DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Methods and devices for fabricating and assembling printable semiconductor elements

Abstract

The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.

Inventors:
; ; ; ; ; ; ;
Issue Date:
Research Org.:
The Board of Trustees of the University of Illinois, Urbana, IL, USA
Sponsoring Org.:
USDOE
OSTI Identifier:
1126915
Patent Number(s):
8664699
Application Number:
13/801,868
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02P - CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Nuzzo, Ralph G, Rogers, John A, Menard, Etienne, Lee, Keon Jae, Khang, Dahl-Young, Sun, Yugang, Meitl, Matthew, and Zhu, Zhengtao. Methods and devices for fabricating and assembling printable semiconductor elements. United States: N. p., 2014. Web.
Nuzzo, Ralph G, Rogers, John A, Menard, Etienne, Lee, Keon Jae, Khang, Dahl-Young, Sun, Yugang, Meitl, Matthew, & Zhu, Zhengtao. Methods and devices for fabricating and assembling printable semiconductor elements. United States.
Nuzzo, Ralph G, Rogers, John A, Menard, Etienne, Lee, Keon Jae, Khang, Dahl-Young, Sun, Yugang, Meitl, Matthew, and Zhu, Zhengtao. Tue . "Methods and devices for fabricating and assembling printable semiconductor elements". United States. https://www.osti.gov/servlets/purl/1126915.
@article{osti_1126915,
title = {Methods and devices for fabricating and assembling printable semiconductor elements},
author = {Nuzzo, Ralph G and Rogers, John A and Menard, Etienne and Lee, Keon Jae and Khang, Dahl-Young and Sun, Yugang and Meitl, Matthew and Zhu, Zhengtao},
abstractNote = {The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {3}
}

Works referenced in this record:

Optics: Electronic eyeballs
journal, August 2008


Stretchable and Washable Electronics for Embedding in Textiles
journal, January 2010


High pressure–high temperature growth of diamond crystals using split sphere apparatus
journal, November 2005


Chemical Etching of InGaAsP/InP DH Wafer
journal, January 1982


Stretchable gold conductors embedded in PDMS and patterned by photolithography: fabrication and electromechanical characterization
journal, April 2010


Aligned growth of isolated single-walled carbon nanotubes programmed by atomic arrangement of substrate surface
journal, June 2005


Synthesis of horizontally-aligned single-walled carbon nanotubes with controllable density on sapphire surface and polarized Raman spectroscopy
journal, April 2006


Bendable integrated circuits on plastic substrates by use of printed ribbons of single-crystalline silicon
journal, May 2007


Heterogeneous Three-Dimensional Electronics by Use of Printed Semiconductor Nanomaterials
journal, December 2006


High-speed mechanically flexible single-crystal silicon thin-film transistors on plastic substrates
journal, June 2006


Nanoindentation testing of SU-8 photoresist mechanical properties
journal, May 2008


Semiconductor Clusters, Nanocrystals, and Quantum Dots
journal, February 1996


From Molecules to Materials: Current Trends and Future Directions
journal, November 1998


Nanomaterial transfer using hot embossing for flexible electronic devices
journal, February 2006


A review of 3-D packaging technology
journal, February 1998

  • Al-Sarawi, S. F.; Abbott, D.; Franzon, P. D.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B, Vol. 21, Issue 1, p. 2-14
  • https://doi.org/10.1109/96.659500

Silk-based biomaterials
journal, February 2003


Metalorganic vapor phase epitaxial growth of a high quality GaN film using an AlN buffer layer
journal, February 1986


Silicon motherboards for multichannel optical modules
journal, March 1996

  • Ambrosy, A.; Richter, H.; Hehmann, J.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A, Vol. 19, Issue 1, p. 34-40
  • https://doi.org/10.1109/95.486559

The influence of helium-neon laser irradiation on the viability of skin flaps in the rat
journal, January 2000


Spectral analysis of induced color change on periodically nanopatterned silk films
journal, January 2009


Selecting the signals for a brain–machine interface
journal, December 2004


Self-aligned self-assembly process for fabricating organic thin-film transistors
journal, September 2004


Thermal transport and grain boundary conductance in ultrananocrystalline diamond thin films
journal, June 2006


Microassembly of semiconductor three-dimensional photonic crystals
journal, January 2003


Field-Effect Transistors Based on Single Semiconducting Oxide Nanobelts
journal, January 2003


Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher
journal, January 1999


Semiconductor Wires and Ribbons for High‐ Performance Flexible Electronics
journal, July 2008


Logic Circuits with Carbon Nanotube Transistors
journal, October 2001


Single-crystalline gallium nitride nanobelts
journal, July 2002


Diffusion of Alkanethiols in PDMS and Its Implications on Microcontact Printing (μCP)
journal, January 2005


3-D ICs: a novel chip design for improving deep-submicrometer interconnect performance and systems-on-chip integration
journal, May 2001


High-Performance Plastic Transistors Fabricated by Printing Techniques
journal, June 1997


Printable organic and polymeric semiconducting materials and devices
journal, January 1999


Adherence, friction and wear of rubber-like materials
journal, October 1992


Polymer-Polymer Phase Behavior
journal, February 1991


Colloidal Two-Dimensional Systems: CdSe Quantum Shells and Wells
journal, October 2003


Biological applications of high aspect ratio nanoparticles
journal, January 2004


Tailored Micropatterns through Weak Polyelectrolyte Stamping
journal, March 2003


Printing Patterns of Proteins
journal, April 1998


III-V compounds for solar cell applications
journal, June 1999


Free-standing and vertically aligned InP nanowires grown by metalorganic vapor phase epitaxy
journal, March 2004


Multiwalled carbon nanotube AFM probes for surface characterization of micro/nanostructures
journal, November 2004


Conformal contact and pattern stability of stamps used for soft lithography
journal, June 2000


Temperature coefficient of the surface resistivity of two-dimensional island gold films
journal, September 2000


Large area, high resolution, dry printing of conducting polymers for organic electronics
journal, January 2003


Preparation of Ceramic Inks for Solid Freeforming Using a Continuous Jet Printer
journal, November 1999


Surface-induced structure formation of polymer blends on patterned substrates
journal, February 1998


Magnetic self-assembly of three-dimensional surfaces from planar sheets
journal, March 2005


Templated Self-Assembly: Formation of Folded Structures by Relaxation of Pre-stressed, Planar Tapes
journal, March 2005


Self-Assembly of Mesoscale Objects into Ordered Two-Dimensional Arrays
journal, April 1997


Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer
journal, May 1998


Molecule-Mimetic Chemistry and Mesoscale Self-Assembly
journal, December 2000


Shaped Films of Ionotropic Hydrogels Fabricated Using Templates of Patterned Paper
journal, January 2009


Flexible Nanotube Electronics
journal, October 2003


Microstructural defect characterisation of a-Si:H deposited by low temperature HW-CVD on paper substrates
journal, April 2006


