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Title: Automated cassette-to-cassette substrate handling system

Abstract

An automated cassette-to-cassette substrate handling system includes a cassette storage module for storing a plurality of substrates in cassettes before and after processing. A substrate carrier storage module stores a plurality of substrate carriers. A substrate carrier loading/unloading module loads substrates from the cassette storage module onto the plurality of substrate carriers and unloads substrates from the plurality of substrate carriers to the cassette storage module. A transport mechanism transports the plurality of substrates between the cassette storage module and the plurality of substrate carriers and transports the plurality of substrate carriers between the substrate carrier loading/unloading module and a processing chamber. A vision system recognizes recesses in the plurality of substrate carriers corresponding to empty substrate positions in the substrate carrier. A processor receives data from the vision system and instructs the transport mechanism to transport substrates to positions on the substrate carrier in response to the received data.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Veeco Instruments Inc., Plainview, NY, USA
Sponsoring Org.:
USDOE
OSTI Identifier:
1127094
Patent Number(s):
8676375
Application Number:
13/406,076
Assignee:
Veeco Instruments Inc. (Plainview, NY)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
EE0003252
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Kraus, Joseph Arthur, Boyer, Jeremy James, Mack, Joseph, DeChellis, Michael, and Koo, Michael. Automated cassette-to-cassette substrate handling system. United States: N. p., 2014. Web.
Kraus, Joseph Arthur, Boyer, Jeremy James, Mack, Joseph, DeChellis, Michael, & Koo, Michael. Automated cassette-to-cassette substrate handling system. United States.
Kraus, Joseph Arthur, Boyer, Jeremy James, Mack, Joseph, DeChellis, Michael, and Koo, Michael. Tue . "Automated cassette-to-cassette substrate handling system". United States. https://www.osti.gov/servlets/purl/1127094.
@article{osti_1127094,
title = {Automated cassette-to-cassette substrate handling system},
author = {Kraus, Joseph Arthur and Boyer, Jeremy James and Mack, Joseph and DeChellis, Michael and Koo, Michael},
abstractNote = {An automated cassette-to-cassette substrate handling system includes a cassette storage module for storing a plurality of substrates in cassettes before and after processing. A substrate carrier storage module stores a plurality of substrate carriers. A substrate carrier loading/unloading module loads substrates from the cassette storage module onto the plurality of substrate carriers and unloads substrates from the plurality of substrate carriers to the cassette storage module. A transport mechanism transports the plurality of substrates between the cassette storage module and the plurality of substrate carriers and transports the plurality of substrate carriers between the substrate carrier loading/unloading module and a processing chamber. A vision system recognizes recesses in the plurality of substrate carriers corresponding to empty substrate positions in the substrate carrier. A processor receives data from the vision system and instructs the transport mechanism to transport substrates to positions on the substrate carrier in response to the received data.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {3}
}

Works referenced in this record:

Substrate transport apparatus with automated alignment
patent-application, March 2007


Processing System for Fabricating Compound Nitride Semiconductor Devices
patent-application, August 2009


System, Methods and Apparatus for Substrate Carrier Content Verification Using a Material Handling System
patent-application, September 2009


Testing Apparatus
patent-application, June 2010


Cluster Tool for LEDS
patent-application, October 2010


End Effector for Handling Substrates
patent-application, November 2010


Vacuum Processing Apparatus and Substrate Transfer Method
patent-application, March 2011