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Title: Contact stress sensor

A method for producing a contact stress sensor that includes one or more MEMS fabricated sensor elements, where each sensor element of includes a thin non-recessed portion, a recessed portion and a pressure sensitive element adjacent to the recessed portion. An electric circuit is connected to the pressure sensitive element. The circuit includes a pressure signal circuit element configured to provide a signal upon movement of the pressure sensitive element.
Inventors:
Issue Date:
OSTI Identifier:
1124617
Assignee:
Lawrence Livermore National Security, LLC (Livermore, CA) LLNL
Patent Number(s):
8,646,335
Application Number:
13/349,492
Contract Number:
AC52-07NA27344
Research Org:
LLNL (Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States))
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Other works cited in this record:

Flexible miniature ribbon cables for long-term connection to implantable sensors
journal, April 1990
  • Hetke, J. F.; Najafi, K.; Wise, K. D.
  • Sensors and Actuators A: Physical, Vol. 23, Issue 1-3, p. 999-1002
  • DOI: 10.1016/0924-4247(90)87076-U

Review Article Tactile sensing for mechatronics—a state of the art survey
journal, February 1999

New tactile sensor chip with silicone rubber cover
journal, September 2000
  • Leineweber, Michael; Pelz, Georg; Schmidt, Michael
  • Sensors and Actuators A: Physical, Vol. 84, Issue 3, p. 236-245
  • DOI: 10.1016/S0924-4247(00)00310-1

A miniature piezoelectric polymer transducer for in vitro measurement of the dynamic contact stress distribution
journal, June 1992
  • Manouel, Mehran; Pearlman, Hubert S.; Belakhlef, Abdelfatihe
  • Journal of Biomechanics, Vol. 25, Issue 6, p. 627-635
  • DOI: 10.1016/0021-9290(92)90104-9

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