Substrate inspection

Ramachandran, Mahendra Prabhu; Meeks, Steven W; Sappey, Romain

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A - human necessities
A01 - agriculture
A21 - baking
A22 - butchering
A23 - foods or foodstuffs
A24 - tobacco
A41 - wearing apparel
A42 - headwear
A43 - footwear
A44 - haberdashery
A45 - hand or travelling articles
A46 - brushware
A47 - furniture
A61 - medical or veterinary science
A62 - life-saving
A63 - sports
A99 - subject matter not otherwise provided for in this section
B - performing operations
B01 - physical or chemical processes or apparatus in general
B02 - crushing, pulverising, or disintegrating
B03 - separation of solid materials using liquids or using pneumatic tables or jigs
B04 - centrifugal apparatus or machines for carrying-out physical or chemical processes
B05 - spraying or atomising in general
B06 - generating or transmitting mechanical vibrations in general
B07 - separating solids from solids
B08 - cleaning
B09 - disposal of solid waste
B21 - mechanical metal-working without essentially removing material
B22 - casting
B23 - machine tools
B24 - grinding
B25 - hand tools
B26 - hand cutting tools
B27 - working or preserving wood or similar material
B28 - working cement, clay, or stone
B29 - working of plastics
B30 - presses
B31 - making articles of paper, cardboard or material worked in a manner analogous to paper
B32 - layered products
B33 - additive manufacturing technology
B41 - printing
B42 - bookbinding
B43 - writing or drawing implements
B44 - decorative arts
B60 - vehicles in general
B61 - railways
B62 - land vehicles for travelling otherwise than on rails
B63 - ships or other waterborne vessels
B64 - aircraft
B65 - conveying
B66 - hoisting
B67 - opening, closing {or cleaning} bottles, jars or similar containers
B68 - saddlery
B81 - microstructural technology
B82 - nanotechnology
B99 - subject matter not otherwise provided for in this section
C - chemistry
C01 - inorganic chemistry
C02 - treatment of water, waste water, sewage, or sludge
C03 - glass
C04 - cements
C05 - fertilisers
C06 - explosives
C07 - organic chemistry
C08 - organic macromolecular compounds
C09 - dyes
C10 - petroleum, gas or coke industries
C11 - animal or vegetable oils, fats, fatty substances or waxes
C12 - biochemistry
C13 - sugar industry
C14 - skins
C21 - metallurgy of iron
C22 - metallurgy
C23 - coating metallic material
C25 - electrolytic or electrophoretic processes
C30 - crystal growth
C40 - combinatorial technology
C99 - subject matter not otherwise provided for in this section
D - textiles
D01 - natural or man-made threads or fibres
D02 - yarns
D03 - weaving
D04 - braiding
D05 - sewing
D06 - treatment of textiles or the like
D07 - ropes
D10 - indexing scheme associated with sublasses of section d, relating to textiles
D21 - paper-making
D99 - subject matter not otherwise provided for in this section
E - fixed constructions
E01 - construction of roads, railways, or bridges
E02 - hydraulic engineering
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F - mechanical engineering
F01 - machines or engines in general
F02 - combustion engines
F03 - machines or engines for liquids
F04 - positive - displacement machines for liquids
F05 - indexing schemes relating to engines or pumps in various subclasses of classes f01-f04
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F16 - engineering elements and units
F17 - storing or distributing gases or liquids
F21 - lighting
F22 - steam generation
F23 - combustion apparatus
F24 - heating
F25 - refrigeration or cooling
F26 - drying
F27 - furnaces
F28 - heat exchange in general
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F42 - ammunition
F99 - subject matter not otherwise provided for in this section
G - physics
G01 - measuring
G02 - optics
G03 - photography
G04 - horology
G05 - controlling
G06 - computing
G07 - checking-devices
G08 - signalling
G09 - education
G10 - musical instruments
G11 - information storage
G12 - instrument details
G16 - information and communication technology [ict] specially adapted for specific application fields
G21 - nuclear physics
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H - electricity
H01 - basic electric elements
H02 - generation
H03 - basic electronic circuitry
H04 - electric communication technique
H05 - electric techniques not otherwise provided for
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Y - new / cross sectional technologies
Y02 - technologies or applications for mitigation or adaptation against climate change
Y04 - information or communication technologies having an impact on other technology areas
Y10 - technical subjects covered by former uspc

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Title: Substrate inspection

Abstract

Various embodiments for substrate inspection are provided.

Inventors:: Ramachandran, Mahendra Prabhu; Meeks, Steven W; Sappey, Romain

Issue Date:: 2014-05-27

Research Org.:: KLA-Tencor Corporation, Milpitas, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1132598

Patent Number(s):: 8736831

Application Number:: 13/472,421

Assignee:: KLA-Tencor Corp. (Milpitas, CA)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

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G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N21/47 - Scattering, i.e. diffuse reflection
G01N21/8422 - {Investigating thin films, e.g. matrix isolation method}
G01N21/9501 - {Semiconductor wafers
G01N21/956 - Inspecting patterns on the surface of objects
G01N21/95623 - {using a spatial filtering method
G01N21/958 - Inspecting transparent materials {or objects, e.g. windscreens

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DOE Contract Number:: EE0003159

Resource Type:: Patent

Resource Relation:: Patent File Date: 2012 May 15

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

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                    Ramachandran, Mahendra Prabhu, Meeks, Steven W, and Sappey, Romain. Substrate inspection.  United States: N. p., 2014. 
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                    Ramachandran, Mahendra Prabhu, Meeks, Steven W, & Sappey, Romain. Substrate inspection.  United States.

