Removing a sheet from the surface of a melt using gas jets
Abstract
In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.
- Inventors:
- Issue Date:
- Research Org.:
- Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1129068
- Patent Number(s):
- 8685162
- Application Number:
- 13/037,789
- Assignee:
- Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- EE0000595
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 Mar 01
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Kellerman, Peter L., Thronson, Gregory D., and Sun, Dawei. Removing a sheet from the surface of a melt using gas jets. United States: N. p., 2014.
Web.
Kellerman, Peter L., Thronson, Gregory D., & Sun, Dawei. Removing a sheet from the surface of a melt using gas jets. United States.
Kellerman, Peter L., Thronson, Gregory D., and Sun, Dawei. Tue .
"Removing a sheet from the surface of a melt using gas jets". United States. https://www.osti.gov/servlets/purl/1129068.
@article{osti_1129068,
title = {Removing a sheet from the surface of a melt using gas jets},
author = {Kellerman, Peter L. and Thronson, Gregory D. and Sun, Dawei},
abstractNote = {In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 01 00:00:00 EDT 2014},
month = {Tue Apr 01 00:00:00 EDT 2014}
}
Works referenced in this record:
Method for producing solid ribbons
patent, September 1980
- Nowak, Welville B.
- US Patent Document 4,221,754
Lateral pulling growth of crystal ribbons and apparatus therefor
patent, April 1981
- Shudo, Taro; Kudo, Bosshi; Tamai, Yasuhiro
- US Patent Document 4,264,407
Method and apparatus for producing crystalline ribbons
patent, September 1981
- Jewett, David N.
- US Patent Document 4,289,571
Lateral pulling growth of crystal ribbons
patent, May 1982
- Kudo, Bosshi
- US Patent Document 4,329,195
Melt dumping in string stabilized ribbon growth
patent, December 1986
- Sachs, Emanuel M.
- US Patent Document 4,627,887
Method and apparatus for the production of crystalline silicon substrates
patent, October 2009
- Clark, Roger F.
- US Patent Document 7,608,146
Method and apparatus for producing a dislocation-free crystalline sheet
patent, October 2010
- Kellerman, Peter L.; Sinclair, Frank; Carlson, Frederick M.
- US Patent Document 7,816,153
Floating sheet production apparatus and method
patent, December 2010
- Kellerman, Peter L.; Sinclair, Frank
- US Patent Document 7,855,087
Floating Sheet Production Apparatus and Method
patent-application, September 2009
- Kellerman, Peter L.; Sinclair, Frank
- US Patent Document 12/403206; 20090233396
Controlling Transport of Gas Borne Contaminants Across a Ribbon Surface
patent-application, December 2009
- Harvey, David; Huang, Weidong; Reitsma, Scott
- US Patent Application 12/542131; 20090301386
Method and Apparatus for the Production of Crystalline Silicon Substrates
patent-application, February 2010
- Clark, Roger F.
- US Patent Application 12/576614; 20100025885
Investigation of the meniscus stability in horizontal crystal ribbon growth
journal, September 1980
- Rhodes, C. A.; Sarraf, M. M.; Liu, C. H.
- Journal of Crystal Growth, Vol. 50, Issue 1, p. 94-101
Improvements in the Horizontal Ribbon Growth technique for single crystal silicon
journal, September 1980
- Kudo, B.
- Journal of Crystal Growth, Vol. 50, Issue 1, p. 247-259