Heterogeneous materials integration: compliant substrates to active device and materials packaging
journal, December 2001


The Adhesion Between Polymers
journal, August 1991


Micromachined silicon suspended wires with submicrometric dimensions
journal, September 2001


High-frequency ultrasound array element using thermoelastic expansion in an elastomeric film
journal, July 2001


Single Etch Patterning of Stacked Silver and Molybdenum Alloy Layers on Glass Using Microcontact Wave Printing
journal, August 2005

  • Burdinski, Dirk; Brans, Harold J. A.; Decre, Michel M. J.
  • Journal of the American Chemical Society, Vol. 127, Issue 31, p. 10786-10787
  • https://doi.org/10.1021/ja0523791

X-ray holography for VLSI using synthetic bilevel holograms
conference, August 1997


Large Area Submicrometer Contact Printing Using a Contact Aligner
journal, June 2000


Fabrication of photonic crystals for the visible spectrum by holographic lithography
journal, March 2000


Transparent flexible organic thin-film transistors that use printed single-walled carbon nanotube electrodes
journal, March 2006


Medium-scale carbon nanotube thin-film integrated circuits on flexible plastic substrates
journal, July 2008


Measurement of nanomechanical resonant structures in single-crystal silicon
journal, December 1998

  • Carr, D. W.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 6, p. 3821-3824
  • https://doi.org/10.1116/1.590416

Characterization of Pd–GaAs Schottky diodes prepared by the electroless plating technique
journal, May 2003


Electronic paper: Flexible active-matrix electronic ink display
journal, May 2003


InGaN nanorings and nanodots by selective area epitaxy
journal, October 2005


The Role of Metal−Nanotube Contact in the Performance of Carbon Nanotube Field-Effect Transistors
journal, July 2005


Complementary carbon nanotube-gated carbon nanotube thin-film transistor
journal, February 2006


Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)
journal, June 2002


A family of herringbone patterns in thin films
journal, March 2004


An Integrated Logic Circuit Assembled on a Single Carbon Nanotube
journal, March 2006


Herringbone Buckling Patterns of Compressed Thin Films on Compliant Substrates
journal, November 2004


Ink-Jet Printing, Self-Assembled Polyelectrolytes, and Electroless Plating: Low Cost Fabrication of Circuits on a Flexible Substrate at Room Temperature
journal, February 2005


Decal Transfer Microlithography: A New Soft-Lithographic Patterning Method
journal, November 2002


Masterless Soft Lithography:  Patterning UV/Ozone−Induced Adhesion on Poly(dimethylsiloxane) Surfaces
journal, October 2005


Patterning of Thin-Film Microstructures on Non-Planar Substrate Surfaces Using Decal Transfer Lithography
journal, August 2004


Biaxially Stretchable “Wavy” Silicon Nanomembranes
journal, June 2007


Simple Detachment Patterning of Organic Layers and Its Application to Organic Light-Emitting Diodes
journal, January 2005


An Orientation-Controlled Pentacene Film Aligned by Photoaligned Polyimide for Organic Thin-Film Transistor Applications
journal, August 2004


Micromachining on (111)-oriented silicon
journal, June 1999


High-performance organic thin-film transistors with metal oxide/metal bilayer electrode
journal, November 2005


Silicon nanowire devices
journal, April 2000


A study on formation of Al and Al2O3 on the porous paper by DC magnetron sputtering
journal, July 2003


Directional differences of impulse spread in trabecular muscle from mammalian heart.
journal, February 1976


Flexible electrical recording from cells using nanowire transistor arrays
journal, April 2009


Patterned Growth and Transfer of ZnO Micro and Nanocrystals with Size and Location Control
journal, April 2008


Engineering Carbon Nanotubes and Nanotube Circuits Using Electrical Breakdown
journal, April 2001


Photobiomodulation on the Angiogenesis of Skin Wounds in Rats Using Different Light Sources
journal, April 2007


The elasticity and strength of paper and other fibrous materials
journal, March 1952


Design and Performance of Inkjet Print Heads for Non-Graphic-Arts Applications
journal, November 2003


Large-scale complementary integrated circuits based on organic transistors
journal, February 2000


Low-temperature single-crystal Si TFTs fabricated on Si films processed via sequential lateral solidification
journal, August 1998


Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species
journal, August 2001


Gallium Oxide Nanoribbons and Nanosheets
journal, February 2002


Novel Nanostructures of Functional Oxides Synthesized by Thermal Evaporation
journal, January 2003


Inkjet Printing of Polymers: State of the Art and Future Developments
journal, February 2004


Electro-optical response of a single-crystal diamond ultraviolet photoconductor in transverse configuration
journal, May 2005


Organic single-crystal field-effect transistors
journal, May 2004


Electrical Characterization of Polymer-Based FETs Fabricated by Spin-Coating Poly(3-alkylthiophene)s
journal, November 2004


Stability of molded polydimethylsiloxane microstructures
journal, January 1997


Adhesion at the Solid-Elastomer Interface: Influence of the Interfacial Chains
journal, October 1995


Carbon Nanotube Inter- and Intramolecular Logic Gates
journal, September 2001


Nanopore Technology for Biomedical Applications
journal, February 1999


Synthesis of branched 'nanotrees' by controlled seeding of multiple branching events
journal, May 2004


High-Efficiency Multijunction Solar Cells
journal, March 2007


Self-Catalysis and Phase Transformation in the Formation of CdSe Nanosaws
journal, October 2004


Colloidosomes: Selectively Permeable Capsules Composed of Colloidal Particles
journal, November 2002


Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography
journal, March 2003


Organic and polymer transistors for electronics
journal, April 2006


Organic Transistors: Two-Dimensional Transport and Improved Electrical Characteristics
journal, April 1995


General Synthesis of Compound Semiconductor Nanowires
journal, February 2000


High-performance thin-film transistors using semiconductor nanowires and nanoribbons
journal, September 2003


Polarized Raman Spectroscopy on Isolated Single-Wall Carbon Nanotubes
journal, December 2000


Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)
journal, October 1998


History, Development, and Applications of High-Brightness Visible Light-Emitting Diodes
journal, May 2008


Extraordinary Mobility in Semiconducting Carbon Nanotubes
journal, January 2004


Organic electronics on paper
journal, April 2004


Polymer-Based Photonic Crystals
journal, March 2001


Surface Modification of Sylgard-184 Poly(dimethyl siloxane) Networks by Ultraviolet and Ultraviolet/Ozone Treatment
journal, October 2002


Free standing single-crystal silicon microstructures
journal, March 1995


An elastomeric conductor based on polyaniline prepared by mechanical mixing
journal, September 1999


Block copolymers as photonic bandgap materials
journal, November 1999


Wafer-level in-registry microstamping
journal, March 1999


Influence of hydrogen treatment and annealing processes upon the Schottky barrier height of Au/n-GaAs and Ti/n-GaAs diodes
journal, October 2004


