Transparent conducting oxides and production thereof
Abstract
Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target (110) doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber (100). The method may also comprise depositing a metal oxide on the target (110) to form a thin film having enhanced optical properties without substantially decreasing electrical quality.
- Inventors:
- Issue Date:
- Research Org.:
- National Renewable Energy Lab. (NREL), Golden, CO (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1133452
- Patent Number(s):
- 8734621
- Application Number:
- 11/718,628
- Assignee:
- Alliance for Sustainable Energy, LLC (Golden, CO)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01B - CABLES
- DOE Contract Number:
- AC36-99GO10337
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2007 Jan 16
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Gessert, Timothy A, Yoshida, Yuki, and Coutts, Timothy J. Transparent conducting oxides and production thereof. United States: N. p., 2014.
Web.
Gessert, Timothy A, Yoshida, Yuki, & Coutts, Timothy J. Transparent conducting oxides and production thereof. United States.
Gessert, Timothy A, Yoshida, Yuki, and Coutts, Timothy J. Tue .
"Transparent conducting oxides and production thereof". United States. https://www.osti.gov/servlets/purl/1133452.
@article{osti_1133452,
title = {Transparent conducting oxides and production thereof},
author = {Gessert, Timothy A and Yoshida, Yuki and Coutts, Timothy J},
abstractNote = {Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target (110) doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber (100). The method may also comprise depositing a metal oxide on the target (110) to form a thin film having enhanced optical properties without substantially decreasing electrical quality.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {5}
}