Capacitive chemical sensor
Abstract
A microfabricated capacitive chemical sensor can be used as an autonomous chemical sensor or as an analyte-sensitive chemical preconcentrator in a larger microanalytical system. The capacitive chemical sensor detects changes in sensing film dielectric properties, such as the dielectric constant, conductivity, or dimensionality. These changes result from the interaction of a target analyte with the sensing film. This capability provides a low-power, self-heating chemical sensor suitable for remote and unattended sensing applications. The capacitive chemical sensor also enables a smart, analyte-sensitive chemical preconcentrator. After sorption of the sample by the sensing film, the film can be rapidly heated to release the sample for further analysis. Therefore, the capacitive chemical sensor can optimize the sample collection time prior to release to enable the rapid and accurate analysis of analytes by a microanalytical system.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1132610
- Patent Number(s):
- 8736000
- Application Number:
- 11/583,442
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2006 Oct 19
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Manginell, Ronald P, Moorman, Matthew W, and Wheeler, David R. Capacitive chemical sensor. United States: N. p., 2014.
Web.
Manginell, Ronald P, Moorman, Matthew W, & Wheeler, David R. Capacitive chemical sensor. United States.
Manginell, Ronald P, Moorman, Matthew W, and Wheeler, David R. Tue .
"Capacitive chemical sensor". United States. https://www.osti.gov/servlets/purl/1132610.
@article{osti_1132610,
title = {Capacitive chemical sensor},
author = {Manginell, Ronald P and Moorman, Matthew W and Wheeler, David R},
abstractNote = {A microfabricated capacitive chemical sensor can be used as an autonomous chemical sensor or as an analyte-sensitive chemical preconcentrator in a larger microanalytical system. The capacitive chemical sensor detects changes in sensing film dielectric properties, such as the dielectric constant, conductivity, or dimensionality. These changes result from the interaction of a target analyte with the sensing film. This capability provides a low-power, self-heating chemical sensor suitable for remote and unattended sensing applications. The capacitive chemical sensor also enables a smart, analyte-sensitive chemical preconcentrator. After sorption of the sample by the sensing film, the film can be rapidly heated to release the sample for further analysis. Therefore, the capacitive chemical sensor can optimize the sample collection time prior to release to enable the rapid and accurate analysis of analytes by a microanalytical system.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 27 00:00:00 EDT 2014},
month = {Tue May 27 00:00:00 EDT 2014}
}
Works referenced in this record:
Chemical preconcentrator
patent, January 2001
- Manginell, Ronald P.; Frye-Mason, Gregory C.
- US Patent Document 6,171,378
Sensor for chemical and biological materials
patent, May 2004
- Yamagishi, Frederick G.; Stanford, Thomas B.; Van Ast, Camille I.
- US Patent Document 6,730,212
Microcombustor
patent, September 2004
- Gardner, Timothy; Manginelli, Ronald P.; Lewis, Patrick R.
- US Patent Document 6,786,716
Biological preconcentrator
patent, September 2008
- Manginell, Ronald P.; Bunker, Bruce C.; Huber, Dale L.
- US Patent Document 7,422,724
Circuit configuration and method for assessing capacitances in matrices
patent-application, April 2003
- Kollmer, Ute; Sauter, Stephen; Linenbank, Carsten
- US Patent Application 10/236889; 20030062905
2D/3D chemical sensors and methods of fabricating and operating the same
patent-application, May 2003
- Ufer, Stefan
- US Patent Application 10/008849; 20030085124
Sensor produced using imprint lithography
patent-application, October 2004
- Stasiak, James; Peters, Kevin
- US Patent Application 10/423063; 20040214447
Gas-phase selective etching of native oxide
journal, January 1990
- Miki, N.; Kikuyama, H.; Kawanabe, I.
- IEEE Transactions on Electron Devices, Vol. 37, Issue 1
Nanoporous-carbon films for microsensor preconcentrators
journal, May 2002
- Siegal, M. P.; Overmyer, D. L.; Kottenstette, R. J.
- Applied Physics Letters, Vol. 80, Issue 21
Etching of thin SiO 2 layers using wet HF gas
journal, May 1989
- van der Heide, P. A. M.; Baan Hofman, M. J.; Ronde, H. J.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 7, Issue 3
Mechanisms of the HF/H 2 O vapor phase etching of SiO 2
journal, July 1992
- Helms, C. R.; Deal, B. E.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 10, Issue 4
Works referencing / citing this record:
Capacitive micro-machined transducer and method of manufacturing the same
patent, January 2016
- Dirksen, Peter; Mauczok, Ruediger; Karakaya, Koray
- US Patent Document 9,231,496