The path to ubiquitous and low-cost organic electronic appliances on plastic
journal, April 2004


Flexible a-Si:H Position-Sensitive Detectors
journal, July 2005


High-Performance Flexible Hybrid Field-Effect Transistors Based on Cellulose Fiber Paper
journal, September 2008


Spatial spectral analysis of human electrocorticograms including the alpha and gamma bands
journal, February 2000


Thermal stability of polyethylene terephthalate (PET): oligomer distribution and formation of volatiles
journal, January 1999


The mechanics of electronic materials
journal, September 1999


Nanotechnology: High-speed integrated nanowire circuits
journal, April 2005


Patterning of diamond microstructures on Si substrate by bulk and surface micromachining
journal, January 2003


The formation of controlled-porosity membranes from anodically oxidized aluminium
journal, January 1989


Preparation of thin-film transistors with chemical bath deposited CdSe and CdS thin films
journal, January 2002


Conversion of Zinc Oxide Nanobelts into Superlattice-Structured Nanohelices
journal, September 2005


Etchant Anisotropy Controls the Step Bunching Instability in KOH Etching of Silicon
journal, October 2004


All-Polymer Field-Effect Transistor Realized by Printing Techniques
journal, September 1994


The rise of graphene
journal, March 2007


Fabrication of Metal Nanowires Using Microcontact Printing
journal, July 2003


Selective wet-etching of microcontact-printed Cu substrates with control over the etch profile
journal, June 2003


High-performance all-polymer integrated circuits
journal, September 2000


Flexible active-matrix displays and shift registers based on solution-processed organic transistors
journal, January 2004


Wafer-scale integration of GaAs optoelectronic devices with standard Si integrated circuits using a low-temperature bonding procedure
journal, December 2002


Microcontact Printing of Alkanephosphonic Acids on Aluminum: Pattern Transfer by Wet Chemical Etching
journal, February 1999


Correlation of buffer strain relaxation modes with transport properties of two‐dimensional electron gases
journal, December 1996


Hole mobility in organic single crystals measured by a “flip-crystal” field-effect technique
journal, August 2004


Optimization, Constraint, and History in the Evolution of Eyes
journal, September 1990


Atomic Force Microscopy of Atomic-Scale Ledges and Etch Pits Formed During Dissolution of Quartz
journal, March 1991


Screen printed organic thin film transistors (OTFTs) on a flexible substrate
conference, December 2001


High-Conductivity Elastomeric Electronics
journal, March 2004


Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions
journal, March 1994


Synthetic Control of the Diameter and Length of Single Crystal Semiconductor Nanowires
journal, May 2001


Metal–insulator–semiconductor electrostatics of carbon nanotubes
journal, August 2002


Air-Stable All-Inorganic Nanocrystal Solar Cells Processed from Solution
journal, October 2005


Diamond semiconductor technology for RF device applications
journal, July 2005


Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry
journal, April 2002


Low-voltage organic transistors with an amorphous molecular gate dielectric
journal, October 2004


Towards woven logic from organic electronic fibres
journal, April 2007


Field-Effect Mobility of Organic Polymer Thin-Film Transistors
journal, October 2004


Template-Free Directional Growth of Single-Walled Carbon Nanotubes on a- and r-Plane Sapphire
journal, April 2005


Catalytic Amplification of the Soft Lithographic Patterning of Si. Nonelectrochemical Orthogonal Fabrication of Photoluminescent Porous Si Pixel Arrays
journal, September 2001


4 W single-transverse mode VECSEL utilising intra-cavity diamond heat spreader
journal, January 2006


Photoangioplasty with local motexafin lutetium delivery reduces macrophages in a rabbit post-balloon injury model
journal, February 2001


Si Nanowire Bridges in Microtrenches: Integration of Growth into Device Fabrication
journal, September 2005


Steps and the structure of the (0001) α-alumina surface
journal, January 1997


Nanoscale Hydrophobic Recovery: A Chemical Force Microscopy Study of UV/Ozone-Treated Cross-Linked Poly(dimethylsiloxane)
journal, February 2004


Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates
journal, April 2005


A MEMS fabricated flexible electrode array for recording surface field potentials
journal, May 2006


Control of Thickness and Orientation of Solution-Grown Silicon Nanowires
journal, February 2000


In vitro degradation of silk fibroin
journal, June 2005


Contact Electrification and Adhesion Between Dissimilar Materials
journal, April 1992


Semiconductor nanotube formation by a two-step template process
journal, October 1996


Collapse of stamps for soft lithography due to interfacial adhesion
journal, April 2005


Amorphous Si TFTs on plastically deformed spherical domes
journal, April 2002


Nature of electrical contacts in a metal–molecule–semiconductor system
journal, March 2003

  • Hsu, J. W. P.; Loo, Y. L.; Lang, D. V.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 4, p. 1928-1935
  • https://doi.org/10.1116/1.1588641

Spherical deformation of compliant substrates with semiconductor device islands
journal, January 2004


Effects of Mechanical Strain on TFTs on Spherical Domes
journal, March 2004


Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors
journal, October 1997


Chemistry and Physics in One Dimension: Synthesis and Properties of Nanowires and Nanotubes
journal, February 1999


Percolation in Transparent and Conducting Carbon Nanotube Networks
journal, December 2004


Highly conductive paper for energy-storage devices
journal, December 2009


Stretchable, Porous, and Conductive Energy Textiles
journal, February 2010


Directed Assembly of One-Dimensional Nanostructures into Functional Networks
journal, January 2001


Room-Temperature Ultraviolet Nanowire Nanolasers
journal, June 2001


Growth of Millimeter-Long and Horizontally Aligned Single-Walled Carbon Nanotubes on Flat Substrates
journal, May 2003


Long and Oriented Single-Walled Carbon Nanotubes Grown by Ethanol Chemical Vapor Deposition
journal, October 2004


Self-organizing high-density single-walled carbon nanotube arrays from surfactant suspensions
journal, August 2004


Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication
journal, December 2005


Nanowires for Integrated Multicolor Nanophotonics
journal, October 2004


Stamp Collapse in Soft Lithography
journal, August 2005


Catalytic Growth of Zinc Oxide Nanowires by Vapor Transport
journal, January 2001


Ordering of Spontaneously Formed Buckles on Planar Surfaces
journal, April 2000


Guided molecular self-assembly: a review of recent efforts
journal, March 2003


Plastic transistors in active-matrix displays
conference, January 2003


Printed thin-film transistors and complementary logic gates that use polymer-coated single-walled carbon nanotube networks
journal, December 2005


Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates
journal, October 2005


Extreme bendability of single-walled carbon nanotube networks transferred from high-temperature growth substrates to plastic and their use in thin-film transistors
journal, June 2005


Mixed Mode Cracking in Layered Materials
book, January 1991


Excimer laser induced crystallization of amorphous silicon on flexible polymer substrates
journal, September 2005


High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond
journal, September 2002


High Weight Fraction Surfactant Solubilization of Single-Wall Carbon Nanotubes in Water
journal, February 2003


Atomic-Step-Templated Formation of Single Wall Carbon Nanotube Patterns
journal, November 2004


Cathodoluminescence Properties of Undoped and Zn-Doped AlxGa1-xN Grown by Metalorganic Vapor Phase Epitaxy
journal, August 1991


Screen printing for the fabrication of organic light-emitting devices
journal, January 2001


Submicrometer Patterning of Charge in Thin-Film Electrets
journal, March 2001


Fabrication of a Cylindrical Display by Patterned Assembly
journal, April 2002


III–nitrides: Growth, characterization, and properties
journal, February 2000


Patterned Protein Layers on Solid Substrates by Thin Stamp Microcontact Printing
journal, February 1998


Lateral growth of aligned mutilwalled carbon nanotubes under electric field
journal, May 2003


Low-voltage and high-field-effect mobility organic transistors with a polymer insulator
journal, February 2006


High-κ dielectrics for advanced carbon-nanotube transistors and logic gates
journal, November 2002


High Performance n-Type Carbon Nanotube Field-Effect Transistors with Chemically Doped Contacts
journal, February 2005


Ballistic carbon nanotube field-effect transistors
journal, August 2003


Gallium Arsenide Transistors: Realization Through a Molecularly Designed Insulator
journal, March 1994


Patterning of dielectric oxide thin layers by microcontact printing of self-assembled monolayers
journal, December 1995


Structural and Mechanical Properties of Woven Fabrics Employing Peirce's Model
journal, October 2003


Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks
journal, August 2004


Three-Dimensional Nanofabrication with Rubber Stamps and Conformable Photomasks
journal, August 2004


Finite deformation mechanics in buckled thin films on compliant supports
journal, September 2007


Preparation of Macroporous Metal Films from Colloidal Crystals
journal, September 1999


Polymer-on-Polymer Stamping: Universal Approaches to Chemically Patterned Surfaces
journal, April 2002


Mechanical Properties of Robust Ultrathin Silk Fibroin Films
journal, September 2007


Scalable Interconnection and Integration of Nanowire Devices without Registration
journal, May 2004


Soft lithographic fabrication of an image sensor array on a curved substrate
journal, October 2004

  • Jin, Hyun-Chul; Abelson, John R.; Erhardt, Martin K.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 5, p. 2548-2551
  • https://doi.org/10.1116/1.1795249

Water-Stable Silk Films with Reduced β-Sheet Content
journal, August 2005


Biomaterial Films of Bombyx Mori Silk Fibroin with Poly(ethylene oxide)
journal, May 2004


Electronics using hybrid-molecular and mono-molecular devices
journal, November 2000


Ordered Mesoporous Polymers of Tunable Pore Size from Colloidal Silica Templates
journal, February 1999


Stretchable wavy metal interconnects
journal, July 2004

  • Jones, Joyelle; Lacour, Stephanie P.; Wagner, Sigurd
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 22, Issue 4, p. 1723-1725
  • https://doi.org/10.1116/1.1756879

Low-Temperature Solution-Phase Synthesis of Quantum Well Structured CdSe Nanoribbons
journal, May 2006


Nanostructured advanced materials. Perspectives and directions
journal, January 2002


Organic-Inorganic Hybrid Materials as Semiconducting Channels in Thin-Film Field-Effect Transistors
journal, October 1999


Patterning organic–inorganic thin-film transistors using microcontact printed templates
journal, November 2001


Analog and digital circuits using organic thin-film transistors on polyester substrates
journal, November 2000


Printed Multilayer Superstructures of Aligned Single-Walled Carbon Nanotubes for Electronic Applications
journal, November 2007


High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes
journal, March 2007


Controlled Synthesis and Photoluminescence Properties of ZnS Nanowires and Nanoribbons
journal, March 2005


Synthesis and Optical Properties of CdS Nanoribbons
journal, October 2005


Shape Selective Growth of CdS One-Dimensional Nanostructures by a Thermal Evaporation Process
journal, March 2006


Lateral polysilicon p+–p–n+ and p+–n–n+ diodes
journal, April 2003


Multiple Lateral Polysilicon Diodes as Temperature Sensors for Chemical Microreaction Systems
journal, March 2003


The Characteristic Improvement of Si(111) Metal–Oxide–Semiconductor Field-Effect Transistor by Long-Time Hydrogen Annealing
journal, October 2004


Synthetic Chemistry for Ultrapure, Processable, and High-Mobility Organic Transistor Semiconductors
journal, March 2001


Recent Advances in Semiconductor Performance and Printing Processes for Organic Transistor-Based Electronics
journal, October 2004


Finer features for functional microdevices
journal, August 2001


Human neocortical electrical activity recorded on nonpenetrating microwire arrays: applicability for neuroprostheses
journal, July 2009


Vertical Etching of Silicon at very High Aspect Ratios
journal, August 1979


Lateral growth of single wall carbon nanotubes on various substrates by means of an “all-laser” synthesis approach
journal, April 2006


High electron mobility transistor based on a GaN‐AlxGa 1−xN heterojunction
journal, August 1993


A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates
journal, January 2006


Invention of the integrated circuit
journal, July 1976


Field emission from carbon nanotubes for displays
journal, April 2000


Nanolithography based on patterned metal transfer and its application to organic electronic devices
journal, May 2002


Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
journal, July 2003


Stretchable Electronics: Materials Strategies and Devices
journal, December 2008


Integrated wireless neural interface based on the Utah electrode array
journal, December 2008


Optimized Structural Designs for Stretchable Silicon Integrated Circuits
journal, December 2009


Stretchable and Foldable Silicon Integrated Circuits
journal, April 2008


Materials and noncoplanar mesh designs for integrated circuits with linear elastic responses to extreme mechanical deformations
journal, November 2008


Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon
journal, January 2008


Waterproof AlInGaP optoelectronics on stretchable substrates with applications in biomedicine and robotics
journal, October 2010


Organic TFT Array on a Paper Substrate
journal, October 2004


Dissolvable films of silk fibroin for ultrathin conformal bio-integrated electronics
journal, April 2010


Highly Emissive Self-assembled Organic Nanoparticles having Dual Color Capacity for Targeted Immunofluorescence Labeling
journal, March 2008


Complementary metal oxide silicon integrated circuits incorporating monolithically integrated stretchable wavy interconnects
journal, July 2008


Ultrathin Silicon Circuits With Strain-Isolation Layers and Mesh Layouts for High-Performance Electronics on Fabric, Vinyl, Leather, and Paper
journal, September 2009


Silicon electronics on silk as a path to bioresorbable, implantable devices
journal, September 2009


Microheater-integrated single gas sensor array chip fabricated on flexible polyimide substrate
journal, March 2006


High-mobility polymer gate dielectric pentacene thin film transistors
journal, November 2002


Fabrication of periodic nanostructures by phase-controlled multiple-beam interference
journal, December 2003


