Process and structures for fabrication of solar cells with laser ablation steps to form contact holes
Abstract
Contact holes of solar cells are formed by laser ablation to accomodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thickness.
- Inventors:
- Issue Date:
- Research Org.:
- SunPower Corporation (San Jose, CA)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1108939
- Patent Number(s):
- 8586403
- Application Number:
- 13/028,059
- Assignee:
- SunPower Corporation (San Jose, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- DOE Contract Number:
- FC36-07GO17043
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 14 SOLAR ENERGY
Citation Formats
Harley, Gabriel, Smith, David D, Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, and Cousins, Peter John. Process and structures for fabrication of solar cells with laser ablation steps to form contact holes. United States: N. p., 2013.
Web.
Harley, Gabriel, Smith, David D, Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, & Cousins, Peter John. Process and structures for fabrication of solar cells with laser ablation steps to form contact holes. United States.
Harley, Gabriel, Smith, David D, Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, and Cousins, Peter John. Tue .
"Process and structures for fabrication of solar cells with laser ablation steps to form contact holes". United States. https://www.osti.gov/servlets/purl/1108939.
@article{osti_1108939,
title = {Process and structures for fabrication of solar cells with laser ablation steps to form contact holes},
author = {Harley, Gabriel and Smith, David D and Dennis, Tim and Waldhauer, Ann and Kim, Taeseok and Cousins, Peter John},
abstractNote = {Contact holes of solar cells are formed by laser ablation to accomodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thickness.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {11}
}
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