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Title: Lateral displacement and rotational displacement sensor

Abstract

A position measuring sensor formed from opposing sets of capacitor plates measures both rotational displacement and lateral displacement from the changes in capacitances as overlapping areas of capacitors change. Capacitances are measured by a measuring circuit. The measured capacitances are provided to a calculating circuit that performs calculations to obtain angular and lateral displacement from the capacitances measured by the measuring circuit.

Inventors:
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1129382
Patent Number(s):
8,704,536
Application Number:
13/002,762
Assignee:
The Regents of the University of California (Oakland, CA)
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Resource Relation:
Patent File Date: 2009 Jul 28
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Duden, Thomas. Lateral displacement and rotational displacement sensor. United States: N. p., 2014. Web.
Duden, Thomas. Lateral displacement and rotational displacement sensor. United States.
Duden, Thomas. Tue . "Lateral displacement and rotational displacement sensor". United States. https://www.osti.gov/servlets/purl/1129382.
@article{osti_1129382,
title = {Lateral displacement and rotational displacement sensor},
author = {Duden, Thomas},
abstractNote = {A position measuring sensor formed from opposing sets of capacitor plates measures both rotational displacement and lateral displacement from the changes in capacitances as overlapping areas of capacitors change. Capacitances are measured by a measuring circuit. The measured capacitances are provided to a calculating circuit that performs calculations to obtain angular and lateral displacement from the capacitances measured by the measuring circuit.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {4}
}

Patent:

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Works referenced in this record:

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Precise motion control of a nanopositioning PZT microstage using integrated capacitive displacement sensors
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