Pentacene thin film transistors on inorganic dielectrics: Morphology, structural properties, and electronic transport
journal, January 2003


Bulk Quantities of Single-Crystal Silicon Micro-/Nanoribbons Generated from Bulk Wafers
journal, October 2006


Flexible Carbon-Nanofiber Connectors with Anisotropic Adhesion Properties
journal, January 2010


A hemispherical electronic eye camera based on compressible silicon optoelectronics
journal, August 2008


Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements
journal, October 2009


Aligned Arrays of Single-Walled Carbon Nanotubes Generated from Random Networks by Orientationally Selective Laser Ablation
journal, December 2004


Spatially Selective Guided Growth of High-Coverage Arrays and Random Networks of Single-Walled Carbon Nanotubes and Their Integration into Electronic Devices
journal, April 2006


Radio frequency analog electronics based on carbon nanotube transistors
journal, January 2008


Control of Si Nanowire Growth by Oxygen
journal, June 2006


Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers
journal, November 2000


High efficiency GaAs thin film solar cells by peeled film technology
journal, December 1978


Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts
journal, February 2004


Nanotube Molecular Wires as Chemical Sensors
journal, January 2000


Structures of indium oxide nanobelts
journal, October 2003


Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers
journal, October 1998


A flexible and wearable glucose sensor based on functional polymers with Soft-MEMS techniques
journal, October 2006


Mesoscale organization of metal nanocrystals
journal, January 2002


Patterning Self-Assembled Monolayers: Applications in Materials Science
journal, May 1994


Thermally-stable low-resistance Ti/Al/Mo/Au multilayer ohmic contacts on n–GaN
journal, August 2002


Effect of mismatch strain on band gap in III‐V semiconductors
journal, June 1985


Crystallographic alignment of high-density gallium nitride nanowire arrays
journal, July 2004


Stretchable Interconnects for Elastic Electronic Surfaces
journal, August 2005


Flexible and stretchable micro-electrodes for in vitro and in vivo neural interfaces
journal, June 2010


Stretchable gold conductors on elastomeric substrates
journal, April 2003


Design and Performance of Thin Metal Film Interconnects for Skin-Like Electronic Circuits
journal, April 2004


An Elastically Stretchable TFT Circuit
journal, December 2004


Stiff subcircuit islands of diamondlike carbon for stretchable electronics
journal, July 2006


Mechanisms of reversible stretchability of thin metal films on elastomeric substrates
journal, May 2006


Diamond growth in a direct-current low-pressure supersonic plasmajet
journal, March 1997


Electrical imaging of neuronal activity by multi-transistor-array (MTA) recording at 7.8 μm resolution
journal, August 2004


Some properties of spherical and rod-shaped semiconductor and metal nanocrystals
journal, January 2002


SEMICONDUCTOR NANOWIRES AND NANOTUBES
journal, August 2004


Nanoribbon Waveguides for Subwavelength Photonics Integration
journal, August 2004


Bioactive Silk Protein Biomaterial Systems for Optical Devices
journal, April 2008


Simple Route to Large-Scale Ordered Arrays of Liquid-Deposited Carbon Nanotubes
journal, April 2004


III–V micromachined devices for microsystems
journal, September 1998


Degradation mechanism of diethylene glycol units in a terephthalate polymer
journal, April 2006


Thin film transistors for displays on plastic substrates
journal, August 2000


High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach
journal, January 2003


Organic light-emitting diodes formed by soft contact lamination
journal, January 2004


A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems
journal, October 2005


The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon
journal, December 1999


Application of carbon nanotubes to field emission displays
journal, February 2001


Weave Patterned Organic Transistors on Fiber for E-Textiles
journal, February 2005


Tetherless thermobiochemically actuated microgrippers
journal, January 2009


Functionalized silicon membranes for selective bio-organism capture
journal, April 2003


High-Resolution Contact Printing with Dendrimers
journal, April 2002


Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus
journal, October 2003


Electrospinning of Nanofibers: Reinventing the Wheel?
journal, July 2004


Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment
journal, April 2006


Compliant thin film patterns of stiff materials as platforms for stretchable electronics
journal, December 2005


ZnO nanobelts grown on Si substrate
journal, July 2002


The Incredible Shrinking Circuit
journal, September 2001


Nanoscale Science and Technology: Building a Big Future from Small Things
journal, July 2003


Flexible membrane pressure sensor
journal, April 2005


Creating micro- and nanostructures on tubular and spherical surfaces
journal, December 2007

  • Lima, O.; Tan, L.; Goel, A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6, p. 2412-2418
  • https://doi.org/10.1116/1.2804428

High-Performance Carbon Nanotube Field-Effect Transistor With Tunable Polarities
journal, September 2005


Fabrication technology for wafer through-hole interconnections and three-dimensional stacks of chips and wafers
conference, January 1994

  • Linder, S.; Baltes, H.; Gnaedinger, F.
  • Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
  • https://doi.org/10.1109/MEMSYS.1994.556165

Thin Film Deposition, Patterning, and Printing in Organic Thin Film Transistors
journal, October 2004


Controlled deposition of individual single-walled carbon nanotubes on chemically functionalized templates
journal, April 1999


Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics
journal, July 2002


High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers
journal, September 2002

  • Loo, Yueh-Lin; Hsu, Julia W. P.; Willett, Robert L.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2853-2856
  • https://doi.org/10.1116/1.1523405

Interfacial Chemistries for Nanoscale Transfer Printing
journal, July 2002


Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination
journal, July 2002


Electrical Contacts to Molecular Layers by Nanotransfer Printing
journal, July 2003


Thermal conductivity of PET/(LDPE/AI) composites determined by MDSC
journal, September 2004


Water-insoluble silk films with silk I structure
journal, April 2010


Electronic materials: Buckling down for flexible electronics
journal, December 2006


One-dimensional hole gas in germanium/silicon nanowire heterostructures
journal, July 2005


Nanowire Transistor Performance Limits and Applications
journal, November 2008


An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors
journal, July 1992


Single-Crystal CdSe Nanosaws
journal, December 2003


Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers
journal, May 2006


Mechanically Strained Strained-Si NMOSFETs
journal, January 2004


Diamond-structured photonic crystals
journal, September 2004


Fully elastic interconnects on nanopatterned elastomeric substrates
journal, August 2006


Controlled growth of tetrapod-branched inorganic nanocrystals
journal, May 2003


Architectonic Quantum Dot Solids
journal, January 1999


Conducting elastomer surface texturing: a path to electrode spotting
journal, September 2004


Nanowire Arrays Defined by Nanoimprint Lithography
journal, April 2004


Large Photoresponsivity in High-Mobility Single-Crystal Organic Field-Effect Phototransistors
journal, November 2005


Fabrication of Ordered Diamond/metal Nanocomposite Structures
journal, October 2000


An improved GaAs device model for the simulation of analog integrated circuit
journal, May 2003


