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Title: Stretchable form of single crystal silicon for high performance electronics on rubber substrates

Abstract

The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.

Inventors:
; ; ;
Issue Date:
Research Org.:
University of Illinois, Urbana, IL (USA)
Sponsoring Org.:
USDOE
OSTI Identifier:
1134327
Patent Number(s):
8754396
Application Number:
13/441,618
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05K - PRINTED CIRCUITS
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Resource Relation:
Patent File Date: 2012 Apr 06
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Citation Formats

Rogers, John A., Khang, Dahl-Young, Sun, Yugang, and Menard, Etienne. Stretchable form of single crystal silicon for high performance electronics on rubber substrates. United States: N. p., 2014. Web.
Rogers, John A., Khang, Dahl-Young, Sun, Yugang, & Menard, Etienne. Stretchable form of single crystal silicon for high performance electronics on rubber substrates. United States.
Rogers, John A., Khang, Dahl-Young, Sun, Yugang, and Menard, Etienne. Tue . "Stretchable form of single crystal silicon for high performance electronics on rubber substrates". United States. https://www.osti.gov/servlets/purl/1134327.
@article{osti_1134327,
title = {Stretchable form of single crystal silicon for high performance electronics on rubber substrates},
author = {Rogers, John A. and Khang, Dahl-Young and Sun, Yugang and Menard, Etienne},
abstractNote = {The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {6}
}

