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Title: Methods and devices for fabricating and assembling printable semiconductor elements

The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.
Inventors:
; ; ; ; ; ; ;
Issue Date:
OSTI Identifier:
1126915
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL) CHO
Patent Number(s):
8,664,699
Application Number:
13/801,868
Contract Number:
FG02-91ER45439
Research Org:
The Board of Trustees of the University of Illinois, Urbana, IL, USA
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

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  • Landes, Christy F.; Link, Stephan; Mohamed, Mona B.
  • Pure and Applied Chemistry, Vol. 74, Issue 9, p. 1675-1692
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SEMICONDUCTOR NANOWIRES AND NANOTUBES
journal, August 2004

Nanoribbon Waveguides for Subwavelength Photonics Integration
journal, August 2004
  • Law, Matt; Sirbuly, Donald J.; Johnson, Justin C.
  • Science, Vol. 305, Issue 5688, p. 1269-1273
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Simple Route to Large-Scale Ordered Arrays of Liquid-Deposited Carbon Nanotubes
journal, April 2004
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  • Nano Letters, Vol. 4, Issue 4, p. 603-606
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III–V micromachined devices for microsystems
journal, September 1998

Degradation mechanism of diethylene glycol units in a terephthalate polymer
journal, April 2006

Thin film transistors for displays on plastic substrates
journal, August 2000

High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach
journal, January 2003
  • Lee, Y.; Li, Handong; Fonash, S. J.
  • IEEE Electron Device Letters, Vol. 24, Issue 1, p. 19-21
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Organic light-emitting diodes formed by soft contact lamination
journal, January 2004
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  • Proceedings of the National Academy of Sciences, Vol. 101, Issue 2, p. 429-433
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A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems
journal, October 2005
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  • Small, Vol. 1, Issue 12, p. 1164-1168
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Large-Area, Selective Transfer of Microstructured Silicon: A Printing- Based Approach to High-Performance Thin-Film Transistors Supported on Flexible Substrates
journal, October 2005
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  • Advanced Materials, Vol. 17, Issue 19, p. 2332-2336
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Micron and submicron patterning of polydimethylsiloxane resists on electronic materials by decal transfer lithography and reactive ion-beam etching: Application to the fabrication of high-mobility, thin-film transistors
journal, October 2006
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  • Journal of Applied Physics, Vol. 100, Issue 8, Article No. 084907
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Fabrication of Stable Metallic Patterns Embedded in Poly(dimethylsiloxane) and Model Applications in Non-Planar Electronic and Lab-on-a-Chip Device Patterning
journal, April 2005
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  • Advanced Functional Materials, Vol. 15, Issue 4, p. 557-566
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The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon
journal, December 1999
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  • Journal of Microelectromechanical Systems, Vol. 8, Issue 4, p. 409-416
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Application of carbon nanotubes to field emission displays
journal, February 2001

Weave Patterned Organic Transistors on Fiber for E-Textiles
journal, February 2005
  • Lee, J. B.; Subramanian, V.
  • IEEE Transactions on Electron Devices, Vol. 52, Issue 2, p. 269-275
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Tetherless thermobiochemically actuated microgrippers
journal, January 2009
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  • Proceedings of the National Academy of Sciences, Vol. 106, Issue 3, p. 703-708
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Functionalized silicon membranes for selective bio-organism capture
journal, April 2003
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  • Nature Materials, Vol. 2, Issue 6, p. 391-395
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High-Resolution Contact Printing with Dendrimers
journal, April 2002
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  • Nano Letters, Vol. 2, Issue 4, p. 347-349
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Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus
journal, October 2003
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  • Applied Physics Letters, Vol. 83, Issue 15, p. 3081-3083
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Electrospinning of Nanofibers: Reinventing the Wheel?
journal, July 2004

Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment
journal, April 2006
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  • The Journal of Physical Chemistry B, Vol. 110, Issue 13, p. 6759-6762
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Compliant thin film patterns of stiff materials as platforms for stretchable electronics
journal, December 2005
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ZnO nanobelts grown on Si substrate
journal, July 2002
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  • Applied Physics Letters, Vol. 81, Issue 1, p. 144-146
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The Incredible Shrinking Circuit
journal, September 2001

Nanoscale Science and Technology: Building a Big Future from Small Things
journal, July 2003