrating microcantilever due to viscous damping thereof by the one or more gases, and a subsystem for correlating the measured resistance changes and the resonant frequency shifts to the one or more gases. In another embodiment, a method for detecting and identifying one or more gases includes determining dissipation of heat from a microcantilever into one or more gases, and determining shifts in resonant frequency of the microcantilever due to viscous damping thereof by the one or more gases. Other systems, methods, and computer program products are also described according to more embodiments.

Inventors:: Loui, Albert; Sirbuly, Donald J; Elhadj, Selim; McCall, Scott K; Hart, Bradley R; Ratto, Timothy V

Issue Date:: 2014-06-24

Research Org.:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1134683

Patent Number(s):: 8762075

Application Number:: 12/852,416

Assignee:: Lawrence Livermore National Security, LLC (Livermore, CA)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

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G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N2291/0215 - Mixtures of three or more gases, e.g. air
G01N25/18 - by investigating thermal conductivity
G01N29/022 - {Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
G01N29/036 - by measuring frequency or resonance of acoustic waves

Show less

DOE Contract Number:: AC52-07NA27344

Resource Type:: Patent

Resource Relation:: Patent File Date: 2010 Aug 06

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION

Citation Formats


                    Loui, Albert, Sirbuly, Donald J, Elhadj, Selim, McCall, Scott K, Hart, Bradley R, and Ratto, Timothy V. Microcantilever-based gas sensor employing two simultaneous physical sensing modes.  United States: N. p., 2014. 
        Web.

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                    Loui, Albert, Sirbuly, Donald J, Elhadj, Selim, McCall, Scott K, Hart, Bradley R, & Ratto, Timothy V. Microcantilever-based gas sensor employing two simultaneous physical sensing modes.  United States.

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                    Loui, Albert, Sirbuly, Donald J, Elhadj, Selim, McCall, Scott K, Hart, Bradley R, and Ratto, Timothy V. Tue .  
        "Microcantilever-based gas sensor employing two simultaneous physical sensing modes".  United States.  https://www.osti.gov/servlets/purl/1134683.

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@article{osti_1134683,

  title        = {Microcantilever-based gas sensor employing two simultaneous physical sensing modes},

  author       = {Loui, Albert and Sirbuly, Donald J and Elhadj, Selim and McCall, Scott K and Hart, Bradley R and Ratto, Timothy V},

  abstractNote = {According to one embodiment, a system for detecting and identifying gases includes a piezoresistive microcantilever transducer, wherein dissipation of heat from the piezoresistive microcantilever into one or more gases is measured by changes in an electrical resistance of the piezoresistor, a vibrating microcantilever transducer, wherein shifts are measured in resonant frequency of the vibrating microcantilever due to viscous damping thereof by the one or more gases, and a subsystem for correlating the measured resistance changes and the resonant frequency shifts to the one or more gases. In another embodiment, a method for detecting and identifying one or more gases includes determining dissipation of heat from a microcantilever into one or more gases, and determining shifts in resonant frequency of the microcantilever due to viscous damping thereof by the one or more gases. Other systems, methods, and computer program products are also described according to more embodiments.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2014},

  month        = {6}

}

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Works referenced in this record:

Electric circuits
patent, March 1978

Johnston, James S.
US Patent Document 4,080,821
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4080821

Multicomponent thermal conductivity analyzer
patent, August 1979

Jackson, Milton L.
US Patent Document 4,164,862
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4164862

Apparatus for detecting a residual quantity of toner
patent, February 1982

Kuru, Hiroshi; Akiyama, Mitsuo; Ikemoto, Isao
US Patent Document 4,314,242
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4314242

Electronic nerve agent detector
patent, October 1985

Kolesar, Jr., Edward S.
US Patent Document 4,549,427
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4549427

Composition sensor with minimal non-linear thermal gradients
patent, November 1987

Johnson, Robert G.
US Patent Document 4,706,061
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4706061

Apparatus for monitoring impurities in a gas stream
patent, August 1994

DiLeo, Anthony; Snow, James T.; Cote, Daniel
US Patent Document 5,339,675
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5339675

Atomic force microscope having cantilever with piezoresistive deflection sensor
patent, September 1994

Albrecht, Thomas R.; Tortonese, Marco; Barrett, Robert
US Patent Document 5,345,815
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5345815

Microbar sensor
patent, August 1995

Wachter, Eric A.; Thundat, Thomas G.
US Patent Document 5,445,008
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5445008

Microcantilever sensor
patent, February 1998

Thundat, Thomas G.; Wachter, Eric A.
US Patent Document 5,719,324
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5719324

Scanning probe microscope for use in fluids
patent, May 1998

Lindsay, Stuart; Jing, Tianwei
US Patent Document 5,750,989
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5750989

Thermal conductivity measuring device
patent, May 1998

Muto, Hiroyuki; Kajio, Yasuhiro; Kamiunten, Shoji
US Patent Document 5,756,878
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5756878

