Anti-reflective nanoporous silicon for efficient hydrogen production
Abstract
Exemplary embodiments are disclosed of anti-reflective nanoporous silicon for efficient hydrogen production by photoelectrolysis of water. A nanoporous black Si is disclosed as an efficient photocathode for H.sub.2 production from water splitting half-reaction.
- Inventors:
- Issue Date:
- Research Org.:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1132050
- Patent Number(s):
- 8729798
- Application Number:
- 13/284,861
- Assignee:
- Alliance for Sustainable Energy, LLC (Golden, CO)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25B - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS
- DOE Contract Number:
- AC36-08GO28308
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 Oct 28
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Oh, Jihun, and Branz, Howard M. Anti-reflective nanoporous silicon for efficient hydrogen production. United States: N. p., 2014.
Web.
Oh, Jihun, & Branz, Howard M. Anti-reflective nanoporous silicon for efficient hydrogen production. United States.
Oh, Jihun, and Branz, Howard M. Tue .
"Anti-reflective nanoporous silicon for efficient hydrogen production". United States. https://www.osti.gov/servlets/purl/1132050.
@article{osti_1132050,
title = {Anti-reflective nanoporous silicon for efficient hydrogen production},
author = {Oh, Jihun and Branz, Howard M},
abstractNote = {Exemplary embodiments are disclosed of anti-reflective nanoporous silicon for efficient hydrogen production by photoelectrolysis of water. A nanoporous black Si is disclosed as an efficient photocathode for H.sub.2 production from water splitting half-reaction.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {5}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Optically black coating and process for forming it
patent, September 1978
- Wade, Jackie F.; Peyton, John E.; Klitzky, Bruce R.
- US Patent Document 4,111,762
Process and apparatus for producing non-glare glass by etching
patent, March 1993
- Soda, Ken
- US Patent Document 5,196,088
Superconducting detector and method of making same
patent, November 1993
- Bang, Christopher A.; Flik, Markus; Schmidt, Martin A.
- US Patent Document 5,264,375
Photonic silicon on a transparent substrate
patent, July 2000
- Russell, Stephen D.; Dubbelday, Wadad B.; Shimabukuro, Randy L.
- US Patent Document 6,093,941
Micromechanical membrane tilt-mirror switch
patent, January 2001
- Ford, Joseph E.; Walker, James A.
- US Patent Document 6,178,033
Derivatization of silicon surfaces
patent, September 2001
- Laibinis, Paul; Kim, Namyong
- US Patent Document 6,284,317
Metal catalyst technique for texturing silicon solar cells
patent, December 2001
- Ruby, Douglas S.; Zaidi, Saleem H.
- US Patent Document 6,329,296
Electrophoretic displays using nanoparticles
patent, March 2003
- Jacobson, Joseph M.; Drzaic, Paul S.; Morrison, Ian D.
- US Patent Document 6,538,801
Electrophoretic displays using nanoparticles
patent, April 2004
- Jacobson, Joseph M.; Pullen, Anthony; Whitesides, Thomas H.
- US Patent Document 6,721,083
Method of fabricating a semiconductor device
patent, July 2004
- Yamazaki, Shunpei; Takano, Tamae; Dairiki, Koji
- US Patent Document 6,759,313
Metal-assisted chemical etch to produce porous group III-V materials
patent, July 2004
- Bohn, Paul W.; Li, Xiuling; Sweedler, Jonathan V.
- US Patent Document 6,762,134
Metal-assisted chemical etch porous silicon formation method
patent, September 2004
- Li, Xiuling; Bohn, Paul W.; Sweedler, Jonathan V.
- US Patent Document 6,790,785
Electroless deposition method
patent, May 2005
- Padhi, Deenesh; Yahalom, Joseph; Ramanathan, Sivakami
- US Patent Document 6,899,816
Electroless deposition method
patent, June 2005
- Padhi, Deenesh; Yahalom, Joseph; Ramanathan, Sivakami
- US Patent Document 6,905,622
Photoelectrochemical device and electrode
patent, May 2006
- Gibson, Thomas L.; Kelly, Nelson A.
