Test surfaces useful for calibration of surface profilometers
Abstract
The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer.
- Inventors:
- Issue Date:
- Research Org.:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1113535
- Patent Number(s):
- 8616044
- Application Number:
- 12/408,508
- Assignee:
- The Regents of the University of California (Oakland, CA); Brookhaven Science Associates, LLC (Upton, NY)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
- DOE Contract Number:
- AC02-05CH11231; AC02-98CH10886
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Yashchuk, Valeriy V, McKinney, Wayne R, and Takacs, Peter Z. Test surfaces useful for calibration of surface profilometers. United States: N. p., 2013.
Web.
Yashchuk, Valeriy V, McKinney, Wayne R, & Takacs, Peter Z. Test surfaces useful for calibration of surface profilometers. United States.
Yashchuk, Valeriy V, McKinney, Wayne R, and Takacs, Peter Z. Tue .
"Test surfaces useful for calibration of surface profilometers". United States. https://www.osti.gov/servlets/purl/1113535.
@article{osti_1113535,
title = {Test surfaces useful for calibration of surface profilometers},
author = {Yashchuk, Valeriy V and McKinney, Wayne R and Takacs, Peter Z},
abstractNote = {The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {12}
}
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