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ZnO nanobelts grown on Si substrate
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Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment
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The Incredible Shrinking Circuit
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High-Performance Carbon Nanotube Field-Effect Transistor With Tunable Polarities
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Interfacial Chemistries for Nanoscale Transfer Printing
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Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination
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Electrical Contacts to Molecular Layers by Nanotransfer Printing
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Thermal conductivity of PET/(LDPE/AI) composites determined by MDSC
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Electronic materials: Buckling down for flexible electronics
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One-dimensional hole gas in germanium/silicon nanowire heterostructures
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Nanowire Transistor Performance Limits and Applications
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An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors
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Single-Crystal CdSe Nanosaws
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Diamond-structured photonic crystals
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Fully elastic interconnects on nanopatterned elastomeric substrates
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Controlled growth of tetrapod-branched inorganic nanocrystals
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Architectonic Quantum Dot Solids
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Conducting elastomer surface texturing: a path to electrode spotting
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Nanowire Arrays Defined by Nanoimprint Lithography
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Template Synthesis of Electronically Conductive Polymer Nanostructures
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Large Photoresponsivity in High-Mobility Single-Crystal Organic Field-Effect Phototransistors
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Fabrication of Ordered Diamond/metal Nanocomposite Structures
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An improved GaAs device model for the simulation of analog integrated circuit
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High-Performance Nanowire Electronics and Photonics on Glass and Plastic Substrates
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High-Performance Nanowire Electronics and Photonics and Nanoscale Patterning on Flexible Plastic Substrates
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Diffusivity and Solubility of Si in the Al Metallization of Integrated Circuits
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Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps
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Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films
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Transfer printing by kinetic control of adhesion to an elastomeric stamp
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Stress focusing for controlled fracture in microelectromechanical systems
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Ultrahigh-Density Nanowire Lattices and Circuits
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A printable form of silicon for high performance thin film transistors on plastic substrates
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High-Performance n- and p-Type Single-Crystal Organic Transistors with Free-Space Gate Dielectrics
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Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing
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Bendable single crystal silicon thin film transistors formed by printing on plastic substrates
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Micromachining of three-dimensional GaAs membrane structures using high-energy nitrogen implantation
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Printing meets lithography: Soft approaches to high-resolution patterning
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Direct printing of polymer microstructures on flat and spherical surfaces using a letterpress technique
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Colloidal nanocrystal heterostructures with linear and branched topology
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Plastic Electronics and Their Packaging Technologies
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Emerging Methods for Micro- and Nanofabrication
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Electrically Induced Optical Emission from a Carbon Nanotube FET
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AlGaN/GaN HEMTs-an overview of device operation and applications
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High-mobility ultrathin semiconducting films prepared by spin coating
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Ink-Jet Printing of Binders for Ceramic Components
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Individually Suspended Single-Walled Carbon Nanotubes in Various Surfactants
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A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires
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A New Etching Solution System, H3 PO4- H2O2- H2O, for GaAs and Its Kinetics
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High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes
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Mesoscopic self‐assembly of gold islands on diblock‐copolymer films
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Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM
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Nanotubes of the disulfides of groups 4 and 5 metals
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Amorphous silicon detector and thin film transistor technology for large-area imaging of X-rays
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Amorphous silicon technology for large area digital X-ray and optical imaging
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Introduction to Organic Thin Film Transistors and Design of n-Channel Organic Semiconductors
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Luminescence Photophysics in Semiconductor Nanocrystals
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New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region
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Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
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Electric Field Effect in Atomically Thin Carbon Films
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Band Gap Fluorescence from Individual Single-Walled Carbon Nanotubes
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Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale
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Improved Pattern Transfer in Soft Lithography Using Composite Stamps
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Ordering of microwrinkle patterns by compressive strain
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Geometry-Dependent Stripe Rearrangement Processes Induced by Strain on Preordered Microwrinkle Patterns
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High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors
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Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors
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High Frequency Properties of Electro-Textiles for Wearable Antenna Applications
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Conversion of Some Siloxane Polymers to Silicon Oxide by UV/Ozone Photochemical Processes
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Nanobelts of Semiconducting Oxides
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Sharp exciton emission from single InAs quantum dots in GaAs nanowires
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Application of Screen Printing in the Fabrication of Organic Light-Emitting Devices
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Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter
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Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates
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Effect of diamondlike carbon coating and surface topography on the performance of metal evaporated magnetic tapes
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Patterning Spherical Surfaces at the Two-Hundred-Nanometer Scale Using Soft Lithography
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GaN: Processing, defects, and devices
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Shape control of CdSe nanocrystals
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Protective diamond-like carbon coatings for future optical storage disks
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Hall Effect in the Accumulation Layers on the Surface of Organic Semiconductors
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Stars and stripes. Nanoscale misfit dislocation patterns on surfaces
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From Micro- to Nanofabrication with Soft Materials
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Laser-lithography on non-planar surfaces
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Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants
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High-power laser diodes based on InGaAsP alloys
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Dependence of Interface State Density on Silicon Thermal Oxidation Process Variables
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Macroelectronics: Perspectives on Technology and Applications
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Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design
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All-Inorganic Field Effect Transistors Fabricated by Printing
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Looking at Rubber Adhesion
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Elastically relaxed free-standing strained-silicon nanomembranes
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GaAs Readied for High-Speed Microcircuits
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Quantifying distortions in soft lithography
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Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers
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Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping
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Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks
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Printed plastic electronics and paperlike displays
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Farewell to Flatland
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Rubber Stamping for Plastic Electronics and Fiber Optics
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Toward Paperlike Displays
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High Performance Electrolyte Gated Carbon Nanotube Transistors
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Universal description of channel conductivity for nanotube and nanowire transistors
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Photonic crystal structure with square symmetry within each layer and a three-dimensional band gap
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Optimal strategy for controlling linewidth on spherical focal surface arrays
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Semiconductor nanowires for novel one-dimensional devices
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Morphology of nanostructured materials
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Low-Temperature Materials and Thin Film Transistors for Flexible Electronics
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Thin-film GaAs epitaxial lift-off solar cells for space applications
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Photon confinement in high-efficiency, thin-film III–V solar cells obtained by epitaxial lift-off
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Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing
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Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography
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Nanotechnology: Thin solid films roll up into nanotubes
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Aluminum metallization—Advantages and limitations for integrated circuit applications
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Mechanical properties of silicones for MEMS
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Ambipolar Pentacene Field-Effect Transistors and Inverters
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The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives
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