- US Patent Document 7,052,587
Lithography-based patterning of layer-by-layer nano-assembled thin films
patent, August 2006
- Cui, Tianhong; Lvov, Yuri; Hua, Feng
- US Patent Document 7,090,783
Method for producing multicrystalline silicon substrate for solar cells
patent, November 2006
- Matsumura, Michio; Tujino, Kazuya
- US Patent Document 7,135,414
Method of fabricating a semiconductor device
patent, November 2006
- Yamazaki, Shunpei; Takano, Tamae; Dairiki, Koji
- US Patent Document 7,141,490
Methods of selective deposition of fine particles onto selected regions of a substrate
patent, January 2009
- Cohen, Guy
- US Patent Document 7,476,573
Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
patent, September 2009
- Goo, Juseon; Hong, Eunkee; Kim, Hong-Gun
- US Patent Document 7,585,786
Method of forming pores in crystal substrate, and crystal substrate containing pores formed by the same
patent, May 2010
- Matsumura, Michio; Tsujino, Kazuya
- US Patent Document 7,718,254
Method for producing silicon substrate for solar cells
patent, November 2011
- Dimitrov, Dimitre Zahariev; Huang, Chien-Rong; Lin, Ching-Hsi
- US Patent Document 8,053,270
Methods of selective deposition of fine particles onto selected regions of a substrate
patent, November 2011
- Cohen, Guy
- US Patent Document 8,053,328
Nanoparticle-based etching of silicon surfaces
patent, December 2011
- Branz, Howard M.; Duda, Anna; Ginley, David S.
- US Patent Document 8,075,792
Method of manufacturing solar cell
patent, February 2012
- Nishimoto, Yoichiro
- US Patent Document 8,119,438
Method of fabricating solar cell
patent, February 2012
- Lin, Ching-Hsi; Huang, Chien-Rong; Dimitrov, Dimitre Zahariev
- US Patent Document 8,124,535
Method for forming silicon trench
patent, June 2012
- Lin, Ching-Fuh; Hung, Shih-Che; Syu, Shu-Jia
- US Patent Document 8,193,095
Method for producing silicon nanostructures
patent, December 2012
- Lin, Ching-Fuh; Syu, Shu-Jia
- US Patent Document 8,334,216
Method of forming nanoscale three-dimensional patterns in a porous material
patent, July 2013
- Li, Xiuling; Ruzic, David N.; Chun, Ik Su
- US Patent Document 8,486,843
Method of fabricating a semiconductor device
patent-application, June 2002
- Yamazaki, Shunpei; Takano, Tamae; Dairiki, Koji
- US Patent Application 10/001785; 20020068421
Systems and methods for forming processing streams
patent-application, August 2002
- Bay, Steven; Kaiser, JR., Roger
- US Patent Application 09/930009; 20020104552
Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation
patent-application, September 2002
- Winningham, Thomas Andrew; Douglas, Kenneth
- US Patent Application 09/750522; 20020123227
Electrophoretic displays using nanoparticles
patent-application, October 2002
- Jacobson, Joseph M.; Drzaic, Paul S.; Morrison, Ian D.
- US Patent Application 10/054721; 20020145792
Electrophoretic displays using nanoparticles
patent-application, May 2003
- Jacobson, Joseph M.; Pullen, Anthony E.; Whitesides, Thomas H.
- US Patent Application 10/065617; 20030096113
Method for raw etching silicon solar cells
patent-application, June 2003
- Kuebelbeck, Armin; Zielinski, Claudia; Goelzenleuchter, Thomas
- US Patent Application 10/168797; 20030119332
Electroless deposition method
patent-application, October 2003
- Padhi, Deenesh; Yahalom, Joseph; Ramanathan, Sivakami
- US Patent Application 10/117711; 20030190812
Spatial light modulators with light absorbing areas
patent-application, May 2014
- Huibers, Andrw G.; Richards, Peter W.
- US Patent Application 10/305507; 20040100594
Spatial Light Modulators With Light Blocking/absorbing Areas
patent-application, May 2004
- Huibers, Andrew G.; Patel, Satyadev R.
