Method of making nanopatterns and nanostructures and nanopatterned functional oxide materials
Method for nanopatterning of inorganic materials, such as ceramic (e.g. metal oxide) materials, and organic materials, such as polymer materials, on a variety of substrates to form nanopatterns and/or nanostructures with control of dimensions and location, all without the need for etching the materials and without the need for re-alignment between multiple patterning steps in forming nanostructures, such as heterostructures comprising multiple materials. The method involves patterning a resist-coated substrate using electron beam lithography, removing a portion of the resist to provide a patterned resist-coated substrate, and spin coating the patterned resist-coated substrate with a liquid precursor, such as a sol precursor, of the inorganic or organic material. The remaining resist is removed and the spin coated substrate is heated at an elevated temperature to crystallize the deposited precursor material.
- Issue Date:
- OSTI Identifier:
- Northwestern University (Evanston, IL) DOESC
- Patent Number(s):
- Application Number:
- Contract Number:
- Research Org:
- Northwestern University, Evanston, IL, USA
- Sponsoring Org:
- Country of Publication:
- United States
- 77 NANOSCIENCE AND NANOTECHNOLOGY
Other works cited in this record:Polymer surface modification by plasmas and photons
journal, May 1996
- Chan, C.-M.; Ko, T.-M.; Hiraoka, H.
- Surface Science Reports, Vol. 24, Issue 1-2, p. 1-54
Directed Self-Assembly of Silica Nanoparticles into Nanometer-Scale Patterned Surfaces Using Spin-Coating
journal, August 2004
- Xia, D.; Biswas, A.; Li, D.
- Advanced Materials, Vol. 16, Issue 16, p. 1427-1432
Similar records in DOepatents and OSTI.GOV collections: