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Title: Ovenized microelectromechanical system (MEMS) resonator

An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.
Inventors:
; ;
Issue Date:
OSTI Identifier:
1126693
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-A
Patent Number(s):
8,669,823
Application Number:
13/442,689
Contract Number:
AC04-94AL85000
Research Org:
SNL-A (Sandia National Laboratories, Albuquerque, NM (United States))
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

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Contour mode resonators with acoustic reflectors
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Microelectromechanical resonator and method for fabrication
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CDATA[Ovenized and thermally tunable aluminum nitride microresonators
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Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators
conference, June 2009
  • Wojciechowski, K. E.; Olsson, R. H.; Tuck, M. R.
  • Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
  • DOI: 10.1109/SENSOR.2009.5285626

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