Transparent conducting oxides and production thereof

Gessert, Timothy A; Yoshida, Yuki; Coutts, Timothy J

Title: Transparent conducting oxides and production thereof

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Abstract

Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target (110) doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber (100). The method may also comprise depositing a metal oxide on the target (110) to form a thin film having enhanced optical properties without substantially decreasing electrical quality.

Inventors:: Gessert, Timothy A; Yoshida, Yuki; Coutts, Timothy J

Issue Date:: 2014-05-27

Research Org.:: National Renewable Energy Lab. (NREL), Golden, CO (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1133452

Patent Number(s):: 8734621

Application Number:: 11/718,628

Assignee:: Alliance for Sustainable Energy, LLC (Golden, CO)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01B - CABLES

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/02565 - {Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds}
H01L21/02554 - {Oxides}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01B - CABLES
H01B1/08 - oxides

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/50 - Photovoltaic [PV] energy

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/086 - {of zinc, germanium, cadmium, indium, tin, thallium or bismuth}
C23C14/3414 - {Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/02573 - {Conductivity type}
H01L31/1884 - {Manufacture of transparent electrodes, e.g. TCO, ITO}
H01L21/02631 - {Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation}

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DOE Contract Number:: AC36-99GO10337

Resource Type:: Patent

Resource Relation:: Patent File Date: 2007 Jan 16

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Gessert, Timothy A, Yoshida, Yuki, and Coutts, Timothy J. Transparent conducting oxides and production thereof.  United States: N. p., 2014. 
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                    Gessert, Timothy A, Yoshida, Yuki, & Coutts, Timothy J. Transparent conducting oxides and production thereof.  United States.

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                    Gessert, Timothy A, Yoshida, Yuki, and Coutts, Timothy J. Tue .  
        "Transparent conducting oxides and production thereof".  United States.  https://www.osti.gov/servlets/purl/1133452.

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@article{osti_1133452,

  title        = {Transparent conducting oxides and production thereof},

  author       = {Gessert, Timothy A and Yoshida, Yuki and Coutts, Timothy J},

  abstractNote = {Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target (110) doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber (100). The method may also comprise depositing a metal oxide on the target (110) to form a thin film having enhanced optical properties without substantially decreasing electrical quality.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2014},

  month        = {5}

}

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