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Title: Substrate inspection

Abstract

Various embodiments for substrate inspection are provided.

Inventors:
; ;
Issue Date:
Research Org.:
KLA-Tencor Corporation, Milpitas, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1132598
Patent Number(s):
8,736,831
Application Number:
13/472,421
Assignee:
KLA-Tencor Corp. (Milpitas, CA)
DOE Contract Number:  
EE0003159
Resource Type:
Patent
Resource Relation:
Patent File Date: 2012 May 15
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Ramachandran, Mahendra Prabhu, Meeks, Steven W, and Sappey, Romain. Substrate inspection. United States: N. p., 2014. Web.
Ramachandran, Mahendra Prabhu, Meeks, Steven W, & Sappey, Romain. Substrate inspection. United States.
Ramachandran, Mahendra Prabhu, Meeks, Steven W, and Sappey, Romain. Tue . "Substrate inspection". United States. https://www.osti.gov/servlets/purl/1132598.
@article{osti_1132598,
title = {Substrate inspection},
author = {Ramachandran, Mahendra Prabhu and Meeks, Steven W and Sappey, Romain},
abstractNote = {Various embodiments for substrate inspection are provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {5}
}

Patent:

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