High-Performance Nanowire Electronics and Photonics on Glass and Plastic Substrates
journal, November 2003


High-Performance Nanowire Electronics and Photonics and Nanoscale Patterning on Flexible Plastic Substrates
journal, July 2005


Diffusivity and Solubility of Si in the Al Metallization of Integrated Circuits
journal, December 1971


Inference of hand movements from local field potentials in monkey motor cortex
journal, November 2003


Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps
journal, October 2004


Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films
journal, September 2004


Transfer printing by kinetic control of adhesion to an elastomeric stamp
journal, December 2005


Ultrahigh-Density Nanowire Lattices and Circuits
journal, March 2003


A printable form of silicon for high performance thin film transistors on plastic substrates
journal, June 2004


Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing
journal, August 2004


High-Performance n- and p-Type Single-Crystal Organic Transistors with Free-Space Gate Dielectrics
journal, December 2004


Bendable single crystal silicon thin film transistors formed by printing on plastic substrates
journal, February 2005


Micro- and Nanopatterning Techniques for Organic Electronic and Optoelectronic Systems
journal, April 2007


Micromachining of three-dimensional GaAs membrane structures using high-energy nitrogen implantation
journal, October 2002


Closure and Repropagation of Healed Cracks in Silicate Glass
journal, November 1985


Printing meets lithography: Soft approaches to high-resolution patterning
journal, September 2001


Direct printing of polymer microstructures on flat and spherical surfaces using a letterpress technique
journal, September 2002

  • Miller, Scott M.; Troian, Sandra M.; Wagner, Sigurd
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2320-2327
  • https://doi.org/10.1116/1.1520554

Colloidal nanocrystal heterostructures with linear and branched topology
journal, July 2004


Plastic Electronics and Their Packaging Technologies
journal, April 2003


Impedance spectroscopy on stretchable microelectrode arrays
journal, July 2010


Emerging Methods for Micro- and Nanofabrication
journal, July 2001


Electrically Induced Optical Emission from a Carbon Nanotube FET
journal, May 2003


AlGaN/GaN HEMTs-an overview of device operation and applications
journal, June 2002


High-mobility ultrathin semiconducting films prepared by spin coating
journal, March 2004


Ink-Jet Printing of Binders for Ceramic Components
journal, April 2002


Individually Suspended Single-Walled Carbon Nanotubes in Various Surfactants
journal, October 2003


A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires
journal, January 1998


Adhesion enhancement by a dielectric barrier discharge of PDMS used for flexible and stretchable electronics
journal, November 2007


A New Etching Solution System, H3 PO4- H2O2- H2O, for GaAs and Its Kinetics
journal, January 1978


High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes
journal, January 1995


Mesoscopic self‐assembly of gold islands on diblock‐copolymer films
journal, January 1994


On the aging of oxygen plasma-treated polydimethylsiloxane surfaces
journal, June 1990


Polarization Dependence of the Optical Absorption of Single-Walled Carbon Nanotubes
journal, March 2005


Modification of silk fibroin using diazonium coupling chemistry and the effects on hMSC proliferation and differentiation
journal, July 2008


Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM
journal, December 2000


Nanotubes of the disulfides of groups 4 and 5 metals
journal, January 2002


Amorphous silicon detector and thin film transistor technology for large-area imaging of X-rays
journal, December 2000


Amorphous silicon technology for large area digital X-ray and optical imaging
journal, April 2002


Introduction to Organic Thin Film Transistors and Design of n-Channel Organic Semiconductors
journal, August 2004


Luminescence Photophysics in Semiconductor Nanocrystals
journal, November 1998


New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region
journal, July 1996


Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
journal, November 2004


Electric Field Effect in Atomically Thin Carbon Films
journal, October 2004


Band Gap Fluorescence from Individual Single-Walled Carbon Nanotubes
journal, July 2002


Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale
journal, May 2004


Improved Pattern Transfer in Soft Lithography Using Composite Stamps
journal, June 2002


Ordering of microwrinkle patterns by compressive strain
journal, April 2004


Geometry-Dependent Stripe Rearrangement Processes Induced by Strain on Preordered Microwrinkle Patterns
journal, August 2005


A new route for silk
journal, November 2008


High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors
journal, March 2004


Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors
journal, August 2005


High Frequency Properties of Electro-Textiles for Wearable Antenna Applications
journal, February 2008


Conversion of Some Siloxane Polymers to Silicon Oxide by UV/Ozone Photochemical Processes
journal, June 2000


Photodynamic therapy for esophageal cancer using a 180° windowed esophageal balloon
journal, January 1994


Nanobelts of Semiconducting Oxides
journal, March 2001


Sharp exciton emission from single InAs quantum dots in GaAs nanowires
journal, September 2003


Application of Screen Printing in the Fabrication of Organic Light-Emitting Devices
journal, September 2000


Printed Assemblies of Inorganic Light-Emitting Diodes for Deformable and Semitransparent Displays
journal, August 2009


Biodegradable luminescent porous silicon nanoparticles for in vivo applications
journal, February 2009


Biocompatible Silk Printed Optical Waveguides
journal, June 2009


Detection, Stimulation, and Inhibition of Neuronal Signals with High-Density Nanowire Transistor Arrays
journal, August 2006


Effect of diamondlike carbon coating and surface topography on the performance of metal evaporated magnetic tapes
journal, March 1998


Patterning Spherical Surfaces at the Two-Hundred-Nanometer Scale Using Soft Lithography
journal, April 2003


GaN: Processing, defects, and devices
journal, July 1999


Shape control of CdSe nanocrystals
journal, March 2000


Nano- and Micropatterning of Optically Transparent, Mechanically Robust, Biocompatible Silk Fibroin Films
journal, August 2008


Protective diamond-like carbon coatings for future optical storage disks
journal, March 2005


Current–Voltage Characteristics of Long-Channel Nanobundle Thin-Film Transistors: A “Bottom-Up” Perspective
journal, February 2007


Stars and stripes. Nanoscale misfit dislocation patterns on surfaces
journal, January 2002


Scaling effects of wet adhesion in biological attachment systems
journal, January 2006


From Micro- to Nanofabrication with Soft Materials
journal, November 2000


Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants
journal, January 1989


Laser-lithography on non-planar surfaces
journal, January 2007


Permeation-driven flow in poly(dimethylsiloxane) microfluidic devices
journal, July 2005


Large-Scale Assembly of Carbon Nanotubes
conference, November 2008


Three-dimensional nanopillar-array photovoltaics on low-cost and flexible substrates
journal, July 2009


Dependence of Interface State Density on Silicon Thermal Oxidation Process Variables
journal, January 1979


Macroelectronics: Perspectives on Technology and Applications
journal, July 2005


Macroelectronics
journal, June 2006


Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design
journal, February 1998


All-Inorganic Field Effect Transistors Fabricated by Printing
journal, October 1999


Looking at Rubber Adhesion
journal, March 1979


Elastically relaxed free-standing strained-silicon nanomembranes
journal, April 2006


