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Title: Removing a sheet from the surface of a melt using gas jets

Abstract

In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.

Inventors:
; ;
Issue Date:
Research Org.:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1129068
Patent Number(s):
8685162
Application Number:
13/037,789
Assignee:
Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
Patent Classifications (CPCs):
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
DOE Contract Number:  
EE0000595
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 Mar 01
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Kellerman, Peter L., Thronson, Gregory D., and Sun, Dawei. Removing a sheet from the surface of a melt using gas jets. United States: N. p., 2014. Web.
Kellerman, Peter L., Thronson, Gregory D., & Sun, Dawei. Removing a sheet from the surface of a melt using gas jets. United States.
Kellerman, Peter L., Thronson, Gregory D., and Sun, Dawei. Tue . "Removing a sheet from the surface of a melt using gas jets". United States. https://www.osti.gov/servlets/purl/1129068.
@article{osti_1129068,
title = {Removing a sheet from the surface of a melt using gas jets},
author = {Kellerman, Peter L. and Thronson, Gregory D. and Sun, Dawei},
abstractNote = {In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 01 00:00:00 EDT 2014},
month = {Tue Apr 01 00:00:00 EDT 2014}
}

Works referenced in this record:

Method for producing solid ribbons
patent, September 1980


Lateral pulling growth of crystal ribbons and apparatus therefor
patent, April 1981


Method and apparatus for producing a dislocation-free crystalline sheet
patent, October 2010


Floating sheet production apparatus and method
patent, December 2010


Floating Sheet Production Apparatus and Method
patent-application, September 2009


Controlling Transport of Gas Borne Contaminants Across a Ribbon Surface
patent-application, December 2009


Method and Apparatus for the Production of Crystalline Silicon Substrates
patent-application, February 2010


Investigation of the meniscus stability in horizontal crystal ribbon growth
journal, September 1980


Improvements in the Horizontal Ribbon Growth technique for single crystal silicon
journal, September 1980