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Title: Ovenized microelectromechanical system (MEMS) resonator

Abstract

An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.

Inventors:
; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1126693
Patent Number(s):
8669823
Application Number:
13/442,689
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03B - GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Olsson, Roy H, Wojciechowski, Kenneth, and Kim, Bongsang. Ovenized microelectromechanical system (MEMS) resonator. United States: N. p., 2014. Web.
Olsson, Roy H, Wojciechowski, Kenneth, & Kim, Bongsang. Ovenized microelectromechanical system (MEMS) resonator. United States.
Olsson, Roy H, Wojciechowski, Kenneth, and Kim, Bongsang. Tue . "Ovenized microelectromechanical system (MEMS) resonator". United States. https://www.osti.gov/servlets/purl/1126693.
@article{osti_1126693,
title = {Ovenized microelectromechanical system (MEMS) resonator},
author = {Olsson, Roy H and Wojciechowski, Kenneth and Kim, Bongsang},
abstractNote = {An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {3}
}

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Works referenced in this record:

Thermal Conductivity of AlN and SiC Thin Films
journal, May 2006


Technologies for Cofabricating MEMS and Electronics
journal, February 2008


Frequency Trimming for MEMS Resonator Oscillators
conference, May 2007


Fully monolithic CMOS nickel micromechanical resonator oscillator
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Thermal Isolation of Encapsulated MEMS Resonators
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Ovenized and thermally tunable aluminum nitride microresonators
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Oven-Based Thermally Tunable Aluminum Nitride Microresonators
journal, April 2013


Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors
conference, May 2007

  • Olsson, Roy H.; Fleming, James G.; Wojciechowski, Kenneth E.
  • 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum
  • https://doi.org/10.1109/FREQ.2007.4319108

VHF and UHF mechanically coupled aluminum nitride MEMS filters
conference, May 2008


Micro ion frequency standard
conference, May 2011


Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators
conference, June 2009


Super high frequency width extensional aluminum nitride (AlN) MEMS resonators
conference, September 2009


Pulsed photothermal reflectance measurement of the thermal conductivity of sputtered aluminum nitride thin films
journal, October 2004