Transparent conducting oxides and production thereof

Gessert, Timothy A.; Yoshida, Yuki; Coutts, Timothy J.

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Title: Transparent conducting oxides and production thereof

Abstract

Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber. The method may also comprise depositing a metal oxide on the target in the process chamber to form a thin film having enhanced optical properties without substantially decreasing electrical quality.

Inventors:: Gessert, Timothy A.; Yoshida, Yuki; Coutts, Timothy J.

Issue Date:: 2014-06-10

Research Org.:: National Renewable Energy Laboratory (NREL), Golden, CO (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1133958

Patent Number(s):: 8747630

Application Number:: 12/130,788

Assignee:: Alliance for Sustainable Energy, LLC (Golden, CO)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/0036 - {Reactive sputtering}
C23C14/086 - {of zinc, germanium, cadmium, indium, tin, thallium or bismuth}
C23C14/3414 - {Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy}

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DOE Contract Number:: AC36-99GO10337

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Gessert, Timothy A., Yoshida, Yuki, and Coutts, Timothy J. Transparent conducting oxides and production thereof.  United States: N. p., 2014. 
        Web.

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                    Gessert, Timothy A., Yoshida, Yuki, & Coutts, Timothy J. Transparent conducting oxides and production thereof.  United States.

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                    Gessert, Timothy A., Yoshida, Yuki, and Coutts, Timothy J. Tue .  
        "Transparent conducting oxides and production thereof".  United States.  https://www.osti.gov/servlets/purl/1133958.

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@article{osti_1133958,

  title        = {Transparent conducting oxides and production thereof},

  author       = {Gessert, Timothy A. and Yoshida, Yuki and Coutts, Timothy J.},

  abstractNote = {Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber. The method may also comprise depositing a metal oxide on the target in the process chamber to form a thin film having enhanced optical properties without substantially decreasing electrical quality.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2014},

  month        = {6}

}

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Works referenced in this record:

Transparent conductive film having areas of high and low resistivity
patent, July 1983

Vossen, Jr., John L.; Zelez, Joseph
US Patent Document 4,395,467
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4395467

Manufacturing method of semiconductor device
patent, June 1999

Saihara, Hidenori
US Patent Document 5,909,623
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5909623

Photovoltaic devices comprising cadmium stannate transparent conducting films and method for making
patent, July 1999

Wu, Xuanzhi; Coutts, Timothy J.; Sheldon, Peter
US Patent Document 5,922,142
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5922142

Transparent conductive film, sputtering target and transparent conductive film-bonded substrate
patent, March 2000

Mitsui, Akira
US Patent Document 6,042,752
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6042752

Process for fabricating polycrystalline semiconductor thin-film solar cells, and cells produced thereby
patent, October 2000

Wu, Xuanzhi; Sheldon, Peter
US Patent Document 6,137,048
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6137048

Photovoltaic devices comprising zinc stannate buffer layer and method for making
patent, January 2001

Wu, Xuanzhi; Sheldon, Peter; Coutts, Timothy J.
US Patent Document 6,169,246
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6169246

Photovoltaic device
patent, January 2001

Sano, Masafumi; Nakamura, Tetsuro
US Patent Document 6,180,870
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6180870

Thin transparent conducting films of cadmium stannate
patent, April 2001

Wu, Xuanzhi; Coutts, Timothy J.
US Patent Document 6,221,495
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6221495

Zirconia-containing transparent and conducting oxides
patent, June 2001

Qadri, Syed B.; Skelton, Earl F.; Pique, Alberto
US Patent Document 6,246,071
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6246071

Ion-beam treatment to prepare surfaces of p-CdTe films
patent, August 2001

Gessert, Timothy A.
US Patent Document 6,281,035
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6281035

Transparent conductive film of zinc oxide
patent, May 2003

Yamamoto, Tetsuya; Nakahara, Ken
US Patent Document 6,569,548
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6569548

Semiconductor photonic device
patent, August 2003

Kadota, Michio
US Patent Document 6,606,333
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6606333

