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Title: Optically transduced MEMS magnetometer

Abstract

MEMS magnetometers with optically transduced resonator displacement are described herein. Improved sensitivity, crosstalk reduction, and extended dynamic range may be achieved with devices including a deflectable resonator suspended from the support, a first grating extending from the support and disposed over the resonator, a pair of drive electrodes to drive an alternating current through the resonator, and a second grating in the resonator overlapping the first grating to form a multi-layer grating having apertures that vary dimensionally in response to deflection occurring as the resonator mechanically resonates in a plane parallel to the first grating in the presence of a magnetic field as a function of the Lorentz force resulting from the alternating current. A plurality of such multi-layer gratings may be disposed across a length of the resonator to provide greater dynamic range and/or accommodate fabrication tolerances.

Inventors:
;
Issue Date:
Research Org.:
SNL (Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States))
Sponsoring Org.:
USDOE
OSTI Identifier:
1127102
Patent Number(s):
8,674,689
Application Number:
13/326,139
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Nielson, Gregory N, and Langlois, Eric. Optically transduced MEMS magnetometer. United States: N. p., 2014. Web.
Nielson, Gregory N, & Langlois, Eric. Optically transduced MEMS magnetometer. United States.
Nielson, Gregory N, and Langlois, Eric. Tue . "Optically transduced MEMS magnetometer". United States. https://www.osti.gov/servlets/purl/1127102.
@article{osti_1127102,
title = {Optically transduced MEMS magnetometer},
author = {Nielson, Gregory N and Langlois, Eric},
abstractNote = {MEMS magnetometers with optically transduced resonator displacement are described herein. Improved sensitivity, crosstalk reduction, and extended dynamic range may be achieved with devices including a deflectable resonator suspended from the support, a first grating extending from the support and disposed over the resonator, a pair of drive electrodes to drive an alternating current through the resonator, and a second grating in the resonator overlapping the first grating to form a multi-layer grating having apertures that vary dimensionally in response to deflection occurring as the resonator mechanically resonates in a plane parallel to the first grating in the presence of a magnetic field as a function of the Lorentz force resulting from the alternating current. A plurality of such multi-layer gratings may be disposed across a length of the resonator to provide greater dynamic range and/or accommodate fabrication tolerances.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {3}
}

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Works referenced in this record:

In-Plane Nano-G Accelerometer Based on an Optical Resonant Detection System
conference, June 2007

  • Krishnamoorthy, U.; Carr, D. W.; Bogart, G. R.
  • TRANSDUCERS '07 & Eurosensors XXI. 2007 14th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
  • DOI: 10.1109/SENSOR.2007.4300350