- US Patent Application 10/305536; 20040100677
Method of fabricating a semiconductor device
patent-application, December 2004
- Yamazaki, Shumpei; Takano, Tamae; Dairiki, Koji
- US Patent Application 10/882634; 20040241967
Methods of nanostructure formation and shape selection
patent-application, March 2005
- Xia, Younan; Sun, Yugang
- US Patent Application 10/732910; 20050056118
Method for producing multicrystalline silicon substrate for solar cells
patent-application, May 2005
- Matsumura, Michio; Tujino, Kazuya
- US Patent Application 11/002657; 20050101153
Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
patent-application, June 2005
- Goo, Juseon; Hong, Eunkee; Kim, Hong-Gun
- US Patent Application 11/010223; 20050130439
Devices and methods for enhanced microneedle penetration of biological barriers
patent-application, June 2005
- Prausnitz, Mark R.; Allen, Mark G.; Henry, Sebastian
- US Patent Application 10/856691; 20050137531
Self-assembled structures
patent-application, December 2005
- Kambe, Nobuyuki; Dardi, Peter S.
- US Patent Application 11/064706; 20050271805
Method for forming high-resolution pattern with direct writing means
patent-application, December 2006
- Shin, Dong-Youn; Shin, Bu-Gon
- US Patent Application 11/431922; 20060281333
Method for forming high-resolution pattern and substrate having prepattern formed thereby
patent-application, December 2006
- Shin, Dong-Youn
- US Patent Application 11/431923; 20060281334
Method and Device for Modulating Light
patent-application, May 2007
- Miles, Mark W.
- US Patent Application 11/668973; 20070121205
Method of fabricating semiconductor device
patent-application, June 2007
- Yamazaki, Shunpei; Takano, Tamae; Dairiki, Koji
- US Patent Application 11/601699; 20070148922
Light Emitting Device
patent-application, July 2007
- Yamamoto, Kazushige; Shimizu, Tatsuo; Haneda, Shigeru
- US Patent Application 11/533149; 20070152234
Modification of metal nanoparticles for improved analyte detection by surface enhanced Raman spectroscopy (SERS)
patent-application, July 2007
- Zhang, Jingwu; Sundararajan, Narayan; Ngola, Sarah M.
- US Patent Application 11/319747; 20070155021
Degenerate binding detection and protein identification using Raman spectroscopy nanoparticle labels
patent-application, July 2007
- Yamakawa, Mineo; Sundararajan, Narayan; Berlin, Andrew
- US Patent Application 11/325833; 20070155022
Solution Deposition of Inorganic Materials and Electronic Devices Made Comprising the Inorganic Materials
patent-application, August 2007
- Chang, Chih-hung; Lee, DooHyoung; Chang, Yu-Jen
- US Patent Application 11/564759; 20070184576
Method for Patterning Metal Using Nanoparticle Containing Precursors
patent-application, August 2007
- Perry, Joseph W.; Marder, Seth R.; Stellacci, Francesco
- US Patent Application 11/736695; 20070190326
Methods for producing MEMS with protective coatings using multi-component sacrificial layers
patent-application, September 2007
- Tung, Ming-Hau; Kogut, Lior
- US Patent Application 11/367098; 20070206267
Apparatus and method for imaging with surface enhanced coherent anti-stokes raman scattering (SECARS)
patent-application, October 2007
- Koo, Tae-Woong
- US Patent Application 11/408185; 20070247620
Novel Nanoparticle Patterning Process
patent-application, December 2007
- Tutt, Lee W.; Feller, Therese M.
- US Patent Application 11/421894; 20070281249
Solar hydrogen charger
patent-application, January 2009
- Fan, Qinbai; Liss, William E.
