Test surfaces useful for calibration of surface profilometers
Abstract
The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer.
- Inventors:
- Issue Date:
- Research Org.:
- Brookhaven National Laboratory (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1113535
- Patent Number(s):
- 8616044
- Application Number:
- 12/408,508
- Assignee:
- The Regents of the University of California (Oakland, CA); Brookhaven Science Associates, LLC (Upton, NY)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
- DOE Contract Number:
- AC02-05CH11231; AC02-98CH10886
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Yashchuk, Valeriy V, McKinney, Wayne R, and Takacs, Peter Z. Test surfaces useful for calibration of surface profilometers. United States: N. p., 2013.
Web.
Yashchuk, Valeriy V, McKinney, Wayne R, & Takacs, Peter Z. Test surfaces useful for calibration of surface profilometers. United States.
Yashchuk, Valeriy V, McKinney, Wayne R, and Takacs, Peter Z. Tue .
"Test surfaces useful for calibration of surface profilometers". United States. https://www.osti.gov/servlets/purl/1113535.
@article{osti_1113535,
title = {Test surfaces useful for calibration of surface profilometers},
author = {Yashchuk, Valeriy V and McKinney, Wayne R and Takacs, Peter Z},
abstractNote = {The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 31 00:00:00 EST 2013},
month = {Tue Dec 31 00:00:00 EST 2013}
}
Works referenced in this record:
Method for optimizing QWIP grating depth
patent, January 2001
- Borenstain, Shmuel
- US Patent Document 6,172,379
Calibration standards for profilometers and methods of producing them
patent, November 1996
- Bayer, Thomas; Greschner, Johann; Martin, Yves C.
- US Patent Document 5,578,745