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Title: Ovenized microelectromechanical system (MEMS) resonator

Abstract

An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.

Inventors:
; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1126693
Patent Number(s):
8669823
Application Number:
13/442,689
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03B - GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Olsson, Roy H, Wojciechowski, Kenneth, and Kim, Bongsang. Ovenized microelectromechanical system (MEMS) resonator. United States: N. p., 2014. Web.
Olsson, Roy H, Wojciechowski, Kenneth, & Kim, Bongsang. Ovenized microelectromechanical system (MEMS) resonator. United States.
Olsson, Roy H, Wojciechowski, Kenneth, and Kim, Bongsang. Tue . "Ovenized microelectromechanical system (MEMS) resonator". United States. https://www.osti.gov/servlets/purl/1126693.
@article{osti_1126693,
title = {Ovenized microelectromechanical system (MEMS) resonator},
author = {Olsson, Roy H and Wojciechowski, Kenneth and Kim, Bongsang},
abstractNote = {An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {3}
}

Works referenced in this record:

Contour mode resonators with acoustic reflectors
patent, June 2008


Microelectromechanical resonator and method for fabrication
patent, November 2009


Microelectromechanical resonator and method for fabrication
patent, January 2010


Microfabricated bulk wave acoustic bandgap device
patent, June 2010


Microfabricated bulk wave acoustic bandgap device
patent, November 2010


Microfabricated ion frequency standard
patent, December 2010


Phononic crystal devices
patent, January 2012


Method for fabricating a microelectromechanical resonator
patent, February 2013


Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators
patent, July 2013


Synthetic thermoelectric materials comprising phononic crystals
patent, August 2013


Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material
patent, September 2013


Micromechanical resonator device and method of making a micromechanical device
patent-application, October 2004


Methods and Apparatus for Temperature Control of Devices and Mechanical Resonating Structures
patent-application, December 2010


Thermal Conductivity of AlN and SiC Thin Films
journal, May 2006


Technologies for Cofabricating MEMS and Electronics
journal, February 2008


Frequency Trimming for MEMS Resonator Oscillators
conference, May 2007


Fully monolithic CMOS nickel micromechanical resonator oscillator
conference, January 2008


Thermal Isolation of Encapsulated MEMS Resonators
journal, February 2008


Thermal Conductivity Measurement of Submicron-Thick Films Deposited on Substrates by Modified ac Calorimetry (Laser-Heating Ã…ngstrom Method)
journal, January 2001


Ovenized and thermally tunable aluminum nitride microresonators
conference, October 2010


Oven-Based Thermally Tunable Aluminum Nitride Microresonators
journal, April 2013


Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors
conference, May 2007

  • Olsson, Roy H.; Fleming, James G.; Wojciechowski, Kenneth E.
  • 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum
  • https://doi.org/10.1109/FREQ.2007.4319108

VHF and UHF mechanically coupled aluminum nitride MEMS filters
conference, May 2008


Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators
journal, April 2007


Micro ion frequency standard
conference, May 2011


Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators
conference, June 2009


Super high frequency width extensional aluminum nitride (AlN) MEMS resonators
conference, September 2009


Pulsed photothermal reflectance measurement of the thermal conductivity of sputtered aluminum nitride thin films
journal, October 2004


    Works referencing / citing this record:

    Method of making thermally-isolated silicon-based integrated circuits
    patent, November 2017


    Thermally-isolated silicon-based integrated circuits and related methods
    patent, May 2017


    Single crystal micromechanical resonator
    patent, May 2017


    Methods for dry etching semiconductor devices
    patent, November 2016


    Temperature stabilized circuitry
    patent, March 2016


    Tuning method for microresonators and microresonators made thereby
    patent, December 2015