Gas analysis or leak detection process and device for same
patent, May 1998

Stockli, Armin; Walchli, Urs; Bosch, Martin
US Patent Document 5,756,881
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5756881

Microcantilever detector for explosives
patent, June 1999

Thundat, Thomas G.
US Patent Document 5,918,263
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5918263

Method and apparatus for sensing the natural frequency of a cantilevered body
patent, March 2000

Duncan, Michael G.
US Patent Document 6,041,642
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6041642

Thermoelastic self-actuation in piezoresistive resonators
patent, July 2009

Bargatin, Igor; Arlett, Jessica L.; Roukes, Michael L.
US Patent Document 7,555,938
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7555938

Systems and methods for monitoring solids using mechanical resonator
patent, December 2009

Burdett, Ian D.; Lynn, Timothy D.; Kolosov, Oleg
US Patent Document 7,634,937
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7634937

Method and apparatus for compressing a gas to a high pressure
patent-application, August 2005

Ursan, Mihai; Gram, Anker; Gavril, Gabriel
US Patent Application 10/508617; 20050180864
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050180864

Liquid cell and passivated probe for atomic force microscopy and chemical sensing
patent-application, September 2005

Adams, Jesse D.; Rogers, Benjamin S.; Sulchek, Todd A.
US Patent Application 11/089559; 20050199047
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050199047

Cantilevered Probe Detector With Piezoelectric Element
patent-application, April 2008

Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C.
US Patent Application 11/576443; 20080085212
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080085212

Calibration Systems and Methods for Tracer Gas Leak Detection
patent-application, April 2010

Flynn, Kevin; Dodai, Charles; Geist, J. Daniel
US Patent Application 12/254279; 20100095745
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100095745

Thermal Gas Sensor
patent-application, May 2010

De Coulon, Yves; Chetelat, Olivier; Brodard, Marc
US Patent Application 12/527523; 20100116024
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100116024

Fluid Probe
patent-application, December 2011

Djakov, Vladislav; Huq, Ejaz; Vernon, Paul
US Patent Application 13/218052; 20110302996
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110302996

Viscous damping of microresonators for gas composition analysis
journal, April 2006

Xu, Yang; Lin, J. -T.; Alphenaar, Bruce W.
Applied Physics Letters, Vol. 88, Issue 14
https://doi.org/10.1063/1.2193347

Modeling and performance of uncoated microcantilever-based chemical sensors
journal, January 2010

Tétin, Sébastien; Caillard, Benjamin; Ménil, Francis
Sensors and Actuators B: Chemical, Vol. 143, Issue 2, p. 555-560
https://doi.org/10.1016/j.snb.2009.09.062

Piezoelectric Sorption Detector.
journal, August 1964

King, W. H.
Analytical Chemistry, Vol. 36, Issue 9
https://doi.org/10.1021/ac60215a012

Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry
journal, January 1992

Blom, F. R.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 10, Issue 1
https://doi.org/10.1116/1.586300

Acoustic Wave Microsensor Arrays for Vapor Sensing
journal, July 2000

Grate, Jay W.
Chemical Reviews, Vol. 100, Issue 7
https://doi.org/10.1021/cr980094j

Explosion-proof monitoring of hydrocarbons by mechanically stabilised, integrable calorimetric microsensors
journal, October 2003

Dücso, C.; Ádám, M.; Fürjes, P.
Sensors and Actuators B: Chemical, Vol. 95, Issue 1-3, p. 189-194
https://doi.org/10.1016/S0925-4005(03)00415-5

Dynamic thermal conductivity sensor for gas detection
journal, March 2004

Tardy, Pascal; Coulon, Jean-René; Lucat, Claude
Sensors and Actuators B: Chemical, Vol. 98, Issue 1, p. 63-68
https://doi.org/10.1016/j.snb.2003.09.019

Thermal conduction between a heated microcantilever and a surrounding air environment
journal, June 2009

Kim, Kyoung Joon; King, William P.
Applied Thermal Engineering, Vol. 29, Issue 8-9, p. 1631-1641
https://doi.org/10.1016/j.applthermaleng.2008.07.019

Detection and discrimination of pure gases and binary mixtures using a dual-modality microcantilever sensor
journal, April 2010

Loui, A.; Sirbuly, D. J.; Elhadj, S.
Sensors and Actuators A: Physical, Vol. 159, Issue 1, p. 58-63
https://doi.org/10.1016/j.sna.2010.03.004

An analytic model of thermal drift in piezoresistive microcantilever sensors
journal, March 2010

Loui, A.; Elhadj, S.; Sirbuly, D. J.
Journal of Applied Physics, Vol. 107, Issue 5
https://doi.org/10.1063/1.3326972

Thermal and gas-sensing properties of a micromachined thermal conductivity sensor for the detection of hydrogen in automotive applications
journal, April 2002

Simon, Isolde; Arndt, Michael
Sensors and Actuators A: Physical, Vol. 97-98, p. 104-108
https://doi.org/10.1016/S0924-4247(01)00825-1