GaAs Readied for High-Speed Microcircuits
journal, January 1983


Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits
journal, January 2005


Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field
journal, May 1997


Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask
journal, June 1998

  • Rogers, John A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 59-68
  • https://doi.org/10.1116/1.589836

Quantifying distortions in soft lithography
journal, June 1998

  • Rogers, John A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 88-97
  • https://doi.org/10.1116/1.589841

Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers
journal, September 1998


Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks
journal, April 2001


Printed plastic electronics and paperlike displays
journal, August 2002


Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping
journal, March 2000


Rubber Stamping for Plastic Electronics and Fiber Optics
journal, July 2001


Toward Paperlike Displays
journal, February 2001


High Performance Electrolyte Gated Carbon Nanotube Transistors
journal, August 2002


Universal description of channel conductivity for nanotube and nanowire transistors
journal, August 2003


Photonic crystal structure with square symmetry within each layer and a three-dimensional band gap
journal, June 2003


A MEMS-based flexible multichannel ECoG-electrode array
journal, May 2009


Human cortical prostheses: lost in translation?
journal, July 2009


Semiconductor nanowires for novel one-dimensional devices
journal, March 2004


Nature of multilayer steps on the {100} cleavage planes of MgO single crystals
journal, July 1997


In vitro evaluation of the inflammatory potential of the silk fibroin
journal, September 1999


Morphology of nanostructured materials
journal, January 2002


Low-Temperature Materials and Thin Film Transistors for Flexible Electronics
journal, August 2005


Catheter Technique for Recording His Bundle Activity in Man
journal, January 1969


Thin-film GaAs epitaxial lift-off solar cells for space applications
journal, April 2005

  • Schermer, J. J.; Mulder, P.; Bauhuis, G. J.
  • Progress in Photovoltaics: Research and Applications, Vol. 13, Issue 7, p. 587-596
  • https://doi.org/10.1002/pip.616

Photon confinement in high-efficiency, thin-film III–V solar cells obtained by epitaxial lift-off
journal, July 2006


Direct stimulatory effect of low-intensity 670 nm laser irradiation on human endothelial cell proliferation
journal, February 2003


Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing
journal, February 2003


Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography
journal, April 2000


Light-coupling masks for lensless, sub-wavelength optical lithography
journal, May 1998


Nanotechnology: Thin solid films roll up into nanotubes
journal, March 2001


Mechanical properties of silicones for MEMS
journal, April 2008


Ambipolar Pentacene Field-Effect Transistors and Inverters
journal, February 2000


The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives
journal, July 1998


Aluminum metallization—Advantages and limitations for integrated circuit applications
journal, January 1969


On the relationship between the temperature coefficient of resistance and the thermal conductance of integrated metal resistors
journal, October 2004


High-Current Nanotube Transistors
journal, May 2004


Bending experiment on pentacene field-effect transistors on plastic films
journal, February 2005


Stretchable active-matrix organic light-emitting diode display using printable elastic conductors
journal, May 2009


A Rubberlike Stretchable Active Matrix Using Elastic Conductors
journal, September 2008


Nonequilibrium processes for generating silicon nanostructures in single-crystalline silicon
journal, January 2002


High-Mobility Poly-Si Thin Film Transistors Fabricated on Stainless-Steel Foils by Low-Temperature Processes Using Sputter-Depositions
journal, May 2000


Functional Pixel Circuits for Elastic AMOLED Displays
journal, July 2005


Electronic Textiles Charge Ahead
journal, August 2003


From Si Source Gas Directly to Positioned, Electrically Contacted Si Nanowires: The Self-Assembling “Grow-in-Place” Approach
journal, November 2004


Holographic photonic crystals with diamond symmetry
journal, November 2003


Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates
journal, February 2002


Formation and characterization of silicon films on flexible polymer substrates
journal, April 2005


Free-standing Single Crystal Silicon Nanoribbons
journal, November 2001


Synthesis of Large Areas of Highly Oriented, Very Long Silicon Nanowires
journal, September 2000


PDMS-based micro PCR chip with Parylene coating
journal, June 2003


Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing
journal, October 2004


Axisymmetric adhesion tests of soft materials
journal, April 1998


Thin, lightweight, foldable thermochromic displays on paper
journal, January 2009


Foldable Printed Circuit Boards on Paper Substrates
journal, January 2010


Microsolidics: Fabrication of Three-Dimensional Metallic Microstructures in Poly(dimethylsiloxane)
journal, March 2007


An analytical back-gate bias effect model for ultrathin SOI CMOS devices
journal, April 1993


Inkjet Printing of Functional Materials
journal, November 2003


High-Resolution Inkjet Printing of All-Polymer Transistor Circuits
journal, December 2000


Device Physics of Solution-Processed Organic Field-Effect Transistors
journal, October 2005


Colloidal Inks for Directed Assembly of 3-D Periodic Structures
journal, July 2002


Electric-field assisted assembly and alignment of metallic nanowires
journal, August 2000


Random networks of carbon nanotubes as an electronic material
journal, March 2003


High-mobility carbon-nanotube thin-film transistors on a polymeric substrate
journal, January 2005


Organic Light-Emitting Devices for Solid-State Lighting
journal, July 2008


Functionalized silk-based biomaterials for bone formation
journal, January 2000


Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes
journal, August 2005


Integration of Organic FETs With Organic Photodiodes for a Large Area, Flexible, and Lightweight Sheet Image Scanners
journal, November 2005


A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications
journal, June 2004


InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communications
journal, March 1991


Adverse Reactions to Virgin Silk Sutures in Cataract Surgery
journal, May 1984


Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems
journal, March 2007


A buckling-based metrology for measuring the elastic moduli of polymeric thin films
journal, July 2004


Nanotube Optoelectronic Memory Devices
journal, September 2004


Fabrication of solid-state nanopores with single-nanometre precision
journal, July 2003


CMOL FPGA: a reconfigurable architecture for hybrid digital circuits with two-terminal nanodevices
journal, April 2005


Lattice-Oriented Growth of Single-Walled Carbon Nanotubes
journal, July 2000


Near-infrared spectroscopy for the detection of lipid core coronary plaques
journal, August 2009


Toward the Ultimate Tribological Interface: Surface Chemistry and Nanotribology of Ultrananocrystalline Diamond
journal, April 2005


Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates
journal, October 2004


Advances in organic field-effect transistors
journal, November 2004


Bendable GaAs metal-semiconductor field-effect transistors formed with printed GaAs wire arrays on plastic substrates
journal, August 2005


Photolithographic Route to the Fabrication of Micro/Nanowires of III-V Semiconductors
journal, January 2005


Controlled buckling of semiconductor nanoribbons for stretchable electronics
journal, December 2006


Structural forms of single crystal semiconductor nanoribbons for high-performance stretchable electronics
journal, January 2007