Methods of obtaining photoactive coatings and/or anatase crystalline phase of titanium oxides and articles made thereby
patent, January 2004

Finley, James J.
US Patent Document 6,677,063
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6677063

Incontinence treatment with urethral guide
patent, February 2004

Presthus, James; Dietz, Timothy G.; Levy, Stanley
US Patent Document 6,685,623
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6685623

ZnO film, method for manufacturing the same, and luminescent element including the same
patent, May 2004

Kadota, Michio; Miura, Toshinori
US Patent Document 6,733,895
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6733895

Transparent electroconductive film and touch panel
patent, September 2004

Iwabuchi, Yoshinori; Nishida, Mitsuhiro; Kusano, Yukihiro
US Patent Document 6,787,253
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6787253

Method for manufacturing zinc oxide semiconductors
patent, February 2005

Park, Seong Ju; Kim, Kyoung-kook
US Patent Document 6,852,623
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6852623

High carrier concentration p-type transparent conducting oxide films
patent, June 2005

Yan, Yanfa; Zhang, Shengbai
US Patent Document 6,908,782
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6908782

Transparent electrode, optoelectronic apparatus and devices
patent, August 2005

Pichler, Karl
US Patent Document 6,936,761
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6936761

Patterned ceramic films and method for producing the same
patent, July 2006

Punsalan, David; Lazaroff, Dennis; Beatty, Christopher
US Patent Document 7,071,121
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7071121

Transparent conductive oxides for plastic flat panel displays
patent, March 2007

Bright, Clark I.
US Patent Document 7,186,465
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7186465

Zinc oxide-based transparent conductor and sputtering target for forming the transparent conductor
patent, April 2010

Ikisawa, Masakatsu; Yahagi, Masataka
US Patent Document 7,699,965
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7699965

Zirconium-doped zinc oxide structures and methods
patent, June 2010

Ahn, Kie Y.; Forbes, Leonard
US Patent Document 7,727,910
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7727910

Gallium nitride based II-V group compound semiconductor device
patent-application, March 2002

Ho, Jin-Kuo; Jong, Chang-Shyang; Chiu, Chien-Chia
US Patent Application 09/572505; 20020036286
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020036286

Transparent conductive thin film, process for producing the same, sintered target for producing the same, and transparent, electroconductive substrate for display panel, and organic electroluminescence device
patent-application, November 2003

Abe, Yoshiyuki
US Patent Application 10/397831; 20030218153
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030218153

Compound semiconductor material and method for forming an active layer of a thin film transistor device
patent-application, March 2005

Ho, Jia-Chong; Lee, Jen-Hao; Lee, Cheng-Chung
US Patent Application 10/730073; 20050062134
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050062134

Sputtered Transparent Conductive Films
patent-application, June 2006

Delahoy, Alan E.; Guo, Sheyu; Lyndall, Robert B.
US Patent Application 11/275079; 20060118406
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060118406

Coated article with transparent conductive oxide film doped to adjust Fermi level, and method of making same
patent-application, January 2007

Krasnov, Alexey; Lu, Yiwei
US Patent Application 11/173157; 20070007125
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070007125

Method for depositing zinc oxide at low temperatures and products formed thereby
patent-application, May 2007

Garg, Diwakar; Henderson, Philip Bruce; Tempel, Daniel Joseph
US Patent Application 11/284193; 20070116986
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070116986

Method for Producing High Carrier Concentration P-Type Transparent Conducting Oxides
patent-application, May 2008

Li, Xiaonan; Yan, Yanfa; Coutts, Timothy J.
US Patent Application 10/553245; 20080118777
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080118777

Compound semiconductor material and method for forming an active layer of a thin film transistor device
patent-application, December 2008

Ho, Jia-Chong; Lee, Jen-Hao; Lee, Cheng-Chung
US Patent Application 12/149113; 20080296569
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080296569

Zinc Oxide Ceramics and a Manufacturing Method for the same, a Sputtering Target
patent-application, August 2009

Fukushima, Hideko
US Patent Application 12/310080; 20090197757
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090197757