- US Patent Document 11/881198; 20090026070
Solar cell, method of manufacturing the same, and method of texturing solar cell
patent-application, July 2009
- Kwag, Gyeayoung; Do, Younggu
- US Patent Application 12/318630; 20090183776
Anti-Reflection Etching of Silicon Surfaces Catalyzed with Ionic Metal Solutions
patent-application, September 2009
- Yost, Vernon; Branz, Howard
- US Patent Application 12/053445; 20090236317
Mixed-typed heterojunction thin-film solar cell structure and method for fabricating the same
patent-application, December 2009
- Lin, Ching-Fuh; Hsiao, Chieh-Yu; Chao, Jiun-JIe
- US Patent Application 12/222691; 20090293946
Conversion of Carbon Dioxide to Organic Products
patent-application, July 2010
- Bocarsly, Andrew B.; Cole, Emily Barton
- US Patent Document 12/696840; 20100187123
Metal-Assisted Chemical Etching of Substrates
patent-application, September 2010
- Hildreth, Owen; Wong, C. P.; Xiu, Yonghao
- US Patent Application 12/751080; 20100248449
Method for preparing substrate with periodical structure
patent-application, October 2010
- Li, Chung-Hua; Lee, Sheng-Ru
- US Patent Application 12/662543; 20100270263
Silicon substrate with periodical structure
patent-application, October 2010
- Li, Chung-Hua; Lee, Sheng-Ru
- US Patent Application 12/662542; 20100270650
High-Productivity Porous Semiconductor Manufacturing Equipment
patent-application, February 2011
- Kamian, George D.; Nag, Somnath; Tamilman, Subbu
- US Patent Application 12/774667; 20110030610
Method of fabricating solar cell
patent-application, June 2011
- Lin, Ching-Hsi; Huang, Chien-Rong; Dimitrov, Dimitre Zahariev
- US Patent Application 12/658663; 20110143484
Forming High Efficiency Silicon Solar Cells Using Density-Graded Anti-reflection Surfaces
patent-application, December 2011
- Yuan, Hao-Chih; Branz, Howard M.; Page, Matthew R.
- US Patent Application 12/797590; 20110303265
Solae Energy Systems
patent-application, February 2012
- Branz, Howard M.; Vandermeulen, Peter
- US Patent Application 12/844212; 20120024365
Method of Forming Micro-Pore Structures or Trench Structures on Surface of Silicon Wafer Substrate
patent-application, April 2012
- Chien, Ray; Lin, Yu-Mei; Kao, Wei-Che
- US Patent Application 13/228597; 20120088372
Anti-Reflective Nanoporous Silicon for Efficient Hydrogen Production
patent-application, May 2012
- Oh, Jihun; Branz, Howard
- US Patent Application 13/284861; 20120103825
Copper-Assisted, Anti-Reflection Etching of Silicon Surfaces
patent-application, July 2012
- Toor, Fatima; Branz, Howard
- US Patent Application 13/423745; 20120178204
Texturing Surface of Light Absorbing Substrate
patent-application, September 2012
- Zhang, Jun-Ying
- US Patent Application 13/509504; 20120225517
Method of Forming an Array of High Aspect Ration Semiconductor Nanostructures
patent-application, February 2013
- Li, Xiuling; Fang, Nicholas X.; Ferreira, Placid M.
- US Patent Application 13/503123; 20130052762
Design and characterization of a robust photoelectrochemical device to generate hydrogen using solar water splitting
journal, September 2006
- Kelly, Nelson A.; Gibson, Thomas L.
- International Journal of Hydrogen Energy, Vol. 31, Issue 12, p. 1658-1673
Photoelectrochemical Behavior of n-Type Porous-Si Electrodes
journal, July 1986
- Koshida, Nobuyoshi; Koyama, Hideki; Kiuchi, Yuji
- Japanese Journal of Applied Physics, Vol. 25, Issue Part 1, No. 7
Hydrogen generation from photoelectrochemical water splitting based on nanomaterials
journal, September 2009
- Li, Y.; Zhang, J. Z.
- Laser & Photonics Reviews, Vol. 4, Issue 4
Porous silicon in solar cells: A review and a description of its application as an AR coating
journal, April 1995
- Menna, P.; Di Francia, G.; La Ferrara, V.
- Solar Energy Materials and Solar Cells, Vol. 37, Issue 1, p. 13-24
Extremely Superhydrophobic Surfaces with Micro- and Nanostructures Fabricated by Copper Catalytic Etching
journal, January 2011
- Lee, Jung-Pil; Choi, Sinho; Park, Soojin
- Langmuir, Vol. 27, Issue 2
Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles
journal, February 2006
- Peng, K. Q.; Hu, J. J.; Yan, Y. J.
- Advanced Functional Materials, Vol. 16, Issue 3, p. 387-394
Texturization of multicrystalline silicon wafers for solar cells by chemical treatment using metallic catalyst
journal, January 2006
- Tsujino, K.; Matsumura, M.; Nishimoto, Y.