Inorganic Semiconductors for Flexible Electronics
journal, August 2007


Buckled and Wavy Ribbons of GaAs for High-Performance Electronics on Elastomeric Substrates
journal, November 2006


Elastomeric Transistor Stamps: Reversible Probing of Charge Transport in Organic Crystals
journal, March 2004


Mechanics of rollable and foldable film-on-foil electronics
journal, February 1999


Curved CCD detector devices and arrays for multispectral astrophysical applications and terrestrial stereo panoramic cameras
conference, September 2004


Over 30% efficient InGaP/GaAs tandem solar cells
journal, January 1997


PbSe Nanocrystal Solids for n- and p-Channel Thin Film Field-Effect Transistors
journal, October 2005


Performance enhancement of InGaN light-emitting diodes by laser lift-off and transfer from sapphire to copper substrate
journal, April 2004


Magnetic trapping and self-assembly of multicomponent nanowires
journal, May 2002


One-Dimensional Assemblies of Nanoparticles: Preparation, Properties, and Promise
journal, April 2005


Langmuir−Blodgett Silver Nanowire Monolayers for Molecular Sensing Using Surface-Enhanced Raman Spectroscopy
journal, September 2003


Room-temperature deposition of high-purity silicon oxide films by RF plasma-enhanced CVD
journal, September 2001


Electrical Recording from Hearts with Flexible Nanowire Device Arrays
journal, February 2009


Photonic Band Gap Architectures for Holographic Lithography
journal, January 2004


Microscopic patterning of orientated mesoscopic silica through guided growth
journal, December 1997


Solution-Liquid-Solid Growth of Crystalline III-V Semiconductors: An Analogy to Vapor-Liquid-Solid Growth
journal, December 1995


Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology
journal, December 2003


Etching of DLC films using a low intensity oxygen plasma jet
journal, April 2000


Compliant substrate technology: Integration of mismatched materials for opto-electronic applications
journal, January 2000


Porous silica via colloidal crystallization
journal, October 1997


Silk as a biomaterial
journal, August 2007


Molecular control over Au/GaAs diodes
journal, March 2000


Increased fibroblast proliferation induced by light emitting diode and low power laser irradiation
journal, May 2003


A Conformal, Bio-Interfaced Class of Silicon Electronics for Mapping Cardiac Electrophysiology
journal, March 2010


On-chip natural assembly of silicon photonic bandgap crystals
journal, November 2001


Cheap and cheerful circuits
journal, September 2000


Silicon for thin-film transistors
journal, April 2003


Electronic skin: architecture and components
journal, November 2004


Vapor-liquid-solid mechanism of single crystal growth
journal, March 1964


PhotoPoint Photodynamic Therapy Promotes Stabilization of Atherosclerotic Plaques and Inhibits Plaque Progression
journal, September 2008


A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions
journal, December 2003


Electronically Selective Chemical Functionalization of Carbon Nanotubes: Correlation between Raman Spectral and Electrical Responses
journal, August 2005


Oxidation Resistant Germanium Nanowires: Bulk Synthesis, Long Chain Alkanethiol Functionalization, and Langmuir−Blodgett Assembly
journal, August 2005


Direct synthesis and characterization of CdS nanobelts
journal, July 2006


In vivo degradation of three-dimensional silk fibroin scaffolds
journal, August 2008


In Vivo Validation of a Catheter-Based Near-Infrared Spectroscopy System for Detection of Lipid Core Coronary Plaques
journal, July 2009


Near-Infrared Spectroscopy for Plaque Characterization
journal, December 2008


A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell
journal, January 2004


Controlled Growth of Large-Area, Uniform, Vertically Aligned Arrays of α-Fe2O3 Nanobelts and Nanowires
journal, January 2005


Large-Scale Hierarchical Organization of Nanowire Arrays for Integrated Nanosystems
journal, September 2003


Growth and properties of nanocrystalline diamond films
journal, October 2006


Comparison of the growth and properties of ultrananocrystalline diamond and nanocrystalline diamond
journal, April 2006


Functional nanoparticle architectures for sensoric, optoelectronic, and bioelectronic applications
journal, January 2002


ECoG Factors Underlying Multimodal Control of a Brain–Computer Interface
journal, June 2006


Vertical scaling of carbon nanotube field-effect transistors using top gate electrodes
journal, May 2002


Microelectrodes, Microelectronics, and Implantable Neural Microsystems
journal, July 2008


Effect of Mechanical and Electrical Stresses on the Performance of an a-Si:H TFT on Plastic Substrate
journal, January 2004


Photobiomodulation Directly Benefits Primary Neurons Functionally Inactivated by Toxins: Role Of Cytochrome c Oxidase
journal, November 2004


Direct Observation of Vapor−Liquid−Solid Nanowire Growth
journal, April 2001


Thermal oxide of polycrystalline silicon on steel foil as a thin-film transistor gate dielectric
journal, June 2001


Block-by-Block Growth of Single-Crystalline Si/SiGe Superlattice Nanowires
journal, February 2002


Growth of Au-catalyzed ordered GaAs nanowire arrays by molecular-beam epitaxy
journal, December 2002


Inorganic Semiconductor Nanowires Rational Growth, Assembly, and Novel Properties
journal, March 2002


Growth, branching, and kinking of molecular-beam epitaxial <110> GaAs nanowires
journal, October 2003


Single-crystal metallic nanowires and metal/semiconductor nanowire heterostructures
journal, July 2004


Complementary metal-oxide-semiconductor thin-film transistor circuits from a high-temperature polycrystalline silicon process on steel foil substrates
journal, November 2002


Soft Lithography
journal, August 1998


Shadowed sputtering of gold on V -shaped microtrenches etched in silicon and applications in microfabrication
journal, September 1996


Unconventional Methods for Fabricating and Patterning Nanostructures
journal, May 1999


One-Dimensional Nanostructures: Synthesis, Characterization, and Applications
journal, March 2003


Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters
journal, July 1996


Ge/Si nanowire heterostructures as high-performance field-effect transistors
journal, May 2006


High-mobility thin-film transistors based on aligned carbon nanotubes
journal, July 2003


Polymer-controlled growth of Sb2Se3 nanoribbons via a hydrothermal process
journal, May 2003


Mesoporous silica with micrometer-scale designs
journal, January 1997


Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
journal, April 2000

  • Yang, C.-S.; Smith, L. L.; Arthur, C. B.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2, p. 683-689
  • https://doi.org/10.1116/1.591259

Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser
journal, June 2002


RFID Tag and RF Structures on a Paper Substrate Using Inkjet-Printing Technology
journal, December 2007


The Chemistry and Physics of Semiconductor Nanowires
journal, February 2005


Terraces and ledges on (001) spinel surfaces
journal, July 2002


Seeing Molecules by Eye: Surface Plasmon Resonance Imaging at Visible Wavelengths with High Spatial Resolution and Submonolayer Sensitivity
journal, June 2008


Functional Nanostructured Plasmonic Materials
journal, January 2010