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Similar Records

Title: Microcantilever-based gas sensor employing two simultaneous physical sensing modes

Abstract

Citation Formats

Electric circuits patent, March 1978

Multicomponent thermal conductivity analyzer patent, August 1979

Apparatus for detecting a residual quantity of toner patent, February 1982

Electronic nerve agent detector patent, October 1985

Composition sensor with minimal non-linear thermal gradients patent, November 1987

Apparatus for monitoring impurities in a gas stream patent, August 1994

Atomic force microscope having cantilever with piezoresistive deflection sensor patent, September 1994

Microbar sensor patent, August 1995

Microcantilever sensor patent, February 1998

Scanning probe microscope for use in fluids patent, May 1998

Thermal conductivity measuring device patent, May 1998

Gas analysis or leak detection process and device for same patent, May 1998

Microcantilever detector for explosives patent, June 1999

Method and apparatus for sensing the natural frequency of a cantilevered body patent, March 2000

Thermoelastic self-actuation in piezoresistive resonators patent, July 2009

Systems and methods for monitoring solids using mechanical resonator patent, December 2009

Method and apparatus for compressing a gas to a high pressure patent-application, August 2005

Liquid cell and passivated probe for atomic force microscopy and chemical sensing patent-application, September 2005

Cantilevered Probe Detector With Piezoelectric Element patent-application, April 2008

Calibration Systems and Methods for Tracer Gas Leak Detection patent-application, April 2010

Thermal Gas Sensor patent-application, May 2010

Fluid Probe patent-application, December 2011

Viscous damping of microresonators for gas composition analysis journal, April 2006

Modeling and performance of uncoated microcantilever-based chemical sensors journal, January 2010

Piezoelectric Sorption Detector. journal, August 1964

Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry journal, January 1992

Acoustic Wave Microsensor Arrays for Vapor Sensing journal, July 2000

Explosion-proof monitoring of hydrocarbons by mechanically stabilised, integrable calorimetric microsensors journal, October 2003

Dynamic thermal conductivity sensor for gas detection journal, March 2004

Thermal conduction between a heated microcantilever and a surrounding air environment journal, June 2009

Detection and discrimination of pure gases and binary mixtures using a dual-modality microcantilever sensor journal, April 2010

An analytic model of thermal drift in piezoresistive microcantilever sensors journal, March 2010

Thermal and gas-sensing properties of a micromachined thermal conductivity sensor for the detection of hydrogen in automotive applications journal, April 2002

Electric circuits
patent, March 1978

Multicomponent thermal conductivity analyzer
patent, August 1979

Apparatus for detecting a residual quantity of toner
patent, February 1982

Electronic nerve agent detector
patent, October 1985

Composition sensor with minimal non-linear thermal gradients
patent, November 1987

Apparatus for monitoring impurities in a gas stream
patent, August 1994

Atomic force microscope having cantilever with piezoresistive deflection sensor
patent, September 1994

Microbar sensor
patent, August 1995

Microcantilever sensor
patent, February 1998

Scanning probe microscope for use in fluids
patent, May 1998

Thermal conductivity measuring device
patent, May 1998

Gas analysis or leak detection process and device for same
patent, May 1998

Microcantilever detector for explosives
patent, June 1999

Method and apparatus for sensing the natural frequency of a cantilevered body
patent, March 2000

Thermoelastic self-actuation in piezoresistive resonators
patent, July 2009

Systems and methods for monitoring solids using mechanical resonator
patent, December 2009

Method and apparatus for compressing a gas to a high pressure
patent-application, August 2005

Liquid cell and passivated probe for atomic force microscopy and chemical sensing
patent-application, September 2005

Cantilevered Probe Detector With Piezoelectric Element
patent-application, April 2008

Calibration Systems and Methods for Tracer Gas Leak Detection
patent-application, April 2010

Thermal Gas Sensor
patent-application, May 2010

Fluid Probe
patent-application, December 2011

Viscous damping of microresonators for gas composition analysis
journal, April 2006

Modeling and performance of uncoated microcantilever-based chemical sensors
journal, January 2010

Piezoelectric Sorption Detector.
journal, August 1964

Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry
journal, January 1992

Acoustic Wave Microsensor Arrays for Vapor Sensing
journal, July 2000

Explosion-proof monitoring of hydrocarbons by mechanically stabilised, integrable calorimetric microsensors
journal, October 2003

Dynamic thermal conductivity sensor for gas detection
journal, March 2004

Thermal conduction between a heated microcantilever and a surrounding air environment
journal, June 2009

Detection and discrimination of pure gases and binary mixtures using a dual-modality microcantilever sensor
journal, April 2010

An analytic model of thermal drift in piezoresistive microcantilever sensors
journal, March 2010

Thermal and gas-sensing properties of a micromachined thermal conductivity sensor for the detection of hydrogen in automotive applications
journal, April 2002