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Title: Optically transduced MEMS gyro device

Abstract

A bulk micromachined vibratory gyro in which a proof mass has a bulk substrate thickness for a large mass and high inertial sensitivity. In embodiments, optical displacement transduction is with multi-layer sub-wavelength gratings for high sensitivity and low cross-talk with non-optical drive elements. In embodiments, the vibratory gyro includes a plurality of multi-layer sub-wavelength gratings and a plurality of drive electrodes to measure motion of the proof mass induced by drive forces and/or moments and induced by the Coriolis Effect when the gyro experiences a rotation. In embodiments, phase is varied across the plurality gratings and a multi-layer grating having the best performance is selected from the plurality.

Inventors:
; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1132527
Patent Number(s):
8,726,730
Application Number:
13/325,683
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 Dec 14
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Nielson, Gregory N, Bogart, Gregory R, Langlois, Eric, and Okandan, Murat. Optically transduced MEMS gyro device. United States: N. p., 2014. Web.
Nielson, Gregory N, Bogart, Gregory R, Langlois, Eric, & Okandan, Murat. Optically transduced MEMS gyro device. United States.
Nielson, Gregory N, Bogart, Gregory R, Langlois, Eric, and Okandan, Murat. Tue . "Optically transduced MEMS gyro device". United States. https://www.osti.gov/servlets/purl/1132527.
@article{osti_1132527,
title = {Optically transduced MEMS gyro device},
author = {Nielson, Gregory N and Bogart, Gregory R and Langlois, Eric and Okandan, Murat},
abstractNote = {A bulk micromachined vibratory gyro in which a proof mass has a bulk substrate thickness for a large mass and high inertial sensitivity. In embodiments, optical displacement transduction is with multi-layer sub-wavelength gratings for high sensitivity and low cross-talk with non-optical drive elements. In embodiments, the vibratory gyro includes a plurality of multi-layer sub-wavelength gratings and a plurality of drive electrodes to measure motion of the proof mass induced by drive forces and/or moments and induced by the Coriolis Effect when the gyro experiences a rotation. In embodiments, phase is varied across the plurality gratings and a multi-layer grating having the best performance is selected from the plurality.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {5}
}

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Works referenced in this record:

In-Plane Nano-G Accelerometer Based on an Optical Resonant Detection System
conference, June 2007

  • Krishnamoorthy, U.; Carr, D. W.; Bogart, G. R.
  • TRANSDUCERS '07 & Eurosensors XXI. 2007 14th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
  • DOI: 10.1109/SENSOR.2007.4300350