- Solar Energy Materials and Solar Cells, Vol. 90, Issue 1, p. 100-110
Antireflection subwavelength structure of silicon surface formed by wet process using catalysis of single nano-sized gold particle
journal, August 2008
- Nishioka, Kensuke; Horita, Susumu; Ohdaira, Keisuke
- Solar Energy Materials and Solar Cells, Vol. 92, Issue 8, p. 919-922
10 μm minority-carrier diffusion lengths in Si wires synthesized by Cu-catalyzed vapor-liquid-solid growth
journal, October 2009
- Putnam, Morgan C.; Turner-Evans, Daniel B.; Kelzenberg, Michael D.
- Applied Physics Letters, Vol. 95, Issue 16, 163116
>16% thin-film epitaxial silicon solar cells on 70-cm 2 area with 30-µm active layer, porous silicon back reflector, and Cu-based top-contact metallization : Silicon solar cells, silicon reflector, metallization
journal, September 2011
- Kuzma-Filipek, Izabela; Dross, Frederic; Baert, Kris
- Progress in Photovoltaics: Research and Applications, Vol. 20, Issue 3
Black multi-crystalline silicon solar cells
journal, March 2007
- Koynov, Svetoslav; Brandt, Martin S.; Stutzmann, Martin
- physica status solidi (RRL) – Rapid Research Letters, Vol. 1, Issue 2
Black nonreflecting silicon surfaces for solar cells
journal, May 2006
- Koynov, Svetoslav; Brandt, Martin S.; Stutzmann, Martin
- Applied Physics Letters, Vol. 88, Issue 20
Selective Solar-Driven Reduction of CO 2 to Methanol Using a Catalyzed p-GaP Based Photoelectrochemical Cell
journal, May 2008
- Barton, Emily E.; Rampulla, David M.; Bocarsly, Andrew B.
- Journal of the American Chemical Society, Vol. 130, Issue 20
Solution-Processable Graphene Oxide as an Efficient Hole Transport Layer in Polymer Solar Cells
journal, June 2010
- Li, Shao-Sian; Tu, Kun-Hua; Lin, Chih-Cheng
- ACS Nano, Vol. 4, Issue 6, p. 3169-3174
Toward Solar Fuels: Photocatalytic Conversion of Carbon Dioxide to Hydrocarbons
journal, February 2010
- Roy, Somnath C.; Varghese, Oomman K.; Paulose, Maggie
- ACS Nano, Vol. 4, Issue 3
Effective Utilization of Visible Light (Including λ > 600 nm) in Phenol Degradation with p-Silicon Nanowire/TiO 2 Core/Shell Heterojunction Array Cathode
journal, October 2009
- Yu, Hongtao; Li, Xinyong; Quan, Xie
- Environmental Science & Technology, Vol. 43, Issue 20
Nanostructured black silicon and the optical reflectance of graded-density surfaces
journal, June 2009
- Branz, Howard M.; Yost, Vernon E.; Ward, Scott
- Applied Physics Letters, Vol. 94, Issue 23
Efficient black silicon solar cell with a density-graded nanoporous surface: Optical properties, performance limitations, and design rules
journal, September 2009
- Yuan, Hao-Chih; Yost, Vernon E.; Page, Matthew R.
- Applied Physics Letters, Vol. 95, Issue 12
Multi-scale surface texture to improve blue response of nanoporous black silicon solar cells
journal, September 2011
- Toor, Fatima; Branz, Howard M.; Page, Matthew R.
- Applied Physics Letters, Vol. 99, Issue 10
Metal-assisted electrochemical etching of silicon
journal, October 2010
- Huang, Z. P.; Geyer, N.; Liu, L. F.
- Nanotechnology, Vol. 21, Issue 46
Patterning of various silicon structures via polymer lithography and catalytic chemical etching
journal, May 2011
- Lee, Jung-Pil; Bang, Byoung Man; Choi, Sinho
- Nanotechnology, Vol. 22, Issue 27
Metal-assisted chemical etching in HF/H2O2 produces porous silicon
journal, October 2000
- Li, X.; Bohn, P. W.
- Applied Physics Letters, Vol. 77, Issue 16
Nano-sized Taper Structure Formed by Wet Process Using Catalysis of Gold Nanoparticle
journal, January 2007
- Nishioka, Kensuke; Horita, Susumu
- MRS Proceedings, Vol. 1059
Works referencing / citing this record:
Article with gradient property and processes for selective etching
patent, February 2017
- Hildreth, Owen
- US Patent Document 9,580,809