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                    Ramachandran, Mahendra Prabhu, Meeks, Steven W, and Sappey, Romain. Tue .  
        "Substrate inspection".  United States.  https://www.osti.gov/servlets/purl/1132598.

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@article{osti_1132598,

  title        = {Substrate inspection},

  author       = {Ramachandran, Mahendra Prabhu and Meeks, Steven W and Sappey, Romain},

  abstractNote = {Various embodiments for substrate inspection are provided.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2014},

  month        = {5}

}

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Works referenced in this record:

Defect detection using fourier optics and a spatial separator for simultaneous optical computing of separated fourier transform components
patent, April 1996

Hendler, Lawrence; Watts, Michael P. C.
US Patent Document 5,506,676
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Process and apparatus for laser analysis of surface having a repetitive texture pattern
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Process and apparatus for controlled laser texturing of magnetic recording disk
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Radiation filter, spectrometer and imager using a micro-mirror array
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Fateley, William G.
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Method for discriminating between holes in and particles on a film covering a substrate
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Defect detection system
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Vaez-Iravani, Mehdi; Rzepiela, Jeffrey; Treadwell, Carl
US Patent Document 6,538,730
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Apparatus for optical inspection of a working surface having a dynamic reflective spatial attenuator
patent, November 2003

Le, Tuan D.
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Patterned wafer inspection using spatial filtering
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Some, Daniel
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Inspection system for integrated applications
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Appearance inspection apparatus and projection method for projecting image of sample under inspection
patent, February 2008

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US Patent Document 7,330,265
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Simultaneous multi-spot inspection and imaging
patent, February 2009

Vaez-Iravani, Mehdi; Miller, Lawrence R.
US Patent Document 7,492,451
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Systems configured to inspect a specimen
patent, May 2009

Chen, Grace Hsiu-Ling; Fu, Tao-Yi; Sullivan, Jamie M.
US Patent Document 7,535,563
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Surface characteristic analysis
patent, June 2009

Meeks, Steven W.; Sappey, Romain; Carr, Tom
US Patent Document 7,554,654
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7554654

System and method for hyper-spectral analysis
patent, July 2009

Maggioni, Mauro M.; Coifman, Ronald R.; Coppi, Andreas
US Patent Document 7,562,057
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Method of imaging radiation from an object on a detection device and an inspection device for inspecting an object
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Snel, Robert; Bleeker, Arno Jan; van Brug, Hedser
US Patent Document 7,697,128
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patent, March 2011

Meeks, Steven W.
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Genio, Edgar; Budiarto, Edward W.
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Wafer inspection system for distinguishing pits and particles
patent-application, May 2004

Fossey, Michael E.; Stover, John C.; Clementi, Lee D.
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Similar Records

Title: Substrate inspection

Abstract

Citation Formats

Defect detection using fourier optics and a spatial separator for simultaneous optical computing of separated fourier transform components patent, April 1996

Process and apparatus for laser analysis of surface having a repetitive texture pattern patent, July 1996

Process and apparatus for controlled laser texturing of magnetic recording disk patent, December 1996

Radiation filter, spectrometer and imager using a micro-mirror array patent, May 2002

Method for discriminating between holes in and particles on a film covering a substrate patent, November 2002

Defect detection system patent, March 2003

Apparatus for optical inspection of a working surface having a dynamic reflective spatial attenuator patent, November 2003

Patterned wafer inspection using spatial filtering patent, February 2004

Inspection system for integrated applications patent, October 2006

Appearance inspection apparatus and projection method for projecting image of sample under inspection patent, February 2008

Simultaneous multi-spot inspection and imaging patent, February 2009

Systems configured to inspect a specimen patent, May 2009

Surface characteristic analysis patent, June 2009

System and method for hyper-spectral analysis patent, July 2009

Method of imaging radiation from an object on a detection device and an inspection device for inspecting an object patent, April 2010

Scattered light separation patent, March 2011

Metrology of thin film devices using an addressable micromirror array patent, September 2011

Wafer inspection system for distinguishing pits and particles patent-application, May 2004

Defect detection using fourier optics and a spatial separator for simultaneous optical computing of separated fourier transform components
patent, April 1996

Process and apparatus for laser analysis of surface having a repetitive texture pattern
patent, July 1996

Process and apparatus for controlled laser texturing of magnetic recording disk
patent, December 1996

Radiation filter, spectrometer and imager using a micro-mirror array
patent, May 2002

Method for discriminating between holes in and particles on a film covering a substrate
patent, November 2002

Defect detection system
patent, March 2003

Apparatus for optical inspection of a working surface having a dynamic reflective spatial attenuator
patent, November 2003

Patterned wafer inspection using spatial filtering
patent, February 2004

Inspection system for integrated applications
patent, October 2006

Appearance inspection apparatus and projection method for projecting image of sample under inspection
patent, February 2008

Simultaneous multi-spot inspection and imaging
patent, February 2009

Systems configured to inspect a specimen
patent, May 2009

Surface characteristic analysis
patent, June 2009

System and method for hyper-spectral analysis
patent, July 2009

Method of imaging radiation from an object on a detection device and an inspection device for inspecting an object
patent, April 2010

Scattered light separation
patent, March 2011

Metrology of thin film devices using an addressable micromirror array
patent, September 2011

Wafer inspection system for distinguishing pits and particles
patent-application, May 2004