Contact stress sensor
Abstract
A method for producing a contact stress sensor that includes one or more MEMS fabricated sensor elements, where each sensor element of includes a thin non-recessed portion, a recessed portion and a pressure sensitive element adjacent to the recessed portion. An electric circuit is connected to the pressure sensitive element. The circuit includes a pressure signal circuit element configured to provide a signal upon movement of the pressure sensitive element.
- Inventors:
- Issue Date:
- Research Org.:
- LLNL (Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States))
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1124617
- Patent Number(s):
- 8,646,335
- Application Number:
- 13/349,492
- Assignee:
- Lawrence Livermore National Security, LLC (Livermore, CA)
- DOE Contract Number:
- AC52-07NA27344
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Kotovsky, Jack. Contact stress sensor. United States: N. p., 2014.
Web.
Kotovsky, Jack. Contact stress sensor. United States.
Kotovsky, Jack. Tue .
"Contact stress sensor". United States. https://www.osti.gov/servlets/purl/1124617.
@article{osti_1124617,
title = {Contact stress sensor},
author = {Kotovsky, Jack},
abstractNote = {A method for producing a contact stress sensor that includes one or more MEMS fabricated sensor elements, where each sensor element of includes a thin non-recessed portion, a recessed portion and a pressure sensitive element adjacent to the recessed portion. An electric circuit is connected to the pressure sensitive element. The circuit includes a pressure signal circuit element configured to provide a signal upon movement of the pressure sensitive element.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {2}
}
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