Automated cassette-to-cassette substrate handling system
Abstract
An automated cassette-to-cassette substrate handling system includes a cassette storage module for storing a plurality of substrates in cassettes before and after processing. A substrate carrier storage module stores a plurality of substrate carriers. A substrate carrier loading/unloading module loads substrates from the cassette storage module onto the plurality of substrate carriers and unloads substrates from the plurality of substrate carriers to the cassette storage module. A transport mechanism transports the plurality of substrates between the cassette storage module and the plurality of substrate carriers and transports the plurality of substrate carriers between the substrate carrier loading/unloading module and a processing chamber. A vision system recognizes recesses in the plurality of substrate carriers corresponding to empty substrate positions in the substrate carrier. A processor receives data from the vision system and instructs the transport mechanism to transport substrates to positions on the substrate carrier in response to the received data.
- Inventors:
- Issue Date:
- Research Org.:
- Veeco Instruments Inc., Plainview, NY, USA
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1127094
- Patent Number(s):
- 8676375
- Application Number:
- 13/406,076
- Assignee:
- Veeco Instruments Inc. (Plainview, NY)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- EE0003252
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Kraus, Joseph Arthur, Boyer, Jeremy James, Mack, Joseph, DeChellis, Michael, and Koo, Michael. Automated cassette-to-cassette substrate handling system. United States: N. p., 2014.
Web.
Kraus, Joseph Arthur, Boyer, Jeremy James, Mack, Joseph, DeChellis, Michael, & Koo, Michael. Automated cassette-to-cassette substrate handling system. United States.
Kraus, Joseph Arthur, Boyer, Jeremy James, Mack, Joseph, DeChellis, Michael, and Koo, Michael. Tue .
"Automated cassette-to-cassette substrate handling system". United States. https://www.osti.gov/servlets/purl/1127094.
@article{osti_1127094,
title = {Automated cassette-to-cassette substrate handling system},
author = {Kraus, Joseph Arthur and Boyer, Jeremy James and Mack, Joseph and DeChellis, Michael and Koo, Michael},
abstractNote = {An automated cassette-to-cassette substrate handling system includes a cassette storage module for storing a plurality of substrates in cassettes before and after processing. A substrate carrier storage module stores a plurality of substrate carriers. A substrate carrier loading/unloading module loads substrates from the cassette storage module onto the plurality of substrate carriers and unloads substrates from the plurality of substrate carriers to the cassette storage module. A transport mechanism transports the plurality of substrates between the cassette storage module and the plurality of substrate carriers and transports the plurality of substrate carriers between the substrate carrier loading/unloading module and a processing chamber. A vision system recognizes recesses in the plurality of substrate carriers corresponding to empty substrate positions in the substrate carrier. A processor receives data from the vision system and instructs the transport mechanism to transport substrates to positions on the substrate carrier in response to the received data.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 18 00:00:00 EDT 2014},
month = {Tue Mar 18 00:00:00 EDT 2014}
}
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