Ovenized microelectromechanical system (MEMS) resonator
Abstract
An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1126693
- Patent Number(s):
- 8669823
- Application Number:
- 13/442,689
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03B - GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Olsson, Roy H, Wojciechowski, Kenneth, and Kim, Bongsang. Ovenized microelectromechanical system (MEMS) resonator. United States: N. p., 2014.
Web.
Olsson, Roy H, Wojciechowski, Kenneth, & Kim, Bongsang. Ovenized microelectromechanical system (MEMS) resonator. United States.
Olsson, Roy H, Wojciechowski, Kenneth, and Kim, Bongsang. Tue .
"Ovenized microelectromechanical system (MEMS) resonator". United States. https://www.osti.gov/servlets/purl/1126693.
@article{osti_1126693,
title = {Ovenized microelectromechanical system (MEMS) resonator},
author = {Olsson, Roy H and Wojciechowski, Kenneth and Kim, Bongsang},
abstractNote = {An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 11 00:00:00 EDT 2014},
month = {Tue Mar 11 00:00:00 EDT 2014}
}
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Works referencing / citing this record:
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